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31. 发明专利

JPH08197417A METHOD FOR DETECTING POLISHING END POINT 失效
公开(公告)号：JPH08197417A
公开(公告)日：1996-08-06
申请号：JP2481295
申请日：1995-01-19
申请人： EBARA CORP
发明人： KIMURA NORIO , SAKATA FUMIHIKO , TAKAHASHI YOSHIMIZU
IPC分类号： B24B37/013 , B24B37/07 , B24B49/16 , B24B37/04
摘要： PURPOSE: To detect the end point of polishing that becomes hard to be detected owing to the reciprocal motion of a top ring during polishing. CONSTITUTION: A top ring 13 holding a workpiece 14 to be polished is pressed on the abrasive cloth 11 stuck to the top face of a turn table 12, and the end point of polishing to mirror-finish a workpiece is detected with the top ring 13 reciprocated on the turn table 12. The torque, which acts on the turn table 12 positioned at a position of which the distance from the rotary center of the turn table 12 of the top ring 13 which is reciprocated is same, is intermittently detected to detect the changes in the polish friction force caused when the polishing of the workpiece 14 reaches a different material.

32. 发明专利

JP2014136186A Seawater desalination system and energy recovery apparatus 有权
标题翻译：海水淡化系统和能源回收装置
公开(公告)号：JP2014136186A
公开(公告)日：2014-07-28
申请号：JP2013005576
申请日：2013-01-16
申请人： Ebara Corp , 株式会社荏原製作所
发明人： TAKAHASHI YOSHIMIZU , GOTO AKIRA , SHINODA MASAO , TAKITA SHIGEO
IPC分类号： B01D61/06 , B01D61/02 , C02F1/44
CPC分类号： Y02A20/131
摘要： PROBLEM TO BE SOLVED: To provide an energy recovery apparatus capable of constituting a chamber using an inexpensive ready-made article having a large flow amount and an inside diameter of 8 inches (200 mm) or less while making use of the characteristics of a piston-free type energy recovery chamber and capable of increasing a treating flow amount.SOLUTION: An energy recovery apparatus comprises: a plurality of cylindrical chambers 20-1, 20-2 and 20-3 having spaces to store concentrated seawater and seawater inside and arranging longitudinal directions to be vertical; concentrated seawater ports P1 being arranged at the lower part of each chamber and supplying and discharging the concentrated seawater; seawater ports P2 being arranged at the upper part of each chamber and supplying and discharging the seawater; and concentrated seawater supplying and discharging valves 6 connected to the concentrated seawater ports supplying and discharging the concentrated seawater. In the concentrated seawater supplying and discharging valves 6, supplying and discharging ports CP are branched and connected to the concentrated seawater ports P1 of a plurality of the chambers 20-1, 20-2 and 20-3.
摘要翻译：要解决的问题：提供能够使用具有大的流量和内径为8英寸（200mm）或更小的便宜的现成制品构成室的能量回收装置，同时利用活塞的特性能量回收装置包括：多个圆柱形室20-1,20-2和20-3，其具有在其内部存储集中海水和海水的空间，并且排列纵向方向垂直; 浓缩海水口P1布置在每个室的下部，并供给和排出浓缩海水; 海水口P2布置在每个室的上部并供给和排出海水; 和集中的海水供应和排出阀6连接到集中海水口供应和排出浓缩海水。在集中的海水供给排出阀6中，供给排出口CP分支并与多个室20-1,20-2,20-3-3的浓缩海水口P1连接。

