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    • 38. 发明授权
    • Two-axis actuator with large stage
    • 双轴执行器大台阶
    • US07142077B2
    • 2006-11-28
    • US10922140
    • 2004-08-20
    • Kyoung-lock BaeckJong-up JunJu-hwan JungSeung-bum HongDong-ki MinHong-sik Park
    • Kyoung-lock BaeckJong-up JunJu-hwan JungSeung-bum HongDong-ki MinHong-sik Park
    • H01H51/22
    • H02N1/008H02K2201/18
    • A two-axis actuator having a large stage area and including includes a substrate, an anchor unit having sides approximately in a rectangular shape, fixed on the substrate, a plurality of first actuating parts actuating in a first direction and separated from the substrate within regions of both sides of the anchor unit, a plurality of second actuating parts actuating in a second direction between the first actuating parts, a rectangular shaped stage that actuates in the second direction, disposed above the second actuating parts, a third actuating part formed on the first actuating part, and elevated at a predetermined distance from the stage and the anchor unit, first direction deformable springs that support the first actuating part in inner parts of the anchor unit, and second direction deformable springs formed to fix the second actuating part in an inner part of the third actuating part.
    • 具有大台阶区域的双轴致动器包括:基板,具有固定在基板上的大致矩形形状的侧面的锚定单元,多个第一致动部件,其在第一方向上致动并且在区域内与基板分离 所述锚定单元的两侧的多个第二致动部件在所述第一致动部件之间沿第二方向致动,所述第二致动部件设置在所述第二致动部件上方的在所述第二方向上致动的矩形台架, 第一致动部件,并且与所述平台和所述锚固单元一起预定距离地升高,所述第一方向可变形弹簧,其支撑所述锚固单元的内部部分中的所述第一致动部件;以及第二方向可变形弹簧,其形成为将所述第二致动部件固定在 第三驱动部件的内部部分。
    • 40. 发明授权
    • XY stage module, storage system employing the same and method for fabricating the XY stage module
    • XY平台模块,采用该模块的存储系统以及用于制造XY平台模块的方法
    • US07316072B2
    • 2008-01-08
    • US11546240
    • 2006-10-12
    • Hong-sik ParkJu-hwan JungSeung-bum HongDong-ki Min
    • Hong-sik ParkJu-hwan JungSeung-bum HongDong-ki Min
    • G01B5/004
    • G11B9/1454B82Y10/00
    • An XY stage module, a storage system including the same and a method for facating the XY stage module are provided. The XY stage module includes: a base; an XY stage horizontally moving above the base in a first direction and a second direction that is orthogonal to the first direction; a supporting unit disposed at the base for elastically supporting the XY stage; a stiffener for preventing the XY stage from being rotated; and a position sensor having a movable comb-shaped structure disposed at one side of the stiffener and having at least one movable comb and a fixed comb-shaped structure fixed on the base and having at least one fixed comb meshed with the movable comb to be separated at a predetermined gap for measuring a movement of the XY stage in the first direction and the second direction.
    • 提供了一种XY平台模块,包括该XY平台模块的存储系统和用于使XY平台模块的平面化的方法。 XY台模块包括:基座; XY台在第一方向上在基座上方水平移动,第二方向与第一方向正交; 设置在所述基座上用于弹性地支撑所述XY平台的支撑单元; 用于防止XY平台旋转的加强件; 以及位置传感器,其具有设置在所述加强件的一侧的可移动梳状结构,并且具有固定在所述基座上的至少一个活动梳和固定梳状结构,并且具有与所述活动梳状物啮合的至少一个固定梳 在预定间隙处分离,以测量XY台在第一方向和第二方向上的运动。