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31. 发明申请

US20040189206A1 Xenon lamp 有权
标题翻译：氙灯
公开(公告)号：US20040189206A1
公开(公告)日：2004-09-30
申请号：US10810595
申请日：2004-03-29
申请人： Ushiodenki Kabushiki Kaisha
发明人： Norihiro Inaoka , Katsuoki Miyasu , Kyosuke Fujina
IPC分类号： H01J017/04
CPC分类号： H01J61/16 , H01J61/0732 , H01J61/86
摘要： A xenon lamp in which fluctuation of the arc can be suppressed and the time until formation of the flicker phenomenon delayed by having an anode with a flattened or rounded anode tip, a rounded or flattened back end; a portion with a diameter that gradually increases from the anode tip toward the back end of the anode; a portion with a decreasing diameter located behind the portion with the increasing diameter of an axial length which is greater than the length in the axial direction of the portion with an increasing diameter; and a portion with a maximum outside diameter formed in a transition area between the portion with the increasing diameter and the portion with a decreasing diameter, and that the transition area between the portion with the increasing diameter and the portion with the decreasing diameter is formed to be continuous.
摘要翻译：可以抑制电弧波动的氙灯和通过具有扁平或圆形的阳极尖端，圆形或扁平的后端的阳极延迟形成闪烁现象的时间; 直径从阳极端部朝向阳极的后端逐渐增加的部分; 具有直径减小的部分的直径位于所述部分后面，其轴向长度的直径的增加大于所述直径增加的部分的轴向方向上的长度; 并且具有最大外径的部分形成在具有增加直径的部分与直径减小的部分之间的过渡区域中，并且具有增加直径的部分与具有减小直径的部分之间的过渡区域形成为是连续的

32. 发明申请

US20040183038A1 Extreme UV radiation source and semiconductor exposure device 失效
标题翻译：极紫外线辐射源和半导体曝光装置
公开(公告)号：US20040183038A1
公开(公告)日：2004-09-23
申请号：US10793042
申请日：2004-03-05
申请人： Ushiodenki Kabushiki Kaisha
发明人： Tatumi Hiramoto , Kazuaki Hota
IPC分类号： H01J007/24
CPC分类号： H05G2/003 , H05G2/005
摘要： A usable 13.5 nm radiation source in which Sn is the radiation substance, in which rapid transport with good reproducibility is possible up to the plasma generation site and in which formation of detrimental nulldebrisnull and coagulation of the vapor are suppressed as much as possible is achieved using emission of Sn ions in that SnH4 is supplied continuously or intermittently to the heating/ excitation part, is subjected to discharge heating and excitation or laser irradiation heating and excitation, and thus, is converted into a plasma from which extreme UV light with a main wavelength of 13.5 nm is emitted.
摘要翻译：其中Sn是辐射物质的可用的13.5nm辐射源，其中尽可能多地抑制其中可能直到等离子体产生位点的快速传输以及有害的“碎片”和蒸汽凝结的形式，通过将SnH4的发射连续地或间歇地供给到加热/激发部而实现的Sn离子的发射，经受放电加热和激发或激光照射加热和激发，从而被转换成等离子体，其中具有极紫外光发射主波长13.5nm。

33. 发明申请

US20040149937A1 Extreme UV light source and semiconductor exposure device 失效
标题翻译：极紫外光源和半导体曝光装置
公开(公告)号：US20040149937A1
公开(公告)日：2004-08-05
申请号：US10762355
申请日：2004-01-23
申请人： Ushiodenki Kabushiki Kaisha
发明人： Tatumi Hiramoto
IPC分类号： G01J001/00
CPC分类号： H05G2/003 , H05G2/006
摘要： A UV light source in which Xenon (Xe) gas is mixed with a substance which, in the temperature range in which 10-valent Xe ions (Xe10null) occur, emits a number of free electrons from a molecule or an atom that at least half the number of electrons which are released from a Xe atom, and which at room temperature is molecular or atomic (for example Ar, Kr, Ne, N2 and NH3). A high voltage is applied in a pulse-like manner to the electrode on the ground side and the electrode on the high voltage side to produce a plasma with a high temperature and from which extreme UV light with a wavelength of 13.5 nm is formed and emitted. The invention can also be used an extreme UV light source of the capillary, plasma focus, and Z pinch types for example.
摘要翻译：将氙（Xe）气体与其中发生10价Xe离子（Xe <10+>）的温度范围内的物质混合的紫外光源从分子或原子发射出许多自由电子从Xe原子释放并且在室温下分子或原子（例如Ar，Kr，Ne，N 2和NH 3）的电子的数量的至少一半。以类似脉冲的方式向接地侧的电极和高电压侧的电极施加高电压，以产生具有高温的等离子体，从而形成并发射波长为13.5nm的极紫外光。本发明也可以使用例如毛细管的极紫外光源，等离子体聚焦和Z夹点类型。

