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    • 40. 发明授权
    • Lightweight bondhead assembly
    • 轻型债券头组件
    • US07303111B2
    • 2007-12-04
    • US11250270
    • 2005-10-14
    • Ajit GaunekarGary Peter Widdowson
    • Ajit GaunekarGary Peter Widdowson
    • B23K37/00
    • H01L21/67144H01L21/6838
    • A bondhead assembly having a bond body for mounting a bonding tool, a support structure that is configured to be drivable for moving the bondhead assembly to different locations and flexural elements arranged substantially along at least one plane which couple the bond body to the support structure for flexibly supporting the bond body during movement with respect to the support structure. A motor is coupled to the support structure and it is operative to drive the bond body to move relative to the support structure along an axis extending substantially perpendicular to the at least one plane.
    • 一种具有用于安装接合工具的接合体的接合头组件,构造成可驱动以将接合头组件移动到不同位置的支撑结构,以及基本上沿至少一个平面布置的弯曲元件,所述至少一个平面将接合体连接到支撑结构, 在相对于支撑结构的运动期间柔性地支撑粘结体。 电动机联接到支撑结构,并且其可操作地沿着基本上垂直于至少一个平面延伸的轴线驱动结合体相对于支撑结构移动。