专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

31. 发明申请

WO2003021643A2 SEMICONDUCTOR MATERIAL HANDLING SYSTEM 审中-公开
标题翻译：半导体材料处理系统
公开(公告)号：WO2003021643A2
公开(公告)日：2003-03-13
申请号：PCT/US2002/027769
申请日：2002-08-30
申请人： ASYST TECHNOLOGIES, INC.
发明人： BONORA, Anthony, C. , GOULD, Richard, H. , HINE, Roger, G. , KROLAK, Michael , SPEASL, Jerry, A.
IPC分类号： H01L21/00
CPC分类号： H01L21/67775 , H01L21/67766 , H01L21/67778 , H01L21/68707 , Y10S414/139
摘要： The semiconductor material handling system is an EFEM that may either mount to the front end of a processing tool or be integrated into the processing tool. The EFEM is built from a unified frame that the EFEM components, such as a wafer engine and a SMIF pod advance plate, may mount to. The frame serves as a common mounting structure that the EFEM components may use as a reference for alignment purposes. Since the EFEM components do not have to align with respect to the position of each other, the calibration, if any is required, is greatly simplified. The EFEM also has a reduced footprint, allowing the EFEM to mount to the front end of a processing tool and not extend to the fab floor. Thus, space is freed up between the EFEM and the fab floor. By way of example only, this space may be used as a maintenance access area to the processing tool without having to first remove the EFEM.
摘要翻译：半导体材料处理系统是可安装到处理工具的前端或集成到处理工具中的EFEM。 EFEM由EFEM组件（如晶圆引擎和SMIF吊舱推进板）可以安装到的统一框架构建而成。该框架用作EFEM部件可用作对准目的的参考的通用安装结构。由于EFEM组件不必相对于彼此的位置对齐，所以校准（如果需要的话）被大大简化。 EFEM的占地面积也减小了，使得EFEM可以安装到加工工具的前端，而不会延伸到制造厂的地板。因此，EFEM和晶圆厂之间的空间被释放出来。仅作为示例，该空间可以用作处理工具的维护访问区域，而不必首先移除EFEM。

32. 发明申请

WO1991010202A1 PROCESSING SYSTEMS WITH INTELLIGENT ARTICLE TRACKING 审中-公开
标题翻译：具有智能文章跟踪的处理系统
公开(公告)号：WO1991010202A1
公开(公告)日：1991-07-11
申请号：PCT/US1990005315
申请日：1990-09-18
申请人： ASYST TECHNOLOGIES, INC.
发明人： ASYST TECHNOLOGIES, INC. , MANEY, George, A. , BONORA, Anthony, C. , PARIKH, Mihir , BRAIN, Michael, D.
IPC分类号： G06F15/46
CPC分类号： H01L21/67294 , G03F7/70525 , G03F7/70541 , G03F7/7075 , G03F7/70991 , G05B19/4183 , G05B2219/31002 , G05B2219/31286 , G05B2219/31323 , G05B2219/31432 , H01L21/67276 , Y02P90/08 , Y02P90/10 , Y02P90/24 , Y02P90/28 , Y02P90/285
摘要： A system for storing, transporting and processing articles includes a plurality of transportable containers (10), each transportable container having an interior region adapted to receive a plurality of articles and data processing device (40) provided on the transportable container for receiving, storing, transmitting and displaying information related to the articles received by the corresponding transportable container. A plurality of workstations (702) are adapted to receive one of the transportable containers and to process selected ones of the articles. The workstations alos verify that at lest one of the articles in the transportable container has arrived at the appropriate workstation and communicate with a central processing unit (720) to receive and transmit status information and processing information, and to transmit information stored by the data processing device provided on the transportable container. The system may also include a storage station (740) for receiving said transportable container, for providing communication between the data processing devices (40) provided on the transportable container and the central processing unit, and for making a backup copy of the information stored by said data processing device.
摘要翻译：用于存储，运输和处理物品的系统包括多个可运输容器（10），每个可运输容器具有适于容纳多个物品的内部区域和设置在可运输容器上的数据处理装置（40），用于接收，发送和显示与相应的可运输容器接收的物品有关的信息。多个工作站（702）适于接收可移动容器中的一个并处理所选物品中的一个。工作站确认，运输容器中的至少一个物品已经到达适当的工作站并与中央处理单元（720）通信以接收和发送状态信息和处理信息，并且传送由数据处理存储的信息设备提供在可运输的集装箱上。该系统还可以包括用于接收所述可移动容器的存储站（740），用于提供在可移动容器上提供的数据处理设备（40）与中央处理单元之间的通信，并且用于制作由所述数据处理装置。

