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    • 34. 发明申请
    • FLAT LAMP DEVICE WITH MULTI ELECTRON SOURCE ARRAY
    • 具有多电子源阵列的平面灯装置
    • WO2006115313A1
    • 2006-11-02
    • PCT/KR2005/002120
    • 2005-07-04
    • LEE, Seung-Ho
    • LEE, Seung-Ho
    • H05B33/26
    • H01J63/02H01J63/06
    • Disclosed is a flat lamp device, including lower and upper glass plates facing each other in parallel; spacers interposed between the plates to keep distance therebetween; a cathode electrode singly formed over the entire upper surface of the lower glass plate; an insulation film formed on the cathode electrode; semiconductor films independently patterned on the insulation film at intervals; a catalyst-metal layer laminated on the buffer metal to improve the adhesion of catalyst metal formed on the semiconductor films; carbon nano-tubes formed on the catalyst-metal layer; a grid electrode installed on the carbon nano-tubes between the plates to guide electron emission from the carbon nano-tubes with a mesh shape having an opening for passage of the emitted electrons; an anode electrode formed below the upper glass plate to accelerate the emitted electrons; and a fluorescent layer formed below the anode electrode to emit light by collision with the accelerated electrons.
    • 公开了一种扁平灯装置,包括并列相对的下玻璃板和上玻璃板; 插入板之间的间隔件以保持它们之间的距离; 单独形成在下玻璃板的整个上表面上的阴极电极; 形成在阴极上的绝缘膜; 间隔地在绝缘膜上独立构图的半导体膜; 层叠在缓冲金属上的催化剂 - 金属层,以改善形成在半导体膜上的催化剂金属的粘附性; 形成在催化剂 - 金属层上的碳纳米管; 安装在板之间的碳纳米管上的栅极,以引导具有网孔形状的碳纳米管的电子发射,该网状形状具有用于发射电子通过的开口; 形成在上玻璃板下面以加速发射的电子的阳极电极; 以及形成在阳极电极下方的荧光层,通过与加速电子的碰撞而发光。
    • 37. 发明申请
    • GAS DISTRIBUTION APPARATUS, AND SUBSTRATE-PROCESSING APPARATUS COMPRISING SAME
    • 气体分配装置以及包含该气体分配装置的基板处理装置
    • WO2010101369A3
    • 2010-11-25
    • PCT/KR2010001209
    • 2010-02-26
    • JUSUNG ENG CO LTDCHOI SUN HONGLEE SEUNG HOLEE YOUNG HEE
    • CHOI SUN HONGLEE SEUNG HOLEE YOUNG HEE
    • H01L21/205B05B7/08
    • C23C16/45565C23C16/452C23C16/45574C23C16/45591
    • The present invention relates to a gas distribution apparatus, and to a substrate-processing apparatus comprising same. The present invention provides a gas distribution apparatus comprising: a first gas distribution unit which sprays at least two process gases over a substrate through different routes; and a second gas distribution unit which sprays process gas, having a decomposition temperature higher than the average of the decomposition temperatures of said at least two process gases, over the substrate. The first gas distribution unit is divided into at least two subunits which are arranged about the second gas distribution unit, and which can be combined together or separated from each other. The present invention also provides a substrate-processing apparatus comprising the gas distribution apparatus.