33. 发明专利

JP2013139012A Seawater desalination system and energy recovery apparatus 审中-公开
标题翻译：海水淡化系统和能源回收装置
公开(公告)号：JP2013139012A
公开(公告)日：2013-07-18
申请号：JP2012000921
申请日：2012-01-06
申请人： Ebara Corp , 株式会社荏原製作所
发明人： TAKAHASHI YOSHIMIZU , MAEDA KAZUAKI
IPC分类号： B01D61/06 , B01D61/02 , C02F1/44 , G01N27/10
CPC分类号： Y02A20/131
摘要： PROBLEM TO BE SOLVED: To provide an energy recovery apparatus which detects an electric resistance corresponding to the proportion of the amount of concentrated seawater and the amount of seawater in an energy recovery chamber, and can use the detected electric resistance to control the switching of water supply and drainage of the concentrated seawater and seawater to the energy recovery chamber.SOLUTION: This energy recovery apparatus includes: a chamber 20 that has a space to accommodate the concentrated seawater and seawater internally; a concentrated seawater port P1 that is provided at an end of the chamber 20 to supply and drain the concentrated seawater; a seawater port P2 that is provided at the other end of the chamber 20 to supply and drain the seawater; a first electrode 31 provided on one end side in the chamber 20; a second electrode 32 provided on the other end side in the chamber 20; and a detector 35 that is connected with the first electrode and the second electrode and measures the electric resistance between the first electrode and the second electrode by supplying an alternating current to the first electrode and the second electrode.
摘要翻译：要解决的问题：提供一种能量回收装置，其检测与能量回收室中的浓缩海水量和海水量的比例相对应的电阻，并且可以使用检测到的电阻来控制水的切换将集中的海水和海水供给和排出到能量回收室。解决方案：该能量回收装置包括：室20，其具有在内部容纳浓缩海水和海水的空间; 集中的海水口P1设置在室20的端部以供给和排出浓缩的海水; 设置在室20的另一端以供给和排出海水的海水口P2; 设置在室20的一端侧的第一电极31; 设置在腔室20的另一端侧的第二电极32; 以及检测器35，其与第一电极和第二电极连接，并且通过向第一电极和第二电极提供交流电流来测量第一电极和第二电极之间的电阻。

34. 发明专利

JP2009028892A Polishing device and polishing method 有权
标题翻译：抛光装置和抛光方法
公开(公告)号：JP2009028892A
公开(公告)日：2009-02-12
申请号：JP2008160380
申请日：2008-06-19
申请人： Ebara Corp , 株式会社荏原製作所
发明人： TAKAHASHI YOSHIMIZU , SEKI MASAYA , KUSA HIROAKI , ITO KENYA
IPC分类号： B24B21/00 , H01L21/304
CPC分类号： B24B21/002 , B24B9/065 , H01L21/68707 , H01L21/68792
摘要： PROBLEM TO BE SOLVED: To provide a polishing device capable of obtaining stable polishing performance with the approximately constant tension of a polishing tape during polishing, and capable of increasing polishing speed.
SOLUTION: The polishing device polishes an object to be polished by relatively moving the polishing tape 41 and the object W to be polished. The polishing device comprises a holding part 20 for holding the object W to be polished, a polishing head 42 for making the polishing tape 41 contact with the object to be polished, a feeding reel 45a for supplying the polishing tape to the polishing head, a retrieving reel 45b for retrieving the polishing tape which has contacted with the object to be polished, and a swinging mechanism for making the polishing head perform swinging movement around a predetermined point. The polishing tape extends from the feeding reel via a point Cn to the object to be polished.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够在抛光期间以研磨带的大致恒定的张力获得稳定的抛光性能并且能够提高抛光速度的抛光装置。解决方案：抛光装置通过相对移动抛光带41和要抛光的物体W来抛光待抛光物体。抛光装置包括用于保持要抛光的物体W的保持部分20，用于使抛光带41与被抛光物体接触的抛光头42，用于将抛光带供应到抛光头的馈送卷轴45a，用于回收与待抛光物体接触的研磨带的回收卷轴45b以及使抛光头围绕预定点进行摆动的摆动机构。研磨带从进给卷轴经由点Cn延伸到待抛光对象。版权所有（C）2009，JPO＆INPIT