33. 发明申请

WO2003019630A3 UNIFIED FRAME FOR SEMICONDUCTOR MATERIAL HANDLING SYSTEM 审中-公开
公开(公告)号：WO2003019630A3
公开(公告)日：2003-03-06
申请号：PCT/US2002/030297
申请日：2002-08-30
申请人： ASYST TECHNOLOGIES, INC.
发明人： BONORA, Anthony, C. , GOULD, Richard, H. , HINE, Roger, G. , KROLAK, Michael , SPEASL, Jerry
IPC分类号： H01L21/00
摘要： The present invention is a unified spine structure that EFEM components, such as a wafer handling robot and a SMIF pod advance assembly, may mount to. The frame includes multiple vertical struts that are mounted to an upper support member and a lower support member. Structurally tying the vertical struts to the support members creates a rigid body to support the EFEM components. The vertical struts also provide a common reference that the EFEM components may align with. This eliminates the need for each EFEM component to align with respect to each other. Thus, if one EFEM component is removed it will not affect the alignment and calibration of the remaining secured EFEM components. The unified frame also creates an isolated storage area for the SMIF pod door and the port door within the environment that is isolated from the outside ambient conditions.

34. 发明申请

WO1998002352A1 TWO STAGE VALVE FOR SMIF PODS 审中-公开
标题翻译：两级阀门用于SMIF PODS
公开(公告)号：WO1998002352A1
公开(公告)日：1998-01-22
申请号：PCT/US1997011897
申请日：1997-07-12
申请人： ASYST TECHNOLOGIES, INC.
发明人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , WARTENBERGH, Robert, P. , GOMES, Christopher
IPC分类号： B65B01/04
CPC分类号： H01L21/67393
摘要： A valve (40) mounted in a pod door of a SMIF pod (20) for allowing gas flow to and from the sealed pod (20) while the pod (20) is seated on a SMIF port. The valve (40) is provided to allow fluid flow to or from the pod (20) upon the valve (40) being actuated by either a standard registration pin or a specially adapted fluid flow pin (68) intended for use with the present invention.
摘要翻译：安装在SMIF舱（20）的舱门中的阀（40），用于当舱（20）就座于SMIF端口时允许气体从密封舱（20）流出。阀（40）被设置成在阀（40）由用于本发明的标准对准销或特别适合的流体流销（68）致动时允许流体流入或流出舱（20）。

35. 发明申请

WO2003038869A3 UNIVERSAL MODULAR WAFER TRANSPORT SYSTEM 审中-公开
公开(公告)号：WO2003038869A3
公开(公告)日：2003-05-08
申请号：PCT/US2002/027979
申请日：2002-09-03
申请人： ASYST TECHNOLOGIES, INC.
发明人： BONORA, Anthony, C. , GOULD, Richard, H. , HINE, Roger, G. , KROLAK, Michael , SPEASL, Jerry
IPC分类号： H01L21/00
摘要： The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport enclosure is isolated from the atmospheric conditions of the surrounding wafer fabrication facility. Thus, an individual wafer may be transported throughout the wafer fabrication facility without having to maintain a clean room environment for the entire facility. The wafer shuttle may be propelled by various technologies, such as, but not limited to, magnetic levitation or air bearings. The wafer shuttle may also transport more than one wafer simultaneously. The interior of the transport enclosure may also be under vacuum, gas-filled, or subject to filtered air.

