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31. 发明授权

US07315319B2 Laser induced thermal imaging apparatus, laser induced thermal imaging method using the apparatus, and method of fabricating organic light emitting display using the apparatus 失效
标题翻译：激光感应热成像装置，使用该装置的激光感应热成像方法以及使用该装置制造有机发光显示器的方法
公开(公告)号：US07315319B2
公开(公告)日：2008-01-01
申请号：US11020668
申请日：2004-12-27
申请人： Tae-Min Kang , Jae-Ho Lee , Seong-Taek Lee , Jin-Soo Kim
发明人： Tae-Min Kang , Jae-Ho Lee , Seong-Taek Lee , Jin-Soo Kim
IPC分类号： B41J2/435
CPC分类号： H01L51/0013
摘要： A laser induced thermal imaging apparatus, and a laser induced thermal imaging method and a method of fabricating an organic light emitting display using the apparatus are provided. The laser induced thermal imaging apparatus includes a chuck for fixing an acceptor substrate. A lamination unit for laminating a donor film on the acceptor substrate is located on the chuck. The lamination unit includes a body having a cavity, a gas injection port for injecting a compression gas into the cavity and a gas discharge port for discharging the gas injected into the cavity onto the substrate. A laser irradiator for irradiating a laser beam on the laminated donor film through the lamination unit is located on the lamination unit.
摘要翻译：提供激光感应热成像装置，激光感应热成像方法和使用该装置制造有机发光显示器的方法。激光诱导热成像装置包括用于固定受主衬底的卡盘。用于在受主基板上层叠供体膜的层叠单元位于卡盘上。层叠单元包括具有空腔的本体，用于将压缩气体注入到空腔中的气体注入口和用于将注入到空腔中的气体排放到基板上的气体排出口。用于通过层叠单元将激光束照射在层叠的供体膜上的激光照射器位于层压单元上。

32. 发明授权

US07303850B2 Method of fabricating organic light emitting display 有权
标题翻译：制造有机发光显示器的方法
公开(公告)号：US07303850B2
公开(公告)日：2007-12-04
申请号：US11020669
申请日：2004-12-27
申请人： Jae-Ho Lee , Tae-Min Kang , Seong-Taek Lee , Jin-Soo Kim
发明人： Jae-Ho Lee , Tae-Min Kang , Seong-Taek Lee , Jin-Soo Kim
IPC分类号： H01J9/227
CPC分类号： H01L51/0013
摘要： A method of fabricating an organic light emitting display is provided. The method includes repeatedly scanning a laser beam over a predetermined region of a donor substrate with multi-lines in one step using a galvanometer to form an organic layer pattern. The method of the present invention is capable of reducing process time required to form the organic layer pattern and lowering manufacturing cost by repeating multi-line scanning in one step through the laser beam using the galvanometer, when the organic layer pattern is formed using an LITI method.
摘要翻译：提供一种制造有机发光显示器的方法。该方法包括使用电流计在一个步骤中多次扫描在施主衬底的预定区域上的激光束，以形成有机层图案。本发明的方法能够通过使用电流计通过激光束在一个步骤中重复多行扫描来减少形成有机层图案所需的处理时间，而当使用LITI形成有机层图案时方法。

33. 发明申请

US20060132589A1 Laser induced thermal imaging apparatus, laser induced thermal imaging method using the apparatus, and method of fabricating organic light emitting display using the apparatus 失效
标题翻译：激光感应热成像装置，使用该装置的激光感应热成像方法以及使用该装置制造有机发光显示器的方法
公开(公告)号：US20060132589A1
公开(公告)日：2006-06-22
申请号：US11020668
申请日：2004-12-27
申请人： Tae-Min Kang , Jae-Ho Lee , Seong-Taek Lee , Jin-Soo Kim
发明人： Tae-Min Kang , Jae-Ho Lee , Seong-Taek Lee , Jin-Soo Kim
IPC分类号： B41J2/47
CPC分类号： H01L51/0013
摘要： A laser induced thermal imaging apparatus, and a laser induced thermal imaging method and a method of fabricating an organic light emitting display using the apparatus are provided. The laser induced thermal imaging apparatus includes a chuck for fixing an acceptor substrate. A lamination unit for laminating a donor film on the acceptor substrate is located on the chuck. The lamination unit includes a body having a cavity, a gas injection port for injecting a compression gas into the cavity and a gas discharge port for discharging the gas injected into the cavity onto the substrate. A laser irradiator for irradiating a laser beam on the laminated donor film through the lamination unit is located on the lamination unit.
摘要翻译：提供激光感应热成像装置，激光感应热成像方法和使用该装置制造有机发光显示器的方法。激光诱导热成像装置包括用于固定受主衬底的卡盘。用于在受主基板上层叠供体膜的层叠单元位于卡盘上。层叠单元包括具有空腔的本体，用于将压缩气体注入到空腔中的气体注入口和用于将注入到空腔中的气体排出到基板上的气体排出口。用于通过层叠单元将激光束照射在层叠的供体膜上的激光照射器位于层压单元上。

