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    • 40. 发明申请
    • PIEZORESISTIVE PRESSURE SENSOR
    • PIEZORESISTIVE压力传感器
    • US20110260269A1
    • 2011-10-27
    • US13176351
    • 2011-07-05
    • Shinya YokoyamaDaigo AokiYutaka Takashima
    • Shinya YokoyamaDaigo AokiYutaka Takashima
    • H01L29/84
    • G01L9/0054G01L9/0055
    • A piezoresistive pressure sensor is provided, which can prevent the occurrence of ESD breakdown due to the nearness of interconnection layers of a resistive element according to miniaturization thereof. The piezoresistive pressure sensor is so configured that respective semiconductor resistive layers on both sides of an arrangement are formed to be relatively longer than an adjacent semiconductor resistive layer, and thus a corner portion of a semiconductor connection layer that extends from the respective semiconductor resistive layers on both sides of the arrangement and a corner portion of the semiconductor interconnection layer that is nearest to the corner portion of the semiconductor connection layer, between which the ESD breakdown occurs easily, can be separated from each other.
    • 提供一种压阻式压力传感器,其可以防止由于电阻元件的互连层的接近程度而导致的ESD击穿的发生,因为其小型化。 压阻式压力传感器被配置成使得在布置的两侧上的相应的半导体电阻层形成为相对比相邻的半导体电阻层更长,并且因此从半导体电阻层延伸的半导体连接层的角部分 布置的两侧和半导体互连层的最接近半导体连接层的角部的角部可以彼此分离,ESD突发之间容易发生ESD损坏。