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    • 32. 发明授权
    • Low power consumption bistable microswitch
    • 低功耗双稳态微动开关
    • US07489228B2
    • 2009-02-10
    • US10561948
    • 2004-06-30
    • Philippe Robert
    • Philippe Robert
    • H01H37/52H01H59/00H01P1/10
    • H01H1/0036H01H59/0009H01H2001/0042H01H2061/006
    • A bistable MEMS microswitch produced on a substrate and capable of electrically connecting ends of at least two conductive tracks, including a beam suspended above the surface of the substrate. The beam is embedded at its two ends and is subjected to compressive stress when it is in the non-deformed position. The beam has an electrical contact configured to produce a lateral connection with the ends of the two conductive tracks when the beam is deformed in a horizontal direction with respect to the surface of the substrate. Actuators enable the beam to be placed in a first deformed position, corresponding to a first stable state, or in a second deformed position, corresponding to a second stable state, and the electrical contact ensures connection of the ends of the two conductive tracks.
    • 一种双稳态MEMS微型开关,其制造在基板上并且能够电连接至少两个导电轨道的端部,包括悬挂在基板表面上的梁。 梁被嵌入其两端,当其处于非变形位置时受到压应力。 光束具有电接触,其被配置为当光束相对于衬底的表面沿水平方向变形时,与两个导电轨道的端部产生横向连接。 致动器使得梁能够对应于第一稳定状态的第一变形位置或对应于第二稳定状态的第二变形位置,并且电接触确保两个导电轨道的端部的连接。
    • 36. 发明授权
    • Electrostatic micro-switch for components with low operating voltages
    • 具有低工作电压的组件的静电微动开关
    • US07283023B2
    • 2007-10-16
    • US10536632
    • 2003-11-27
    • Philippe Robert
    • Philippe Robert
    • H01H51/22
    • H01H59/0009H01H2059/0063
    • The invention relates to an electrostatic micro-switch intended to connect two conductor paths (4, 5) placed on a support, the connection between the two conductor paths being created by means of a contact stud (6) fitted to the distortion means (3) made in insulating material and capable of distorting in relation to the support, under the influence of an electrostatic force generated by control electrodes, the contact stud connecting the ends (14, 15) of the two conductor paths (4, 5) when the distortion means are sufficiently distorted. The control electrodes are laid out on the distortion means and the support in two sets of electrodes, a first set of electrodes (101, 102, 33, 53) intended to generate a first electrostatic force to initiate the distorting of the distortion means, a second set of electrodes (101, 102, 7, 8) intended to generate a second electrostatic force to continue the distorting of the distortion means (3) so that the contact stud (6) connects the ends (14, 15) of the two conductor paths.
    • 本发明涉及一种旨在连接放置在支架上的两个导体路径(4,5)的静电微型开关,两个导体路径之间的连接是通过装配到失真装置(3)上的接触柱(6)产生的 ),其能够在由控制电极产生的静电力的影响下相对于所述支撑件变形,所述接触柱连接所述两个导体路径(4,5)的端部(14,15) 失真手段充分扭曲。 控制电极布置在失真装置和两组电极中的支撑件上,第一组电极(101,102,33,53)旨在产生第一静电力以启动失真装置的变形, 第二组电极(101,102,7,8),用于产生第二静电力以继续变形装置(3)的变形,使得接触柱(6)连接两个端部(14,15) 导体路径。
    • 37. 发明授权
    • Variable micro-capacitor with a high ratio and a low operating voltage
    • 具有高比率和低工作电压的可变微电容器
    • US07031137B2
    • 2006-04-18
    • US10493295
    • 2002-10-23
    • Philippe Robert
    • Philippe Robert
    • H01G7/00H01G7/04
    • H01G5/04H01G5/18
    • A MEMS micro-capacitor having a variable capacity is disclosed. The MEMS micro-capacitor has at least one fixed electrode (3) positioned on one surface of a substrate (1); bending means with respect to the surface of the substrate including at least one moveable electrode (5) located opposite the fixed electrode (3); a layer of solid dielectric material interposed between the fixed electrode and the moveable electrode; and means (5, 6 and 7) for applying a bending force to the bending means. The bending force is intended to move the moveable electrode (5) with respect to the fixed electrode (3) in order to obtain, between these electrodes, a capacity that varies according to the applied bending force. The bending means are designed to clamp the layer of dielectric material between the moveable electrode and the fixed electrode so as to obtain a variable surface of the clamped layer of dielectric material.
    • 公开了具有可变容量的MEMS微型电容器。 MEMS微电容器具有位于基板(1)的一个表面上的至少一个固定电极(3); 相对于包括位于与固定电极(3)相对的至少一个可移动电极(5)的衬底的表面的弯曲装置; 介于固定电极和可动电极之间的固体电介质材料层; 以及用于向弯曲装置施加弯曲力的装置(5,6和7)。 弯曲力旨在​​相对于固定电极(3)移动可移动电极(5),以便在这些电极之间获得根据施加的弯曲力而变化的容量。 弯曲装置被设计成将电介质材料层夹在可动电极和固定电极之间,以便获得夹持的介电材料层的可变表面。