35. 发明专利

JP2005034992A Detection method of polishing endpoint 审中-公开
标题翻译：抛光端点检测方法
公开(公告)号：JP2005034992A
公开(公告)日：2005-02-10
申请号：JP2004315995
申请日：2004-10-29
申请人： Ebara Corp , 株式会社荏原製作所
发明人： KIMURA NORIO , SAKATA FUMIHIKO , TAKAHASHI YOSHIMIZU
IPC分类号： B24B49/10 , B24B37/013 , H01L21/304 , B24B37/04
摘要： PROBLEM TO BE SOLVED: To provide a method which can detect an end point of polishing that becomes difficult to be detected by reciprocating a top ring. SOLUTION: In the polishing end point detection method, a polishing object 14 is polished into a flat and mirror face by pressing the top ring 13 holding the polishing object 14 on a piece of polishing cloth 11 bonded on a rotating turntable 12. The detection method comprises the steps of reciprocating the top ring 13 over the turntable 12 by a swing mechanism, detecting the current values of a turntable drive motor 16 at predetermined positions which are away in the same distance from the rotation center of the turntable 12 over which the top ring reciprocates, comparing the current values with the average value of the previously detected current values at the same positions, and detecting the change of polishing frictional force. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种可以通过使顶环往复运动来检测难以检测的抛光终点的方法。解决方案：在抛光终点检测方法中，通过将保持抛光对象14的顶环13压在接合在旋转转台12上的一块抛光布11上，将抛光对象14抛光成平面和镜面。检测方法包括以下步骤：通过摆动机构使顶环13在转台12上方往复运动，在与转台12的旋转中心相距离的预定位置处检测转盘驱动电动机16的电流值其中顶环往复运动，将当前值与先前检测到的当前值在相同位置的平均值进行比较，并检测抛光摩擦力的变化。版权所有（C）2005，JPO＆NCIPI

36. 发明专利

JP2002122104A HYDRAULIC SERVO VALVE 失效
公开(公告)号：JP2002122104A
公开(公告)日：2002-04-26
申请号：JP2000311531
申请日：2000-10-12
申请人： EBARA CORP
发明人： TAKAHASHI YOSHIMIZU , CHIBA KATSUTOSHI
IPC分类号： F15B13/043
摘要： PROBLEM TO BE SOLVED: To provide a feedback type hydraulic servo valve capable of discharging liquid within a cylinder body of a displacement sensor part, discharging air remaining at the depth of the cylinder body in an assembling to the outside and preventing generation of rust at the inside of the cylinder body. SOLUTION: In the feedback system hydraulic servo valve for controlling the position of a spool 40 by feedbacking a detecting signal detected in the displacement sensor part 60, the displacement sensor part 60 is constituted so as to have the cylinder body 62 communicated with the inside of a hydraulic fluid inflow chamber 11L formed at an end part of a sleeve 20 at the inside, to store a core 62 connected via a connecting member 65 at an end part of the spool 40 within the cylinder body 62 and to arrange a coil 63 for detecting displacement of the core 64 at the outside of the cylinder body 62. A hollow hole 65b communicated with the cylinder body 62 is formed in the connecting member 65, a flow passage for introducing high pressure hydraulic fluid into the end part of the spool 40 at the time of non-control of the spool 40 and maximum displacement is formed and hydraulic fluid introduced into the flow passage is made to flow to the displacement sensor 60 side through the hollow hole 65b of the connecting member 65.

37. 发明专利

JPH11262939A PLASTIC MOLDING MACHINE 失效
公开(公告)号：JPH11262939A
公开(公告)日：1999-09-28
申请号：JP8800398
申请日：1998-03-17
申请人： EBARA CORP
发明人： MIYAGAWA SHINPEI , TAKAHASHI YOSHIMIZU
IPC分类号： B29C45/50 , B29C45/82
摘要： PROBLEM TO BE SOLVED: To provide a plastic molding machine equipped with the output density corresponding to oil pressure and control capacity and reducing environmental pollution or the contamination of a molded product. SOLUTION: In a plastic molding machine equipped with a heating cylinder 21 filled with a plasticized resin, the screw 22 advancing, retreating and rotating in the heating cylinder 21, the liquid pressure cylinder 23 moving and pressing the heating cylinder 21 and the screw 21, the liquid pressure motor 24 rotating the screw 22 and a mold 11 for molding the resin, a water pressure cylinder and a water pressure motor using water as a pressure medium driving the liquid pressure cylinder 23 and the liquid pressure motor 24 are provided.