34. 发明申请

US20040102129A1 Short-arc, ultra-high-pressure discharge lamp and method of manufacture 有权
标题翻译：短弧，超高压放电灯及其制造方法
公开(公告)号：US20040102129A1
公开(公告)日：2004-05-27
申请号：US10715522
申请日：2003-11-19
申请人： Ushiodenki Kabushiki Kaisha
发明人： Yoshitaka Kanzaki , Toyohiko Kumada , Katsuhiko Miyahara
IPC分类号： H01J009/00
CPC分类号： H01J61/368 , H01J5/46 , H01J9/323 , H01J61/86
摘要： To form side tubes with adequate resistance to pressure, and to provide a short-arc, ultra-high-pressure discharge lamp having such side tubes, and to provide a method of manufacturing such a lamp, a short-arc, ultra-high-pressure discharge lamp (1) has a luminescent tube (10) within which a pair of electrodes (2,2) face each other, and side tubes (11) that extend from opposite sides of the luminescent tube and in which a portion of the electrodes is sealed and in which a small space (B) is formed to enable the electrodes (2) to expand and contract freely without compression along their axes due to a difference in the indices of expansion of the materials that make up the electrodes (2) and the side tubes (11).
摘要翻译：为了形成具有足够的耐压性的侧管，并且提供具有这种侧管的短弧，超高压放电灯，并且提供制造这种灯的方法，短弧，超高压，压力放电灯（1）具有发光管（10），一对电极（2,2）彼此面对，以及侧管（11），其从发光管的相对侧延伸，并且其中一部分电极是密封的，其中形成有小的空间（B），以使得电极（2）能够沿着它们的轴线自由地膨胀和收缩而不会由于构成电极的材料的膨胀指数（2 ）和侧管（11）。

35. 发明申请

US20040095069A1 Light source device 失效
标题翻译：光源装置
公开(公告)号：US20040095069A1
公开(公告)日：2004-05-20
申请号：US10641009
申请日：2003-08-15
申请人： Ushiodenki Kabushiki Kaisha
发明人： Takashi Yamashita , Atsushi Imamura , Tomoyoshi Arimoto
IPC分类号： H01J017/44
CPC分类号： H01J65/046 , H01J61/54 , H01J61/545 , H01J61/86
摘要： A light source device in which the operating characteristic of the auxiliary light source can be improved, in which the starting property within the main discharge vessel is extremely advantageous and which has high reliability with respect to vibration resistance and impact strength without the disadvantage of a cost increase due to the complicated arrangement of the light source device, without reducing the proportion of good articles in the manufacture of the products, and without reducing the quality of the discharge lamp is achieved using a main discharge lamp mounted in a reflector with an auxiliary light source tightly held by the reflector or components which are adjacent to the reflector and without contact with the main discharge vessel.
摘要翻译：能够提高辅助光源的工作特性的光源装置，其中主放电容器内的启动特性是非常有利的，并且相对于抗振动性和冲击强度具有高可靠性，而不会造成成本由于光源装置的复杂布置而增加，而不会降低制品制造中的良好物品的比例，并且不降低放电灯的质量是使用安装在具有辅助光的反射器中的主放电灯实现的源被紧靠保持的反射器或与反射器相邻并且不与主放电容器接触的部件。

36. 发明申请

US20030234615A1 Discharge lamp of the short arc type 有权
标题翻译：短弧型放电灯
公开(公告)号：US20030234615A1
公开(公告)日：2003-12-25
申请号：US10460398
申请日：2003-06-13
申请人： USHIODENKI KABUSHIKI KAISHA
发明人： Norihiro Inaoka , Takafumi Kimura
IPC分类号： H01J017/16 , H01J061/35
CPC分类号： H01J61/35 , H01J61/366
摘要： A discharge lamp of the short arc type in which a lead pin, located within a hermetically sealed tube, is prevented from being irradiated with light. Such a construction prevents the lead pin from undergoing a temperature rise thereby preventing the destruction of the hermetically sealed tube. The discharge lamp of the short arc type includes an arc tube adjoined laterally by hermetically sealed tubes through which a lead pin, which supports an electrode, is routed. The hermetically sealed tubes are sealed by graded glass on the lead pins, and the lead pin is prevented from being irradiated with light by providing the outside surface of the hermetically sealed tube, at least in part, with a high emissivity material and then providing a reflectivity material on the exterior surface of the emissivity material.
摘要翻译：一种短弧型的放电灯，其中防止位于密封管内的引脚被照射。这种结构防止引脚经历温度升高，从而防止密封管的破坏。短弧型的放电灯包括通过气密密封的管子横向邻接的电弧管，通过该电弧管，支撑电极的引脚穿过灯管。气密密封的管被引导销上的分级玻璃密封，并且通过至少部分地用高辐射率材料提供密封管的外表面来防止引线被光照射，然后提供辐射材料外表面上的反射材料。

