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    • 34. 发明申请
    • Apparatus for generating light in the extreme ultraviolet and use in a light source for extreme ultraviolet lithography
    • 用于在极紫外光中产生光并用于用于极紫外光刻的光源的装置
    • US20060039435A1
    • 2006-02-23
    • US11151696
    • 2005-06-13
    • Guy CheymolPhilippe CormontPierre-Yves ThroOlivier SublemontierMartin SchmidtBenoit Barthod
    • Guy CheymolPhilippe CormontPierre-Yves ThroOlivier SublemontierMartin SchmidtBenoit Barthod
    • H01S3/22H01S3/223
    • G03F7/70166B82Y10/00G03F7/70033H05G2/003H05G2/008
    • The device comprises a device (2) for creating an essentially linear target (4) in an evacuated space where laser beams (1) are focused, the target being suitable for interacting with the focused laser beams (1) to emit a plasma emitting radiation in the extreme ultraviolet. A receiver device (3) receives the target (4) after it has interacted with the focused laser beams (1), and a collector device (110) collects the EUV radiation emitted by the target (4). The focusing elements (11) for focusing the laser beams on the target (4) are arranged in such a manner that the laser beams (1) are focused on the target (4) laterally, being situated in a common half-space relative to the target (4) and being inclined at a determined angle lying in the range about 60° to about 90° relative to a mean collection axis (6) perpendicular to the target (4). The collector device (110) is disposed symmetrically about the mean collection axis (6) in the half-space containing the laser beams (1) focused on the target (4) and inside a conical space (8) centered on the mean collection axis (6) with a vertex situated at the target (4) and a half-angle at the vertex that is less than the angle of inclination of the focused laser beams (1) relative to the mean collection axis (6). The device is suitable for use as a source for EUV radiation in lithography for fabricating integrated circuits.
    • 该装置包括用于在激光束(1)被聚焦的抽空空间中产生基本上线性的目标(4)的装置(2),所述目标适合于与聚焦的激光束(1)相互作用以发射等离子体发射辐射 在极紫外线。 接收机装置(3)在与聚焦激光束(1)相互作用后接收目标(4),并且收集装置(110)收集目标(4)发射的EUV辐射。 用于将激光束聚焦在靶(4)上的聚焦元件(11)以这样一种方式被布置,使得激光束(1)横向聚焦在靶(4)上,相对于 目标(4)并相对于垂直于目标(4)的平均收集轴线(6)以确定的角度倾斜在约60°至约90°的范围内。 收集器装置(110)围绕包含聚焦在目标(4)上的激光束(1)的半空间中的平均收集轴线(6)对称地设置在以平均收集轴线为中心的锥形空间(8)内部 (6)具有位于目标(4)处的顶点,并且在顶点处的半角小于聚焦激光束(1)相对于平均收集轴线(6)的倾斜角度。 该器件适合用作光刻用于制造集成电路的EUV辐射源。
    • 37. 发明授权
    • Gas detector for x-radiation
    • 用于x辐射的气体检测器
    • US5444255A
    • 1995-08-22
    • US303641
    • 1994-09-09
    • Martin SchmidtClaus Pohan
    • Martin SchmidtClaus Pohan
    • G01T1/18G01T1/29G01T1/185
    • G01T1/2935
    • In an x-ray detector of the type employing a gas-filled chamber containing a number of electrode plates for detecting ionization event caused by the interaction of x-ray photons with the gas, a number of detector cells are formed, each detector cell containing two electrode plates disposed in a plane in succession in the direction of propagation of an incoming x-ray beam. In order to permit the acquisition of different spectral ranges, the electrical signals from the electrode plates are respectively conducted out of the chamber. The electrode plates are plugged into spring contacts and are connected group-by-group to a conductor foil. Each conductor run within the conductor foil has a contact projection for making electrical contact between the conductor foil and a printed circuit board, which carries electronic components for processing the detector singles.