34. 发明授权

US08946593B2 Laser patterning process 有权
标题翻译：激光图案化工艺
公开(公告)号：US08946593B2
公开(公告)日：2015-02-03
申请号：US12688327
申请日：2010-01-15
申请人： Jae-Ho Lee , Tae-Min Kang , Seong-Taek Lee
发明人： Jae-Ho Lee , Tae-Min Kang , Seong-Taek Lee
IPC分类号： B23K26/06 , C09K19/00 , H01L51/00 , B23K26/073 , H01L51/50
CPC分类号： H01L51/0009 , B23K26/073 , H01L51/0013 , H01L51/5012 , Y10T428/10
摘要： In a laser irradiation device, a patterning method and a method of fabricating an Organic Light Emitting Display (OLED) using the same. The laser irradiation device includes a light source, a mask, a projection lens, and a Fresnel lens formed at a predetermined portion of the mask to change an optical path. When an organic layer pattern is formed using the laser irradiation device, laser radiation is irradiated onto a region of an organic layer, which is to be cut, and the laser radiation is appropriately irradiated onto a region of the organic layer, which is to be separated from a donor substrate. The laser radiation irradiated onto an edge of the organic layer pattern has a laser energy density greater than that of the laser radiation irradiated onto other portions of the organic layer pattern. As a result, it is possible to form a uniform organic layer pattern and reduce damage of the organic layer.
摘要翻译：在激光照射装置，图案化方法和使用其的有机发光显示器（OLED）的制造方法中，激光照射装置包括形成在掩模的预定部分处的光源，掩模，投影透镜和菲涅耳透镜，以改变光路。当使用激光照射装置形成有机层图案时，将激光照射到要切割的有机层的区域上，并将激光辐射适当地照射到有机层的区域与供体底物分离。照射到有机层图案的边缘上的激光辐射的激光能量密度大于照射到有机层图案的其它部分上的激光辐射的激光能量密度。结果，可以形成均匀的有机层图案并减少有机层的损伤。

35. 发明授权

US07999839B2 Laser irradiation apparatus and method of fabricating organic light emitting display using the same 有权
标题翻译：激光照射装置及使用其制造有机发光显示器的方法
公开(公告)号：US07999839B2
公开(公告)日：2011-08-16
申请号：US12426821
申请日：2009-04-20
申请人： Jae-Ho Lee , Tae-Min Kang , Seong-Taek Lee , Jin-Soo Kim
发明人： Jae-Ho Lee , Tae-Min Kang , Seong-Taek Lee , Jin-Soo Kim
IPC分类号： B41J2/47
CPC分类号： H01L51/0013 , B23K26/066 , H01L51/0011 , H01L51/56
摘要： Provided are a laser irradiation apparatus and method of fabricating an organic light emitting display using the same. The laser irradiation apparatus includes a mask positioned below the laser generator, and the mask is patterned such that lengths of an upper portion and a lower portion of a mask pattern are patterned longer than a length of a middle portion of the mask pattern with respect to the scanning direction. The method of fabricating an organic light emitting display includes scanning a laser beam on a predetermined region of the donor substrate using the laser irradiation apparatus to form an organic layer pattern on the substrate. When the organic layer pattern is formed using a laser induced thermal imaging (LITI) method, the transfer may be carried out using a laser beam having low energy, laser beam efficiency may be enhanced, the organic layer may be less damaged, and the quality of the organic layer pattern to be transferred may also be enhanced.
摘要翻译：提供一种激光照射装置和使用其的有机发光显示器的制造方法。激光照射装置包括位于激光发生器下方的掩模，并且掩模被图案化，使得掩模图案的上部和下部的长度被图案化为比掩模图案的中间部分的长度相对于扫描方向。制造有机发光显示器的方法包括使用激光照射装置在施主衬底的预定区域上扫描激光束，以在衬底上形成有机层图案。当使用激光诱导热成像（LITI）方法形成有机层图案时，可以使用具有低能量的激光束进行转印，可以提高激光束效率，有机层可能损坏较小，并且质量的有机层图案也可以被增强。

