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    • 31. 发明申请
    • POSITIVE TYPE RESIST POLYMER COMPOSITION AND METHOD OF MAKING RESIST PATTERNS
    • 正性型抗蚀剂组合物及抗蚀剂图案的制造方法
    • WO1979000284A1
    • 1979-05-31
    • PCT/JP1978000022
    • 1978-11-06
    • FUJITSU LTDYONEDA YKITAMURA KKITAKOHJI T
    • FUJITSU LTD
    • G03C01/72
    • G03F7/039Y10S430/143
    • A positive type resist polymer crosslinkable composition resistant to ionizing radiation or ultraviolet rays and composed of the following units (a), (b) and (c) respectively in a polymerized state: (a) a unit derived from methacrylic acid ester which is represented by the formula: CH2 = C(CH3) . COOR (wherein R represents alkyl or haloalkyl radicals having 1 to 6 carbon atoms, benzyl radical or cyclohexyl radical), (b) a unit derived from mono-olefinic unsaturated carboxylic acid having 3 to 12 carbon atoms and 1 to 3 carboxylic radicals, and (c) a unit derived from methacrylic acid chloride. The quantity of unit (b) is such that the number of carboxyl radicals in each unit (b) multiplied by the molarity of the respective unit (b) is equal to about 10 to 20 molar percent of the total molarity of units (a), (b) and (c). The quantity of unit (c) is about 0.05 to 3.0 molar percent of the total molarity of units (a) (b) and (c). The ratio of the molarity of unit (b) multiplied by the number of carboxyl radicals in each unit (b) to the molarity of unit (c) is more than 2/1 but less than 25/1. The polymer composition is preferably a copolymer composed of units (a), (b) and (c) or a composition consisting of a copolymer composed of a part of unit (a) and unit (b) and a copolymer consisting of the residual part of unit (a) with unit (c).
    • 正型抗蚀剂作用于电离或紫外线辐射的作用可交联的聚合物组合物构成的元件(A),(b)和(c)中的状态下分别以下聚合:(a)一种元素 衍生自甲基丙烯酸酯,由式:CH 2 = C(CH 3)表示。 COOR(式中,R表示烷基或卤代烷基的碳原子数为1〜6,苄基或基团cyclobexyle),其具有3至12个碳,(b)由羧酸衍生得到的元件的单烯属不饱和 碳和1至3个羧基,和(c)甲基丙烯酸氯化物的衍生物。 在元件(B)的量使得(B)乘以羧基中的每个元素的数量由各个元件的摩尔浓度(b)是总摩尔浓度的约10至20摩尔%的 元素(a),(b)和(c)。 元素(c)的量为元素(a),(b)和(c)的总摩尔量的约0.05至3摩尔%。 元素(b)的摩尔数乘以每个元素(b)中的羧基数量与元素(c)的摩尔数的比率大于2/1但小于25/1。 的聚合物组合物是,优选地,(其中的元件的(a),(b)和(c)或由所述元件(a)和元件的一部分构成的共聚物的组合物构成的共聚物B )和由元素(a)的剩余部分与元素(c)组成的共聚物。
    • 36. 发明申请
    • MAGNETIC BUBBLE DOMAIN EXCHANGING CIRCUIT
    • 磁性泡沫交换电路
    • WO1981000322A1
    • 1981-02-05
    • PCT/JP1980000159
    • 1980-07-16
    • FUJITSU LTDYANASE T
    • FUJITSU LTD
    • G11C11/14
    • G11C19/0883
    • A magnetic bubble domain exchanging circuit (28) including an information-transfer path (21) along which magnetic bubble domains are transferred and an information-storing loop (22) in which magnetic bubble domains are stored, wherein magnetic bubble domains in the information-transfer path (21) are transferred shifted to the information-storing loop (22) and magnetic bubble domains in the information-storing loop (22) are transferred to the information-transfer path (21). The period of a magnetic body pattern, which body forms the information-transfer path (21), is set to be greater than that of the magnetic body forming the information-storing loop (22). If A designates the exit from the information-transfer path (21) to the information-storing loop (22), B the entrance from the information-storing loop (22), C the exit from the information-storing loop (22) to the information-transfer path (21) and D the entrance from the information-transfer path (21), the bit-length intervals between two of these points are related in the following manner: AB (Alpha) CD, AD = CD, AB = BC. Thus, the region necessary to form the magnetic bubble domain exchanging circuit (28) is enlarged and the pattern width of transfer-controlling conductor-patterns (27) is increased, so that a sufficient operationing margin is obtained.