37. 发明申请

US20030203699A1 Process for anticipating the service life of a rare gas discharge lamp and a system for anticipating the service life of rare gas discharge lamp 失效
标题翻译：用于预测稀有气体放电灯的使用寿命的过程和用于预测稀有气体放电灯的使用寿命的系统
公开(公告)号：US20030203699A1
公开(公告)日：2003-10-30
申请号：US10423948
申请日：2003-04-28
申请人： Ushiodenki Kabushiki Kaisha
发明人： Masaharu Otsuka , Takeo Matsushima
IPC分类号： H01J009/42
CPC分类号： H05B41/2925 , H05B37/03 , Y02B20/208
摘要： A process for anticipating the service life of a rare gas discharge lamp and a system for anticipating the service life of a rare gas discharge lamp. In a process for anticipating the lifetime of a rare gas discharge lamp in which an arc tube contains an opposed anode and cathode and in which the cathode contains an emitter substance, the rare gas discharge lamp is supplied with a certain current which is lower than the rated current, the voltage of the rare gas discharge lamp is determined at this instant and the swing width of this voltage is measured, and using the value of the swing width of this voltage, the service life of the rare gas discharge lamp is anticipated. A device for executing the process has a current control for controlling current supplied to the rare gas discharge lamp, a voltage detector for determining the voltage of the rare gas discharge lamp, a voltage swing width detector for determining a swing width of the voltage based on the voltage determined by said voltage detector, a basic data memory mechanism which stores values of the swing width of the voltage for the rare gas discharge lamp operated with the rated current which have been measured beforehand by operation of the lamp a the reduced current, a comparator for comparing measured values of the swing width of the voltage of the rare gas discharge lamp when the current control supplies a reduced current which is lower than the rated current, to data stored in the basic data memory mechanism and for outputting a difference value corresponding to the difference between, and corresponding to the difference between, and a duration of service life converter for converting the difference value output by the comparison means into an indication of the service life of the rare gas discharge lamp.
摘要翻译：用于预测稀有气体放电灯的使用寿命的方法和用于预测稀有气体放电灯的使用寿命的系统。在用于预测其中电弧管包含相对的阳极和阴极并且其中阴极包含发射体物质的稀有气体放电灯的寿命的过程中，稀有气体放电灯被供应一定电流，该电流低于额定电流，此时确定稀有气体放电灯的电压，并测量该电压的摆幅宽度，并且使用该电压的摆幅宽度值预期稀有气体放电灯的使用寿命。用于执行该处理的装置具有用于控制提供给稀有气体放电灯的电流的电流控制，用于确定稀有气体放电灯的电压的电压检测器，用于基于以下步骤确定电压的摆幅宽度的电压摆幅宽度检测器由所述电压检测器确定的电压，基本数据存储机构，其存储已经通过灯的操作预先测量的以额定电流操作的稀释气体放电灯的电压的摆幅宽度为减小的电流，a 比较器，用于当电流控制将低于额定电流的降低电流提供给稀有气体放电灯的电压的摆幅宽度的测量值与存储在基本数据存储机构中的数据进行比较，并输出相应的差值与之间的差异，并对应于使用寿命转换器之间的差异和持续时间通过比较装置输出的差值成为稀有气体放电灯的使用寿命的指示。