36. 发明授权

US07776493B2 Mask for LITI and LITI method using the same 有权
标题翻译： LITI和LITI方法使用相同的掩码
公开(公告)号：US07776493B2
公开(公告)日：2010-08-17
申请号：US11509574
申请日：2006-08-25
申请人： Tae-Min Kang , Jae-Ho Lee , Seong-Taek Lee
发明人： Tae-Min Kang , Jae-Ho Lee , Seong-Taek Lee
IPC分类号： G03F1/00
CPC分类号： G03F1/00 , H01L27/3244 , H01L51/0013
摘要： A mask for LITI and a LITI method using the same wherein the mask includes patterns arranged in a direction perpendicular to a beam scanning direction and are arranged so that increasingly longer patterns are located towards the edge of the mask than in or near the center.
摘要翻译：用于LITI的掩模和使用其的LITI方法，其中掩模包括沿垂直于光束扫描方向布置的图案，并且布置成使得越来越长的图案朝向掩模的边缘位于中心或靠近中心的位置。

37. 发明申请

US20100117093A1 LASER IRRADIATION DEVICE, PATTERNING METHOD AND METHOD OF FABRICATING ORGANIC LIGHT EMITTING DISPLAY (OLED) USING THE PATTERNING METHOD 有权
标题翻译：激光辐射装置，使用方式方法制造有机发光显示器（OLED）的方法和方法
公开(公告)号：US20100117093A1
公开(公告)日：2010-05-13
申请号：US12688327
申请日：2010-01-15
申请人： Jae-Ho Lee , Tae-Min Kang , Seong-Taek Lee
发明人： Jae-Ho Lee , Tae-Min Kang , Seong-Taek Lee
IPC分类号： H01L21/268 , H01L51/56 , H01L51/52
CPC分类号： H01L51/0009 , B23K26/073 , H01L51/0013 , H01L51/5012 , Y10T428/10
摘要： In a laser irradiation device, a patterning method and a method of fabricating an Organic Light Emitting Display (OLED) using the same. The laser irradiation device includes a light source, a mask, a projection lens, and a Fresnel lens formed at a predetermined portion of the mask to change an optical path. When an organic layer pattern is formed using the laser irradiation device, laser radiation is irradiated onto a region of an organic layer, which is to be cut, and the laser radiation is appropriately irradiated onto a region of the organic layer, which is to be separated from a donor substrate. The laser radiation irradiated onto an edge of the organic layer pattern has a laser energy density greater than that of the laser radiation irradiated onto other portions of the organic layer pattern. As a result, it is possible to form a uniform organic layer pattern and reduce damage of the organic layer.
摘要翻译：在激光照射装置，图案化方法和使用其的有机发光显示器（OLED）的制造方法中，激光照射装置包括形成在掩模的预定部分处的光源，掩模，投影透镜和菲涅耳透镜，以改变光路。当使用激光照射装置形成有机层图案时，将激光照射到要切割的有机层的区域上，并将激光辐射适当地照射到有机层的区域与供体底物分离。照射到有机层图案的边缘上的激光辐射的激光能量密度大于照射到有机层图案的其它部分上的激光辐射的激光能量密度。结果，可以形成均匀的有机层图案并减少有机层的损伤。