36. 发明申请

WO2003019630A2 UNIFIED FRAME FOR SEMICONDUCTOR MATERIAL HANDLING SYSTEM 审中-公开
标题翻译：用于半导体材料处理系统的整体框架
公开(公告)号：WO2003019630A2
公开(公告)日：2003-03-06
申请号：PCT/US2002/030297
申请日：2002-08-30
申请人： ASYST TECHNOLOGIES, INC.
发明人： BONORA, Anthony, C. , GOULD, Richard, H. , HINE, Roger, G. , KROLAK, Michael , SPEASL, Jerry
IPC分类号： H01L21/00
CPC分类号： H01L21/68707 , H01L21/67766 , H01L21/67775 , H01L21/67778 , Y10S414/135
摘要： The present invention is a unified spine structure that EFEM components, such as a wafer handling robot and a SMIF pod advance assembly, may mount to. The frame includes multiple vertical struts that are mounted to an upper support member and a lower support member. Structurally tying the vertical struts to the support members creates a rigid body to support the EFEM components. The vertical struts also provide a common reference that the EFEM components may align with. This eliminates the need for each EFEM component to align with respect to each other. Thus, if one EFEM component is removed it will not affect the alignment and calibration of the remaining secured EFEM components. The unified frame also creates an isolated storage area for the SMIF pod door and the port door within the environment that is isolated from the outside ambient conditions.
摘要翻译：本发明是一种统一的脊柱结构，诸如晶圆处理机器人和SMIF吊舱推进组件的EFEM部件可以安装到其上。框架包括安装到上部支撑构件和下部支撑构件的多个竖直支柱。在结构上将垂直支柱与支撑构件捆绑在一起会形成一个刚体以支撑EFEM部件。垂直支柱还提供了EFEM组件可以对齐的通用参考。这消除了每个EFEM组件相互对齐的需要。因此，如果一个EFEM组件被移除，它不会影响剩余的安全EFEM组件的对齐和校准。统一的框架还为SMIF吊舱门和隔离室外环境条件下的端口门创建了一个隔离存储区。

37. 发明申请

WO1997003005A1 METHOD AND APPARATUS FOR VERTICAL TRANSFER OF A SEMICONDUCTOR WAFER CASSETTE 审中-公开
标题翻译：用于半导体滤波器的垂直传输的方法和装置
公开(公告)号：WO1997003005A1
公开(公告)日：1997-01-30
申请号：PCT/US1996011500
申请日：1996-07-10
申请人： ASYST TECHNOLOGIES, INC.
发明人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , NEADS, Michael, A. , OEN, Joshua, T.
IPC分类号： B65G49/07
CPC分类号： H01L21/67772 , H01L21/67775 , Y10S414/137 , Y10S414/14
摘要： A method and apparatus for removing a semiconductor wafer cassette (106) from a SMIF pod (100) and for transferring the cassette along a vertical axis to a platform (142) of a wafer processing station (124). The apparatus is comprised of a transfer device (110) that includes a pair of gripping arms (116) for gripping the wafer cassette from the sides of the cassette. Once gripped, the cassette moves with the transfer device upward along a vertical axis to make room for the platform to be extended from within the processing station to a position under the cassette. Thereafter, the direction of motion of the transfer device is reversed and the cassette is lowered onto the platform. Once seated on the platform, the gripping arms retract from the cassette, and the cassette is carried on the platform into the processing station.
摘要翻译：一种用于从SMIF盒（100）移除半导体晶片盒（106）并将盒沿着垂直轴传送到晶片处理站（124）的平台（142）的方法和装置。该装置包括一个转移装置（110），该转移装置包括一对用于从盒的侧面夹持晶片盒的夹持臂（116）。一旦被抓住，盒子沿着垂直轴向上移动传送装置，以使平台从处理站中延伸到盒下方的位置。此后，转印装置的运动方向相反，并且盒子下降到平台上。一旦坐在平台上，把持臂从盒子中退回，并且盒子被放在平台上进入处理站。

38. 发明申请

WO1992007759A1 METHOD AND APPARATUS FOR TRANSFERRING ARTICLES BETWEEN TWO CONTROLLED ENVIRONMENTS 审中-公开
标题翻译：用于在两个控制环境之间传送文章的方法和装置
公开(公告)号：WO1992007759A1
公开(公告)日：1992-05-14
申请号：PCT/US1991006620
申请日：1991-09-12
申请人： ASYST TECHNOLOGIES, INC.
发明人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , GUERRE, Gilles , PARIKH, Mihir , ROSENQUIST, Frederick, T. , JAIN, Sudhir
IPC分类号： B65B01/04
CPC分类号： H01L21/67757 , G03F7/7075 , H01L21/67772 , Y10S414/14
摘要： A method and apparatus for transferring articles from a transportable container (18), for example, a SMIF pod, to a second container, for example, a processing station (8) having a port (24) which provides access to the interior region (15) of the processing station. A non-contact seal (92) or an isolation cover (110) or skirt (130) seals the port so that the interior region (21) of the container can be purged of contaminants prior to exposing the interior environment of the processing station to the environment within the container. The purging of the container may be a multistep process in which the container door (32) is moved between several intermediate positions so that the container door itself is purged prior to the purging of the environment within the container.

