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    • 34. 发明公开
    • 마이크로칩 X선 단층촬영 시스템 및 이를 이용한 검사방법
    • 微型X射线计算机图像系统及其检测方法
    • KR1020150126556A
    • 2015-11-12
    • KR1020150059977
    • 2015-04-28
    • 한국과학기술원
    • 조승룡박미란조상훈
    • G01N23/04H05G1/30
    • 마이크로칩 X선단층촬영시스템및 이를이용한검사방법이개시된다. 마이크로칩 X선단층촬영시스템은피검체에 X선을방사하여투과영상데이터를검출하는 X선단층영상촬영장치및 검출된투과영상데이터를기초로상기피검체의단면영상을재건하는제어부를포함하되, X선단층영상촬영장치는, 피검체를향하여 X선을방사하는 X선발생원, 피검체를상부에배치하고, X선발생원과대향되도록형성되며, 피검체를회전시키는제1 회전부, 피검체를통과한 X선에포함된투과영상데이터를검출하는검출부및 제1 회전부를회전시키는제2 회전부를포함한다.
    • 公开了一种微芯片X射线计算机断层摄影系统及使用其的检查方法。 根据本发明的微芯片X射线计算机断层摄影系统包括:X射线计算机断层摄影装置,用于将X射线照射到目标体上以检测透射图像数据; 以及控制单元,用于基于检测到的透射图像数据来重建目标体的横截面图像。 X射线计算机断层摄影装置包括:X射线产生源,用于向目标体辐射X射线; 将目标体放置在其上部的第一旋转单元面对X射线产生源,并旋转目标体; 检测单元,检测包含在穿过所述目标体的X射线中的透射率图像数据; 以及旋转第一旋转单元的第二旋转单元。
    • 35. 发明公开
    • 평면형 애벌랜치 포토다이오드
    • AVALANCHE光电
    • KR1020030026495A
    • 2003-04-03
    • KR1020010059499
    • 2001-09-26
    • 삼성전자주식회사
    • 김문덕조승룡범진욱
    • H01L31/107
    • H01L31/107
    • PURPOSE: An avalanche photodiode is provided to form uniform magnetic field and minimize a leakage current by using a contact layer having a core part and a guard part and an upper electrode having a core electrode and a guard electrode. CONSTITUTION: An n-type bottom electrode(200) is formed under an n-type InP substrate(100). An n-type amplification layer(110) is formed on the n-type InP substrate(100). An n-type InP charge layer(120) is formed on the n-type amplification layer(110). An n-type InP transition layer(130) is formed on the n-type InP charge layer(120). An n-type InGaAs absorbing layer(140) is formed on the n-type InP transition layer(130). A p-type InP contact layer(150) is formed on the n-type InGaAs absorbing layer(140). The p-type InP contact layer(150) is formed with a core part(154) and a guard part(158). An insulating layer(170) is formed on the n-type InGaAs absorbing layer(140) and the p-type InP contact layer(150). A p-type upper electrode(180) is formed on the p-type InP contact layer(150). A guard electrode(190) is formed on the guard part(158).
    • 目的:提供雪崩光电二极管以形成均匀的磁场,并通过使用具有芯部分和保护部分的接触层以及具有芯电极和保护电极的上电极来最小化泄漏电流。 构成:n型底部电极(200)形成在n型InP衬底(100)的下方。 在n型InP衬底(100)上形成n型放大层(110)。 n型InP电荷层(120)形成在n型放大层(110)上。 在n型InP电荷层(120)上形成n型InP过渡层(130)。 在n型InP过渡层(130)上形成n型InGaAs吸收层(140)。 在n型InGaAs吸收层(140)上形成p型InP接触层(150)。 p型InP接触层(150)形成有芯部(154)和防护部(158)。 在n型InGaAs吸收层(140)和p型InP接触层(150)上形成绝缘层(170)。 p型上电极(180)形成在p型InP接触层(150)上。 保护电极(190)形成在防护部(158)上。
    • 36. 发明公开
    • 애벌런치 포토다이오드 및 그 제조방법
    • AVALANCHE光电及其制造方法
    • KR1020030082013A
    • 2003-10-22
    • KR1020020020491
    • 2002-04-15
    • 삼성전자주식회사
    • 양승기조승룡전병옥
    • H01L29/862
    • PURPOSE: An avalanche photodiode and a method for manufacturing the same are provided to be capable of overcoming local breakdown phenomenon, such as the edge breakdown generated at the peripheral portion of an amplifying layer, and smoothly obtaining amplification gain at the center portion of the amplifying layer. CONSTITUTION: An avalanche photodiode is provided with a substrate(20), a predetermined layer formed at the upper portion of the substrate, a diffusion layer(25,26) formed at the upper portion of the resultant structure, a guard ring part(60) electrically isolated from the diffusion layer, a P type electrode(28) formed at the upper portion of the diffusion layer, and an N type electrode(29) formed at the back side of the substrate. At this time, the predetermined layer is formed by sequentially depositing a light absorbing layer(21), a grading layer(22), an electric field buffer layer(23), and an amplifying layer(24) on the substrate. Preferably, the edge portion of the amplifying layer is thinly formed than the center portion of the amplifying layer as much as 30-40 nm.