38. 发明申请

US20090202950A1 LASER IRRADIATION APPARATUS AND METHOD OF FABRICATING ORGANIC LIGHT EMITTING DISPLAY USING THE SAME 有权
标题翻译：激光辐照装置及使用其制造有机发光显示器的方法
公开(公告)号：US20090202950A1
公开(公告)日：2009-08-13
申请号：US12426821
申请日：2009-04-20
申请人： Jae-Ho Lee , Tae-Min Kang , Seong-Taek Lee , Jin-Soo Kim
发明人： Jae-Ho Lee , Tae-Min Kang , Seong-Taek Lee , Jin-Soo Kim
IPC分类号： G03F7/20
CPC分类号： H01L51/0013 , B23K26/066 , H01L51/0011 , H01L51/56
摘要： Provided are a laser irradiation apparatus and method of fabricating an organic light emitting display using the same. The laser irradiation apparatus includes a mask positioned below the laser generator, and the mask is patterned such that lengths of an upper portion and a lower portion of a mask pattern are patterned longer than a length of a middle portion of the mask pattern with respect to the scanning direction. The method of fabricating an organic light emitting display includes scanning a laser beam on a predetermined region of the donor substrate using the laser irradiation apparatus to form an organic layer pattern on the substrate. When the organic layer pattern is formed using a laser induced thermal imaging (LITI) method, the transfer may be carried out using a laser beam having low energy, laser beam efficiency may be enhanced, the organic layer may be less damaged, and the quality of the organic layer pattern to be transferred may also be enhanced.
摘要翻译：提供一种激光照射装置和使用其的有机发光显示器的制造方法。激光照射装置包括位于激光发生器下方的掩模，并且掩模被图案化，使得掩模图案的上部和下部的长度被图案化为比掩模图案的中间部分的长度相对于扫描方向。制造有机发光显示器的方法包括使用激光照射装置在施主衬底的预定区域上扫描激光束，以在衬底上形成有机层图案。当使用激光诱导热成像（LITI）方法形成有机层图案时，可以使用具有低能量的激光束进行转印，可以提高激光束效率，有机层可能损坏较小，并且质量的有机层图案也可以被增强。

39. 发明授权

US07525563B2 Laser irradiation apparatus and method of fabricating organic light emitting display using the same 有权
标题翻译：激光照射装置及使用其制造有机发光显示器的方法
公开(公告)号：US07525563B2
公开(公告)日：2009-04-28
申请号：US11020659
申请日：2004-12-27
申请人： Jae-Ho Lee , Tae-Min Kang , Seong-Taek Lee
发明人： Jae-Ho Lee , Tae-Min Kang , Seong-Taek Lee
IPC分类号： B41J2/47
CPC分类号： H01L51/0013 , B23K26/066 , H01L51/56
摘要： A laser irradiation apparatus and method of fabricating an organic light emitting display using the same are provided. The laser irradiation apparatus includes: a laser generator; a mask having means for changing a propagation path of a laser beam; and a projection lens. The method of fabricating an organic light emitting display includes: irradiating a laser beam on an edge of an irradiated region of a donor substrate using the laser irradiation apparatus with high intensity to form an organic layer pattern on a substrate. The laser beam having low intensity can perform a transfer process to improve laser beam efficiency. In addition, it is possible to reduce damage on the organic layer, and improve quality of the transferred organic layer pattern.
摘要翻译：提供一种激光照射装置及使用其的有机发光显示器的制造方法。激光照射装置包括：激光发生器; 具有用于改变激光束的传播路径的装置的掩模; 和投影透镜。制造有机发光显示器的方法包括：使用激光照射装置以高强度照射激光束在施主衬底的照射区域的边缘上，以在衬底上形成有机层图案。具有低强度的激光束可以进行转印处理以提高激光束效率。另外，可以减少有机层的损伤，提高转印有机层图案的质量。

40. 发明申请

US20070048436A1 Mask for LITI and LITI method using the same 有权
标题翻译： LITI和LITI方法使用相同的掩码
公开(公告)号：US20070048436A1
公开(公告)日：2007-03-01
申请号：US11509574
申请日：2006-08-25
申请人： Tae-Min Kang , Jae-Ho Lee , Seong-Taek Lee
发明人： Tae-Min Kang , Jae-Ho Lee , Seong-Taek Lee
IPC分类号： B05D5/12 , G03F7/00
CPC分类号： G03F1/00 , H01L27/3244 , H01L51/0013
摘要： A mask for LITI and a LITI method using the same wherein the mask includes patterns arranged in a direction perpendicular to a beam scanning direction and are arranged so that increasingly longer patterns are located towards the edge of the mask than in or near the center.
摘要翻译：用于LITI的掩模和使用其的LITI方法，其中掩模包括沿垂直于光束扫描方向布置的图案，并且布置成使得越来越长的图案朝向掩模的边缘位于中心或靠近中心的位置。

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