39. 发明申请

WO2003021645A2 WAFER ENGINE 审中-公开
标题翻译：晶片发动机
公开(公告)号：WO2003021645A2
公开(公告)日：2003-03-13
申请号：PCT/US2002/027909
申请日：2002-08-30
申请人： ASYST TECHNOLOGIES, INC.
发明人： BONORA, Anthony, C. , GOULD, Richard, H. , HINE, Roger, G. , KROLAK, Michael , SPEASL, Jerry
IPC分类号： H01L21/00
CPC分类号： H01L21/67778 , H01L21/67766 , H01L21/67775 , H01L21/68707 , Y10S414/137
摘要： The present invention is a wafer engine for transporting wafers. The wafer engine includes a linear drive for moving the wafer along an x axis, a rotational drive for rotating the wafer about a theta axis, a linear drive for moving the wafer along a z axis, and a linear drive for moving the wafer along a radial axis. The linear drive for moving the wafer along a z axis is offset from the rotational drive. When the rotational drive rotates about the theta axis, both the z axis and radial axis drives are also rotated about the theta axis. Preferably, the linear drive for moving the wafer along a radial axis is a dual or rapid swap slide body mechanism having an upper and lower end effector. The slide body mechanism preferably also has means to align the wafer and perform various inspection and marking procedures.
摘要翻译：本发明是用于传送晶片的晶片引擎。晶片引擎包括用于沿x轴移动晶片的线性驱动器，用于围绕θ轴线旋转晶片的旋转驱动器，用于沿z轴移动晶片的线性驱动器，以及用于沿径向移动晶片的线性驱动器轴。用于沿z轴移动晶片的线性驱动器偏离旋转驱动器。当旋转驱动器围绕θ轴线旋转时，z轴线和径向轴线驱动器也围绕θ轴线旋转。优选地，用于沿着径向轴线移动晶片的线性驱动器是具有上下端部执行器的双重或快速交换滑动体机构。滑动机构机构优选地还具有对准晶片并执行各种检查和标记程序的装置。

40. 发明申请

WO1997003001A1 SEALABLE, TRANSPORTABLE CONTAINER HAVING A BREATHER ASSEMBLY 审中-公开
标题翻译：具有可呼吸装置的可密封，可运输的集装箱
公开(公告)号：WO1997003001A1
公开(公告)日：1997-01-30
申请号：PCT/US1996011296
申请日：1996-07-03
申请人： ASYST TECHNOLOGIES, INC.
发明人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , ROSENQUIST, Frederick, T. , JAIN, Sudhir , DAVIS, Mark, R.
IPC分类号： B65D85/30
CPC分类号： H01L21/67373 , H01L21/67393 , Y10S414/14
摘要： A transportable, sealable container (18), for example a SMIF pod, including a box (20) and a box door (32). The box (20) has a first sealing surface (91) and the box door (32) has a second sealing surface (93). The two sealing surfaces (91, 93) form a seal when the box door (32) is moved in a sealing position with respect to the box (20). A latch mechanism (118) is provided in the box door (32) for holding the box door in the sealing position. The container further includes a breather assembly having an aperture (110), with a filter (74), that allows gas to flow between the interior of the container (18) and an environment external to the container. A valve (112), which is latched by the latch (118), opens and closes the aperture (110). When the latch (118) unlocks the box door (32), the valve (112) opens the aperture (110). When the door (32) is locked, the valve (112) closes the aperture (110).
摘要翻译：可移动的，可密封的容器（18），例如SMIF盒，包括盒（20）和盒门（32）。箱体（20）具有第一密封面（91），并且箱门（32）具有第二密封面（93）。当箱门（32）相对于盒（20）处于密封位置时，两个密封表面（91,93）形成密封。在箱门（32）中设置有用于将箱门保持在密封位置的闩锁机构（118）。容器还包括具有孔（110）的通气组件，其具有过滤器（74），其允许气体在容器（18）的内部和容器外部的环境之间流动。由闩锁（118）闩锁的阀（112）打开和关闭孔（110）。当闩锁（118）解锁箱门（32）时，阀（112）打开孔（110）。当门（32）被锁定时，阀（112）关闭孔（110）。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式