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31. 发明专利

JPH01111427A ISOTOPE SEPARATOR 失效
公开(公告)号：JPH01111427A
公开(公告)日：1989-04-28
申请号：JP26639287
申请日：1987-10-23
申请人： HITACHI LTD
发明人： HIGUCHI YOSHIYA
IPC分类号： B01D59/48
摘要： PURPOSE:To make selective ionization easy by applying to a beam of natural atoms a magnetic field whose intensity has a gradient in the direction perpendicular to the direction in which the beam of neutral atoms is going. CONSTITUTION:A beam of neutral atoms of natural uranium is formed and allowed to go through a magnetic field area having components in the direction perpendicular to the direction in which the beam is going. The intensity of the magnetic field in the direction perpendicular to these two directions has been made to have a gradient. A magnetic dipole mu placed in the magnetic field B changes its direction so as to be B mu, and is affected by a force f=DELTA (mu.B). Uranium 235 atoms incident into this magnetic field area have a magnetic dipole efficiency muu235 in their atomic nuclei, with the direction of the muu235 being equally directed to the direction of the magnetic field, and are affected by a force in the direction of Z. This force deflects the uranium 235 atoms and separates them from uranium 238 atoms. Thus, the separating efficiency can be improved.

32. 发明专利

JP2002020865A SPUTTERING SYSTEM, SPUTTERING BACKUP UNIT, AND METHOD FOR CONTROLLING SPUTTERING 失效
公开(公告)号：JP2002020865A
公开(公告)日：2002-01-23
申请号：JP2000208227
申请日：2000-07-05
申请人： HITACHI LTD
发明人： NAGAMINE YOSHIHIKO , HIGUCHI YOSHIYA , SATO TADASHI , KIYONO TOMOYUKI , KAMEI MITSUHIRO
IPC分类号： C23C14/34 , C23C14/54 , H01J37/32
摘要： PROBLEM TO BE SOLVED: To keep film deposition rate constant without changing electric power consumption. SOLUTION: In a vacuum chamber, high-frequency power is supplied to a target electrode and a substrate electrode to produce plasma and a target is sputtered by ions in the plasma to carry out film deposition on a substrate. The amount of impurities inside the vacuum chamber is detected. According to the resultant detected value, the phase difference of the high-frequency power supplied to the respective electrodes is controlled.

33. 发明专利

JP2000005939A THREE-DIMENSIONAL PRODUCT FABRICATION SYSTEM 失效
公开(公告)号：JP2000005939A
公开(公告)日：2000-01-11
申请号：JP17690498
申请日：1998-06-24
申请人： HITACHI LTD
发明人： KOTABE AKIE , TAKAGI TARO , SUZUKI HIROAKI , HIGUCHI YOSHIYA
IPC分类号： B23P13/00 , G05B19/408 , G06F17/50
摘要： PROBLEM TO BE SOLVED: To easily fabricate a three-dimensional shape desired by the user who does not have the know-how of machining techniques. SOLUTION: A three-dimensional product fabrication system includes a three- dimensional shape reading device 1, an image display device 4, an information processing device 5, a command input device 6, a three-dimensional shape machining device 7, and a waste removal device 8. The information processing device 5, using data about the three-dimensional shape of a subject read by the three-dimensional shape-reading device 1, originates the three-dimensional shape data needed to machine products. The three-dimensional shape machining device 7, using the product-machining three-dimensional shape data outputted from the information processing device 5, machines material to machine the products of the three-dimensional shape desired by the user. The waste removal device 8 discharges chips generated during machining. The information processing device 5 originates product three-dimensional diagram information using the three-dimensional shape data prior to machining of the material and this diagram information is displayed on the image display device 4. The user can check the shape of the product beforehand.

34. 发明专利

JPH10341518A GAS INSULATING BUS, AND GAS INSULATING SWITCHGEAR USING IT 失效
公开(公告)号：JPH10341518A
公开(公告)日：1998-12-22
申请号：JP14935297
申请日：1997-06-06
申请人： HITACHI LTD
发明人： IMAMURA YUKINOBU , HIGUCHI YOSHIYA , KOIZUMI MAKOTO
IPC分类号： H02B13/02 , H02G5/06 , H02G5/10
摘要： PROBLEM TO BE SOLVED: To remove the inner short circuit, and reduce the loss of generated heat caused by an eddy current, by connecting circular conductors, which are made of the same conductors as low-resistance connecting conductors being arranged severally close to each three-phase conductor within conductive bellows, between the connecting conductors, and connecting conductive tanks and the connecting conductors through connections. SOLUTION: A three-phase conductor 1 made of aluminum material is accommodated and sealed together with incombustible gas at, for example, about 3-5 atmospheric pressures, within tanks 3 and 3' made of aluminum material and bellows 4 made of stainless material through an insulating spacer. A shield means 5 against an eddy current made of a low-resistance conductor is composed of a joint plate 5a and a joint ring 5b. The joint plates 5a are installed at three places in the positions each contiguous to a three-phase conductor 1, outside of the bellows 4, and both ends each of them are electrically connected with tanks 3 and 3'. Furthermore, these three sheets of joint plates 5a are connected with one another by the joint rings 5b in the vicinity of both ends, resulting or integral form.