38. 发明申请

US20030102807A1 Ultra-high pressure mercury lamp 有权
标题翻译：超高压汞灯
公开(公告)号：US20030102807A1
公开(公告)日：2003-06-05
申请号：US10309081
申请日：2002-12-04
申请人： Ushiodenki Kabushiki Kaisha
发明人： Tetsuji Hirao
IPC分类号： H01J017/20
CPC分类号： H01J61/86 , H01J61/20
摘要： To devise an ultra-high pressure mercury lamp in which even in the case of lamp operation over a long time devitrification of the light emitting part is suppressed, an ultra-high pressure mercury lamp with a silica glass light emitting part in there is a pair of opposed electrodes, a rare gas, a halogen and at least 0.15 mg/mm3 of mercury, by the amount of halogen in the light emitting part being at least 1.0null10null4 nullmol/mm3 and the amount of Mo in the light emitting part being at most 0.5null10null5 nullmol/mm3. Also, such a lamp can have an amount of halogen in the light emitting part of at least 2.0null10null4 nullmol/mm3 with an amount of Mo of at most 1.0null10null5 nullmol/mm3.
摘要翻译：为了设计一种超高压汞灯，其中即使在长时间的灯操作的情况下，发光部分的失透也被抑制，在其中具有石英玻璃发光部分的超高压汞灯是一对相对电极，稀有气体，卤素和至少0.15mg / mm 3的汞，发光部分中的卤素的量为至少1.0×10 -4 mumol / mm 3，并且发光部分中的Mo量至多0.5x10-5 mumol / mm3。此外，这种灯可以在发光部分中的卤素量至少为2.0×10 -4 mumol / mm 3，Mo的量至多为1.0×10 -5 mumol / mm 3。

39. 发明申请

US20030001515A1 Light source device 失效
标题翻译：光源装置
公开(公告)号：US20030001515A1
公开(公告)日：2003-01-02
申请号：US10183446
申请日：2002-06-28
申请人： Ushiodenki Kabushiki Kaisha
发明人： Masashi Okamoto , Mineo Nakayama , Izumi Takaya
IPC分类号： H05B037/02
CPC分类号： H05B41/292
摘要： A discharge lamp which eliminates the large line noise that forms in discharge lamps during startup while preventing heat loss in the transformer by providing a pair of opposed electrodes for the main discharge and an auxiliary electrode arranged such that it does not come into contact with the discharge space for the main discharge, a feed circuit for supplying the discharge current to the electrodes for the main discharge, and a starter circuit which produces a high voltage between one of the electrodes for the main discharge and the auxiliary electrode. The high voltage generating part of the starter circuit which includes at least a high voltage transformer that is separated from the feed circuit while the discharge lamp and the high voltage generating part are formed as an integral unit.
摘要翻译：一种放电灯，其消除了在启动期间在放电灯中形成的大的线路噪声，同时通过提供用于主放电的一对相对电极和布置成不与放电接触的辅助电极来防止变压器中的热损失用于主放电的空间，用于向主放电用电极供给放电电流的馈电电路，以及在用于主放电和辅助电极的电极之间产生高电压的起动电路。起动器电路的高电压产生部分包括至少一个高压变压器，当放电灯和高电压产生部分形成为一个整体单元时，它与馈电电路分离。

40. 发明申请

US20020185972A1 Discharge lamp of the short arc type 失效
标题翻译：短弧型放电灯
公开(公告)号：US20020185972A1
公开(公告)日：2002-12-12
申请号：US10163510
申请日：2002-06-07
申请人： Ushiodenki Kabushiki kaisha
发明人： Takeo Matsushima , Yasuro Kikuchi , Kyosuke Fujina
IPC分类号： H01J017/20
CPC分类号： H01J61/547
摘要： A discharge lamp of the short arc type having a trigger wire which can be installed in a state which is suitable for a directional capacity of the electrode regardless of what type of base the lamp has is achieved by the trigger wire on the outside surface of an arc tube having the following characteristic: an annular area that is formed by a portion of the trigger wire which is looped around the arc tube and elastically held against the outside surface of the arc tube; a first holding part which adjoins a first end of the portion of the trigger wire that forms the annular area and which extends in an axial direction along the arc tube; a second holding part which adjoins a second end of end of the portion of the trigger wire that forms the annular area and which extends in the axial direction along the arc tube.
摘要翻译：具有触发线的短弧型放电灯，其可以以适合于电极的定向能力的状态安装，而不管灯具具有什么类型的基座，通过触发线在外部表面上实现具有以下特征的弧光管：由触发线的一部分形成的环形区域，其围绕电弧管环绕并且弹性地保持抵靠电弧管的外表面; 第一保持部，其与触发线的形成环状区域的部分的第一端相邻，并且沿着所述电弧管沿轴向延伸; 第二保持部，其邻接形成环形区域的触发线的部分的端部的第二端，并且沿着电弧管在轴向方向上延伸。

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