    • 目的:提供一种雪崩光电二极管及其制造方法,其能够克服局部击穿现象,例如在放大层的周边部分产生的边缘击穿,并且平滑地获得放大器的中心部分的放大增益 层。 构成:雪崩光电二极管设置有基板(20),形成在基板的上部的预定层,形成在所得结构的上部的扩散层(25,26),保护环部分(60 ),在扩散层的上部形成的P型电极(28)和形成在基板的背面的N型电极(29)。 此时,通过在基板上依次沉积光吸收层(21),分级层(22),电场缓冲层(23)和放大层(24)来形成预定层。 优选地,放大层的边缘部分比放大层的中心部分薄多达30-40nm。
    • 37. 发明公开
    • 역적층 구조를 갖는 평면형 애벌랜치 포토다이오드
    • 具有反向堆叠结构的平面AVALANCHE光电
    • KR1020030001143A
    • 2003-01-06
    • KR1020010037513
    • 2001-06-28
    • 삼성전자주식회사
    • 범진욱오경석조승룡
    • H01L31/107
    • PURPOSE: A planar avalanche photodiode having an inversely stacked structure is provided to minimize dependency on characteristics of the avalanche photodiode in a diffusion process. CONSTITUTION: A p-type InP amplification layer(220), a p-type InGaAsP grading layer(230), a p-type InP charge layer(240), a p-type InGaAs absorbing layer(250), and a p-type InP cap layer(260) are stacked on a p-type InP semiconductor substrate(210). A diffusion mask is stacked on the p-type InP cap layer(260). An n-type diffusion region(270) is formed on the p-type InP cap layer(260) and the p-type InGaAs absorbing layer(250) by diffusing n-type dopants. The diffusion mask is removed by performing an etch process. A protective layer(290) is stacked on the p-type InP cap layer(260) by using a photo-lithography process and the etch process. An n-type upper electrode(280) is stacked on a surface of the exposed diffusion region(270). A p-type lower electrode(310) is stacked under the p-type InP semiconductor substrate(210). An SiO2 light receiving layer(300) is stacked under the p-type InP semiconductor substrate(210).
    • 目的:提供具有相反堆叠结构的平面雪崩光电二极管,以最小化对扩散过程中雪崩光电二极管特性的依赖性。 构成:p型InP放大层(220),p型InGaAsP分级层(230),p型InP电荷层(240),p型InGaAs吸收层(250) 型的InP覆盖层(260)堆叠在p型InP半导体衬底(210)上。 扩散掩模层叠在p型InP覆盖层(260)上。 通过扩散n型掺杂剂,在p型InP覆盖层(260)和p型InGaAs吸收层(250)上形成n型扩散区(270)。 通过进行蚀刻处理去除扩散掩模。 通过使用光刻工艺和蚀刻工艺将保护层(290)堆叠在p型InP覆盖层(260)上。 在暴露的扩散区域(270)的表面上层叠有n型上部电极(280)。 p型下电极(310)堆叠在p型InP半导体衬底(210)的下方。 SiO 2光接收层(300)层叠在p型InP半导体衬底(210)的下方。
    • 38. 发明公开
    • 선택 영역 성장법을 이용한 도파로형 광 수신 소자의 제작방법
    • 基于选择区域生长技术制造波导光电子的方法
    • KR1020010094513A
    • 2001-11-01
    • KR1020000016857
    • 2000-03-31
    • 삼성전자주식회사
    • 조승룡
    • H01L31/18
    • Y02P70/521
    • PURPOSE: A fabrication method of waveguide photodetectors is provided to improve a yield and to simplify the manufacturing process without using mesa etching by directly forming a mesa structure using a selective area growing method. CONSTITUTION: A mesa structure is formed by sequentially growing a lower clad layer(12) of InGaAsP, a lower waveguide(13) of undoped InGaAs, an active layer(14) of undoped InGaAsP, and an upper waveguide(15) of undoped InP on an InP substrate(11) by selective area growth using a SiO2 mask. After removing the SiO2 mask, a Zn diffused region(16) is formed by diffusing zinc into the active region(14). A passivation layer is formed by coating a BCB(bisbenzocyclobutene) at both sides of the mesa structure. A P-type metal electrode(17) and an N-type metal electrode(18) are formed on the Zn diffused region(16) and on the rear surface of the substrate(11), respectively.