35. 发明专利

JPH09180946A TRANSFORMER 失效
公开(公告)号：JPH09180946A
公开(公告)日：1997-07-11
申请号：JP17610996
申请日：1996-07-05
申请人： HITACHI LTD
发明人： HIGUCHI YOSHIYA , KOIZUMI MAKOTO , INAGAKI KEIZO , FUJITA HIROYUKI
IPC分类号： H01F27/36 , H01F27/32 , H01F27/34
摘要： PROBLEM TO BE SOLVED: To lessen an eddy current which occurs in paths of large area on the peripheral surface of a tank. SOLUTION: When a leakage magnetic flux 6 occurs through a winding gap 5, an electromotive force is induced by the leakage magnetic flux 6 to act on a shielding means 8, an eddy current 7 is generated along the inner periphery of the shield means 8, the eddy current 7 generates a magnetic field opposite in direction to the leakage magnetic flux 6 generated through the winding gap 5, so that an eddy current 7' is restrained from occurring inside the peripheral wall 41 of the tank 4. Therefore, even if a low-voltage winding 2 and a high-voltage winding 3 are close to the iron tank 4, the tank 4 can be lessened in heat as much as possible, so that the low-voltage winding 2 and the high-voltage winding 3 can be made to approach the iron tank, and a transformer of this constitution can be lessened in size.

36. 发明专利

JPH0944473A TECHNIQUE FOR ANALYZING PARTIAL DIFFERENTIAL EQUATION BY FINITE ELEMENT METHOD 失效
公开(公告)号：JPH0944473A
公开(公告)日：1997-02-14
申请号：JP19003995
申请日：1995-07-26
申请人： HITACHI LTD
发明人： KOIZUMI MAKOTO , HIGUCHI YOSHIYA
IPC分类号： G06F17/50 , G06F17/13
摘要： PROBLEM TO BE SOLVED: To reduce the distortion of an element and to reduce an analysis error by allowing the partial overlapping of elements and prevent simultaneous equations from being peculiar by transmitting the data of the overlapped part with each other. SOLUTION: Space is divided into an element 1 and an element 2 and an element division is performed so that each element may overlap with each other. The vector 5 on the boundary of the boundary 1 of the element 1 is interporated by using the vector 8 in the interior of the element 2 and is used as the boundary value of the element 1. The vector 6 on the boundary of the element 2 is interporated by using the vector 5 in the interior of the element 1 and is used as the boundary value of the element 2. The direction of the interporated vector is not matched with the direction of the side element which is used as the boundary value. In order to take out the component of the side element, the inner product of the side direction vector (the covariant vector or the contravariant vector of the side is used according to the way of defining an unknown number) and the interporated vector is taken. In this way, the component of the vector along the side is obtained. Thus, simultaneous equations become regular and a solution can be obtained by connecting the element 1 and the element 2 by data.

37. 发明专利

JPH0684800A PLASMA PROCESSING DEVICE 失效
公开(公告)号：JPH0684800A
公开(公告)日：1994-03-25
申请号：JP23680992
申请日：1992-09-04
申请人： HITACHI LTD , HITACHI ENG SERVICE
发明人： KAZUMI HIDEYUKI , TETSUKA TSUTOMU , YOSHIOKA TAKESHI , HIGUCHI YOSHIYA , SHIRAKAWA SHINJI , SUZUKI KAZUO
IPC分类号： H01L21/205
摘要： PURPOSE:To control the sputtering speed or sputtering amount of a substrate by applying a high-frequency voltage across the substrate and installing an earth plate near the substrate, and then, changing the impedance of the earth plate or substrate. CONSTITUTION:A high-frequency voltage is applied across a substrate 6 from a high-frequency circuit 7 and an earth plate 9 is installed near the substrate 6. The earth plate 9 has a variable area and, when the effective earth area becomes smaller due to the deposition of a resulted product of reaction, the plate 9 is moved upward or downward so as to compensate the reduction in area. By connecting in advance an impedance changing means 10 composed of a variable capacity and variable resistance to the substrate and earth, the impedance of the substrate or earth or the applying frequency of a high-frequency power source 11 is changed. Therefore, the incident ion energy or incident ion amount to the substrate can be freely changed.