    • 在采用包含多个用于检测由X射线光子与气体的相互作用引起的电离事件的电极板的充气室的X射线检测器中,形成多个检测器单元,每个检测器单元包含 两个电极板在进入的X射线束的传播方向上连续布置在平面中。 为了允许获取不同的光谱范围,来自电极板的电信号分别被引导出室外。 电极板插入弹簧触点,并逐组连接到导体箔。 在导体箔内延伸的每个导体具有用于在导体箔和印刷电路板之间进行电接触的接触突起,印刷电路板承载用于处理检测器单体的电子部件。
    • 39. 发明授权
    • Cooling system for relatively movable components
    • 相对可动部件的冷却系统
    • US4709559A
    • 1987-12-01
    • US876752
    • 1986-06-20
    • Peter DotzauerMartin Schmidt
    • Peter DotzauerMartin Schmidt
    • A61B6/03F16C37/00F25D17/02F25B3/00
    • A61B6/035A61B6/4488
    • A cooling system for relatively movable components, such as a rotor seated for rotation with respect to a stationary component, includes a sealed channel in the stationary component disposed between the stationary component and the movable component, and an evaporator disposed within the sealed channel. The channel is filled with coolant, such as alcohol or oil, which is circulated by a pump in a closed circulation path. Heat is thereby conveyed from the system components to be cooled to the evaporator, and from the evaporator to a location where the heat can be dissipated without disturbing operation of the device. The cooling system is suitable for use, for example, in a computer tomograph for cooling the radiation detector.
    • 用于相对可移动部件的冷却系统,例如为了相对于固定部件旋转而安置的转子,包括设置在固定部件和可移动部件之间的固定部件中的密封通道,以及设置在密封通道内的蒸发器。 该通道填充有诸如酒精或油的冷却剂,其通过泵在封闭的循环路径中循环。 因此,热量从系统部件被输送到待冷却到蒸发器,并且从蒸发器输送到可以消散热量的位置,而不会干扰装置的操作。 冷却系统适用于例如用于冷却放射线检测器的计算机断层摄影机。
    • 40. 发明授权
    • Diagnostic radiology apparatus for producing layer images of an
examination subject
    • 用于产生检查对象的层图像的诊断放射学装置
    • US4336458A
    • 1982-06-22
    • US191430
    • 1980-09-29
    • Hans J. KrummeMartin SchmidtGuenter SchmittWolfgang Schubert
    • Hans J. KrummeMartin SchmidtGuenter SchmittWolfgang Schubert
    • G01N23/04A61B6/03G01T1/164G01T1/20A61B6/00H01J35/16
    • A61B6/032A61B6/4291G01T1/1644G01T1/20
    • In an exemplary embodiment, a measuring arrangement for irradiating the examination subject from different directions has a radiation source, a radiation receiver, and a computer connected to the radiation receiver for computing the attenuation values of specific image points of the irradiated body layer from the output signals of the radiation receiver. A collimator is present with a collimator grid compartment for each detector of the radiation receiver. Every detector is comprised of a scintillator crystal and a photoelectric transducer. The scintillator crystal is mounted on the surface of the photoelectric transducer such that the transducer is disposed between the associated collimator plate and the scintillator crystal. The scintillator crystal is coated, on its surface, with the exception of the surface confronting the photoelectric transducer, with an optical seal which can be light-reflecting on its side resting against the scintillator crystal.
    • 在示例性实施例中,用于从不同方向照射检查对象的测量装置具有辐射源,辐射接收器和连接到辐射接收器的计算机,用于从输出端计算被照射体层的特定图像点的衰减值 辐射接收器的信号。 存在准直器用于辐射接收器的每个检测器的准直器格栅室。 每个检测器由闪烁体晶体和光电传感器组成。 闪烁体晶体安装在光电转换器的表面上,使得换能器设置在相关联的准直器板和闪烁体晶体之间。 闪烁体晶体在其表面上被涂覆,除了与光电传感器相对的表面之外,具有可以在其侧面反射闪烁体晶体的光学反射的光学密封。