    • 目的:提供一种波导光电检测器的制造方法,以便通过使用选择性区域生长方法直接形成台面结构来提高成品率并简化制造工艺而不使用台面蚀刻。 构成:通过依次生长InGaAsP的下包层(12),未掺杂的InGaAs的下波导(13),未掺杂的InGaAsP的有源层(14)和未掺杂的InP的上波导(15),形成台面结构 通过使用SiO 2掩模的选择性区域生长在InP衬底(11)上。 在除去SiO 2掩模之后,通过将锌扩散到有源区(14)中形成Zn扩散区(16)。 通过在台面结构的两侧涂覆BCB(双苯并环丁烯)形成钝化层。 分别在Zn扩散区域(16)和基板(11)的后表面上形成P型金属电极(17)和N型金属电极(18)。
    • 39. 发明授权
    • 애벌런치 포토다이오드 및 그 제조방법
    • 애벌런치포토다이오드및그제조방법
    • KR100464452B1
    • 2005-01-03
    • KR1020020020491
    • 2002-04-15
    • 삼성전자주식회사
    • 양승기조승룡전병옥
    • H01L29/862
    • PURPOSE: An avalanche photodiode and a method for manufacturing the same are provided to be capable of overcoming local breakdown phenomenon, such as the edge breakdown generated at the peripheral portion of an amplifying layer, and smoothly obtaining amplification gain at the center portion of the amplifying layer. CONSTITUTION: An avalanche photodiode is provided with a substrate(20), a predetermined layer formed at the upper portion of the substrate, a diffusion layer(25,26) formed at the upper portion of the resultant structure, a guard ring part(60) electrically isolated from the diffusion layer, a P type electrode(28) formed at the upper portion of the diffusion layer, and an N type electrode(29) formed at the back side of the substrate. At this time, the predetermined layer is formed by sequentially depositing a light absorbing layer(21), a grading layer(22), an electric field buffer layer(23), and an amplifying layer(24) on the substrate. Preferably, the edge portion of the amplifying layer is thinly formed than the center portion of the amplifying layer as much as 30-40 nm.
    • 目的:提供一种雪崩光电二极管及其制造方法,能够克服局部击穿现象,例如在放大层周边部分产生的边缘击穿,并在放大中心部分平滑地获得放大增益 层。 本发明提供一种雪崩光电二极管,该雪崩光电二极管具有基板(20),形成在基板上部的规定层,形成在所得到的结构上部的扩散层(25,26),保护环部(60 )与扩散层电隔离,形成在扩散层上部的P型电极(28)以及形成在基板背面的N型电极(29)。 此时,通过在基板上依次沉积光吸收层(21),缓变层(22),电场缓冲层(23)和放大层(24)来形成预定层。 优选地,放大层的边缘部分比放大层的中心部分薄地形成多达30-40nm。
    • 40. 发明授权
    • 평면형 애벌랜치 포토다이오드
    • 平面AVALANCHE PHOTODIODE
    • KR100480288B1
    • 2005-04-06
    • KR1020010059499
    • 2001-09-26
    • 삼성전자주식회사
    • 김문덕조승룡범진욱
    • H01L31/107
    • H01L31/107
    • 본 발명에 따른 평면형 애벌랜치 포토다이오드는, 기판과; 상기 기판의 하부면 밑에 형성된 하부 전극과; 상기 기판 상에 형성되며, 내부 전기장에 의해 주입된 제1 캐리어가 이온화 충돌을 통해 새로운 전자-정공 쌍을 생성하는 증폭층과; 입사된 광에 의해 여기된 전자-정공 쌍이 내부 전기장에 의해 분리됨에 따라 상기 제1 캐리어를 생성하는 흡수층과; 상기 증폭층 및 흡수층 사이에 형성되며, 상기 흡수층과 증폭층에 각각 상대적으로 세기가 낮고 높은 전기장을 인가하는 전하층과; 상기 전하층 및 흡수층 사이에 형성되며, 상기 제1 캐리어가 상기 증폭층으로 원활하게 주입되도록 하는 천이층과; 상기 흡수층 상에 형성되며, 그 중심에 형성된 코아부와 에칭 공정에 의해 상기 코아부와 이격되며 상기 코아부를 둘러싸는 가드부로 구성된 접촉층과; 상기 하부 전극과 함께 상기 내부 전기장을 형성하며, 상기 코아부 상에 형성된 코아 전극과 상기 가드부 상에 형성된 가드 전극으로 구성된 상부 전극을 포함한다.