38. 发明专利

JPH0278135A INLINE-TYPE ELECTRON GUN 失效
公开(公告)号：JPH0278135A
公开(公告)日：1990-03-19
申请号：JP22958488
申请日：1988-09-13
申请人： HITACHI LTD
发明人： SANO HIROKI , OSE YOICHI , HIGUCHI YOSHIYA
IPC分类号： H01J29/51
摘要： PURPOSE:To negate diamagnetic field due to generation of eddy current so as to lower misconvergence by running an electric current of a conductor loope in the direction so as to intensify the change of a magnetic field in a near area of a center beam passing hole. CONSTITUTION:Conductive wire 21 is brought to cross in two points and each side loope 40a, 40c is formed upside of a side beam passing hole and a center loope 40b is formed upside of a center beam passing hole. When horizontal deflecting magnetic field 30 is increased, eddy current 31a, 31b runs in the side plane of a shield cup 8 so as to inhibit the change. A diamagnetic field 32 is thus formed and a deflecting magnetic field weakens in a near area to a center beam passing hole 15b as compared to side beam passing holes 15a, 15c. On the other hand, due to the change of the magnetic field 30, electromotive force is generated in each loope, the change of magnetic fluxes passing the closed curved plane 40a, 40c become larger than that passing the closed curved plane 40b, an electric current 23 starts running in the whole of the loopes, and a magnetic field 22b in the direction to intensify the magnetic field 30 in a near area of the hole 15b is generated. As a result, the magnetic field in the near area to the hole 15b is prevented from weakening.

39. 发明专利

JPH01117256A CHARGED PARTICLE BEAM SHAPING DEVICE 失效
公开(公告)号：JPH01117256A
公开(公告)日：1989-05-10
申请号：JP27302387
申请日：1987-10-30
申请人： HITACHI LTD
发明人： HIGUCHI YOSHIYA
IPC分类号： H01J37/141
摘要： PURPOSE:To convert an emitted electron beam of cylindrical shape into a sheet- shaped beam with Meissner effect and improve performance including convergence by providing two superconductor plates for surrounding the beam at the passage thereof. CONSTITUTION:Two superconductor pieces C curved as shown in the drawing are provided to enclose an electron beam B at the passage thereof. The beam B of cylindrical shape emitted from an electron gun A forms a circular magnetic field in a peripheral direction. When this beam B is sandwiched by the walls of the superconductors C, the magnetic field is unable to enter the superconductors C due to Meissner effect and pressed to shrink toward the beam B, thereby increasing flux density at the side thereof. And an electron flow near the surface of the beam B is subjected to a force toward a center with Lorentz's force due to the magnetic field, and converted into a sheet form. According to the aforesaid system, the electron flow can be easily converted into a sheet form by use of a cylindrical beam and performance including convergence and the like is improved.

40. 发明专利

JP2001338800A NEUTRON GENERATOR 失效
公开(公告)号：JP2001338800A
公开(公告)日：2001-12-07
申请号：JP2000164728
申请日：2000-05-30
申请人： HITACHI LTD
发明人： HIGUCHI YOSHIYA , NAGAMINE YOSHIHIKO , OKAZAKI TAKASHI
IPC分类号： G21G4/02 , G21K5/02 , H05H3/06 , H05H13/10
摘要： PROBLEM TO BE SOLVED: To provide a neutron bundle of high output by accelerating ions, such as heavy hydrogen or the like by the use of a new accelerator and to cause them to undergo nuclear fusion, eliminat electrostat6ic accelerating electrode which causes overheat. SOLUTION: Two disc-like electrodes are arranged in parallel, and a power source is connected to these electrodes to apply sine-wave fluctuating voltages of the same electric potential thereto. Two upper and lower porous electromagnets are set in a magnetic field deflection part, to apply an axial magnetic field. The electrode parts are connected to the magnetic field deflection part inside a vacuum vessel, and the vacuum vessel is fixed to grounding potential. The disc-like electrodes are retained in a part of the vacuum vessel via insulating glasses. The magnetic field applied by the electromagnet and the frequency of the fluctuating voltage applied to the electrodes are adjusted, so that the cyclotron frequency of a charged particle generated in the vacuum vessel matches with the frequency of the sine-wave fluctuating voltages applied to the electrodes.

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