38. 发明专利

JPH10184963A FLUID FORCE COMPENSATING METHOD AND SPOOL-TYPE FLOW CONTROL VALVE 失效
公开(公告)号：JPH10184963A
公开(公告)日：1998-07-14
申请号：JP34843096
申请日：1996-12-26
申请人： EBARA CORP
发明人： TAKAHASHI YOSHIMIZU , USAMI YUICHI
IPC分类号： F16K25/00 , F16K3/26 , F16K11/07 , F16K35/00 , F16K39/04
摘要： PROBLEM TO BE SOLVED: To generate the required swirling flow without making a bucket into a complicated shape. SOLUTION: In a method for compensating for fluid force of a flow control valve having a passage structure in which a spool 1 is supported in a sleeve S by a static bearing 19, and fluid from the static bearing 19 is allowed to flow into a valve space 16 of a land 2 of the spool 1 and the circumferential groove of the sleeve S, a circumferential groove 4 is formed on the land 2 of the spool 1, fluid from the bearing is allowed to axially flow to the space 16 formed of the circumferential groove 4 and the sleeve S, and the control flow is swirled by the bearing flow to compensate for fluid force.

39. 发明专利

JPH109437A HYDRAULIC SERVO VALVE 失效
公开(公告)号：JPH109437A
公开(公告)日：1998-01-13
申请号：JP18556496
申请日：1996-06-25
申请人： EBARA CORP
发明人： SHINODA MASAO , YAMASHINA TOMOSHIROU , USAMI YUICHI , TAKAHASHI YOSHIMIZU , URATA EIZO
IPC分类号： F16K3/24 , F15B13/044 , F15B21/06 , F16K31/124
摘要： PROBLEM TO BE SOLVED: To provide a hydraulic servo valve excellent in anti-cavitation erosion which can maintain the linear property of a spool valve flow rate characteristic. SOLUTION: A hydraulic servo valve is provided with a sleeve 2 in which a flow passage of an operation fluid fixed in a valve main body 1 is formed and a spool 13 which can move in the sleeve 2 and changeover the flow direction of the operation fluid and uses a water or a liquid with a viscosity near the water as the operation fluid. The mother material of at least one side liquid contact part of the sleeve 2 and spool 13 is coated with a hard material like seramic or cemented carbide. The hard material is coated by putting a roundness on the edges of the sleeve 2 and spool 13.

40. 发明专利

JPH09131663A POLISHING END POINT DETERMINING METHOD AND DEVICE THEREOF 失效
公开(公告)号：JPH09131663A
公开(公告)日：1997-05-20
申请号：JP30998295
申请日：1995-11-02
申请人： EBARA CORP , TOSHIBA CORP
发明人： TAKAHASHI YOSHIMIZU , SAKATA FUMIHIKO , KIMURA NORIO , KODERA MASAKO , SHIGETA ATSUSHI
IPC分类号： B24B37/013 , B24B37/04 , B24B49/16
摘要： PROBLEM TO BE SOLVED: To provide a polishing end point determining method and a device thereof which can flatten irregularities on a surface and determine a polishing end point at an arbitrary position after that. SOLUTION: In a method in which a polishing end point of polishing by which irregularities on a surface of an object to be polished is polished into a flat and mirror face is determined, friction force of a semiconductor wafer 3 and a polishing cloth 2 during polishing is detected, the time when irregularities on the surface are polished into a flat condition is determined based on a difference between friction force generated when the irregularities are polished and friction force produced when the irregularities are removed and a flat face is polished, and the polishing end point is determined after a specified period of time elapses from the time.

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