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    • 40. 发明授权
    • Defect detecting method and defect detecting device
    • 缺陷检测方法和缺陷检测装置
    • US07978903B2
    • 2011-07-12
    • US11510789
    • 2006-08-25
    • Koichi KojimaEisuke Kanazawa
    • Koichi KojimaEisuke Kanazawa
    • G06K9/00
    • G06T7/0004G09G3/006G09G3/3611
    • A defect detecting method includes: an image acquiring process for capturing an image of an inspection object having an identical sequence of pattern and acquiring the image; and a defect emphasizing process for emphasizing a defect of the captured image. The defect emphasizing process includes: an inspected-point selecting process for sequentially selecting an inspection point on the captured image; and a defect emphasizing value calculating process for obtaining differences by subtracting from a luminance value of the selected inspection point each luminance value of a plurality of comparison points disposed around the inspection point and selecting one difference of the smallest value of the obtained differences in luminance to determine a defect emphasizing value of the inspection point.
    • 缺陷检测方法包括:图像获取处理,用于捕获具有相同的图案序列并获取图像的检查对象的图像; 以及强调拍摄图像的缺陷的缺陷强调处理。 缺陷强调处理包括:检查点选择处理,用于在拍摄图像上顺序地选择检查点; 以及缺陷强调值计算处理,用于通过从所选择的检查点的亮度值中减去设置在检查点周围的多个比较点的每个亮度值,并且将获得的亮度差异的最小值的一个差选择为 确定检查点的强调值的缺陷。