    • 气体分配装置以及包括其的基板处理装置技术领域本发明涉及气体分配装置以及包括它的基板处理装置。 本发明提供了一种气体分配装置,包括:第一气体分配单元,通过不同的路线将至少两种处理气体喷射在基板上; 以及第二气体分配单元,该第二气体分配单元在基板上喷射分解温度高于所述至少两种处理气体的分解温度的平均值的处理气体。 第一气体分配单元分成至少两个子单元,所述至少两个子单元围绕第二气体分配单元设置并且可以彼此组合或分离。 本发明还提供了一种包括气体分配装置的基板处理装置。
    • 39. 发明申请
    • PLANAR-TYPE ICP ANTENNA FOR GENERATING HIGH DENSITY PLASMA
    • 用于生成高密度等离子体的PLANAR型ICP天线
    • WO2007083867A1
    • 2007-07-26
    • PCT/KR2006/002497
    • 2006-06-27
    • INNOVATION FOR CREATIVE DEVICES CO., LTD.KIM, Tae-UnLEE, Se-JinJANG, Kyung-HwanRYEO, Jong-BeomLEE, Seung-Ho
    • KIM, Tae-UnLEE, Se-JinJANG, Kyung-HwanRYEO, Jong-BeomLEE, Seung-Ho
    • H05H1/34
    • H01J37/32174H01J37/321
    • A planar-type ICP (Inductively Coupled Plasma) antenna for generating a high density plasma is capable of improving uniformity of plasma as well as improving density of plasma. For this purpose, the planar-type ICP antenna for generating a high density plasma includes a first antenna spirally shaped outward from an end thereof, a second antenna having an end spaced apart from the end of the first antenna and spirally shaped in the same direction as the first antenna, a bridge member connecting the ends of the first and second antennas and having a center portion bent to be protruded upward, and a connection member mounted above the first and second antennas and the bridge member to connect the other end of the first antenna to the other end of the second antenna. A high frequency power is connected to the connection member, and the bridge member is grounded using a ground wire.
    • 用于产生高密度等离子体的平面型ICP(感应耦合等离子体)天线能够改善等离子体的均匀性以及提高等离子体的密度。 为此,用于产生高密度等离子体的平面型ICP天线包括从其端部向外螺旋形的第一天线,具有与第一天线的端部间隔开的端部的第二天线,并且沿相同方向螺旋形地 作为第一天线,桥接构件连接第一和第二天线的端部并且具有弯曲成向上突出的中心部分,以及安装在第一和第二天线和桥构件上方的连接构件,以将第二天线和第二天线的另一端连接 第一天线到第二天线的另一端。 高频电源与连接部件连接,桥接部件使用接地线接地。
    • 40. 发明申请
    • FLAT LAMP DEVICE FOR TFT-LCD USING CARBON NANO TUBE
    • 用于使用碳纳米管的TFT-LCD的平面灯装置
    • WO2007058502A1
    • 2007-05-24
    • PCT/KR2006/004862
    • 2006-11-17
    • LEE, Seung-Ho
    • LEE, Seung-Ho
    • G02F1/13357
    • B82Y20/00G02F1/133602G02F1/133621G02F2001/133612G02F2001/133625G02F2202/36G09G3/3406G09G2320/0257G09G2320/0646H01J63/02H01J63/06
    • The present invention relates to a flat lamp device for TFT-LCD using a carbon nano tube capable of eliminating an after-image, wherein the flat lamp device has a high uniformity and a low power consumption. For this purpose, the present invention provides a flat lamp device for TFT-LCD using a carbon nano tube, including: a cathode electrode; carbon nano tubes installed on the cathode electrode; a grid electrode installed over the carbon nano tubes to induce electron emission from the carbon nano tubes; an anode electrode installed over the grid electrode and accelerating electrons emitted from the carbon nano tubes; a phosphor layer formed on a lower surface of the anode electrode and colliding with the accelerated electrons to emit the light; and a controller for applying a voltage pulse to the cathode electrode so that the phosphor layer can emit light.
    • 本发明涉及一种使用能够消除后置图像的碳纳米管的TFT-LCD平板灯装置,其中平板灯装置具有高均匀性和低功耗。 为此,本发明提供了一种使用碳纳米管的TFT-LCD平板灯装置,包括:阴极电极; 碳纳米管安装在阴极上; 安装在碳纳米管上的栅极,以诱导来自碳纳米管的电子发射; 安装在栅极上的阳极,并加速从碳纳米管发射的电子; 形成在阳极电极的下表面上并与加速电子碰撞以发光的荧光体层; 以及用于向阴极施加电压脉冲使得荧光体层能够发光的控制器。