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31. 发明授权

US6066554A Method of manufacturing three elemental diffusion barrier layer 失效
标题翻译：制造三元素扩散阻挡层的方法
公开(公告)号：US6066554A
公开(公告)日：2000-05-23
申请号：US959095
申请日：1997-10-28
申请人： Youn Tae Kim , Chi Hoon Jun , Jong Tae Baek
发明人： Youn Tae Kim , Chi Hoon Jun , Jong Tae Baek
IPC分类号： H01L21/22 , H01L21/285 , H01L21/768 , H01L21/4763
CPC分类号： H01L21/76856 , H01L21/28568 , H01L21/76841 , H01L21/76855
摘要： A three elemental compound for diffusion barrier layer having a superior diffusion barrier characteristics manufactured by forming the compound between the silicon diffused into the diffusion barrier layer and the two elemental compound for diffusion barrier layer before the metal wire layer penetrates into the diffusion barrier layer to reach the underlying silicon layer, using the different characteristics of the diffusion rate as above, is disclosed. A method of forming three elemental compound for diffusion barrier layer according to the present invention comprises a silicon substrate. A silicide layer is deposited on the silicon substrate. A refractory metal nitride layer is then deposited on the silicide layer. A metal wire layer is deposited on the refractory metal nitride layer. A heat treatment of the resulting structure is performed to form a three elemental compound for diffusion barrier layer between the silicide layer and the refractory metal nitride layer by out-diffusing a silicon contained in the silicide layer and reacting the silicon introduced into the refractory metal nitride layer with the refractory metal nitride layer, such that the diffusion barrier characteristics is improved.
摘要翻译：用于扩散阻挡层的三元素化合物具有优异的扩散阻挡特性，其通过在扩散到扩散阻挡层中的硅和扩散阻挡层的两种元素化合物之间形成化合物而制成，在金属丝层穿透到扩散阻挡层之前达到公开了使用上述扩散速率的不同特性的底层硅层。根据本发明的形成用于扩散阻挡层的三种元素化合物的方法包括硅衬底。在硅衬底上沉积硅化物层。然后将难熔金属氮化物层沉积在硅化物层上。金属丝层沉积在难熔金属氮化物层上。对所得到的结构进行热处理，以在硅化物层和难熔金属氮化物层之间形成用于扩散阻挡层的三元素化合物，通过使包含在硅化物层中的硅扩散并使引入到难熔金属氮化物层，使难扩散阻挡特性提高。

32. 发明授权

US08319397B2 Piezoelectric power generator 有权
标题翻译：压电发电机
公开(公告)号：US08319397B2
公开(公告)日：2012-11-27
申请号：US12862577
申请日：2010-08-24
申请人： Sang Choon Ko , Chang Han Je , Ho Jun Ryu , Sung Sik Lee , Chi Hoon Jun
发明人： Sang Choon Ko , Chang Han Je , Ho Jun Ryu , Sung Sik Lee , Chi Hoon Jun
IPC分类号： H01L41/08
CPC分类号： H01L41/1138 , B60C23/0411 , H01L41/1136 , H02N2/186
摘要： Provided is a small piezoelectric power generator applied to a wireless sensor network system of a tire pressure monitoring system (TPMS) for monitoring an internal environment of a tire such as variation in air pressure in the tire. In particular, when the system, in which air pressure, temperature and acceleration sensors are mounted, installed in the tire is operated in the TPMS for an automobile, a small piezoelectric power generator for the TPMS can be used as a power source in place of a conventional battery. The piezoelectric power generator includes a substrate having an electrode for transmitting power to the exterior, a metal plate formed on the substrate, and a piezoelectric body disposed on the metal plate and transmitting the power generated by a piezoelectric material to the electrode.
摘要翻译：提供了一种应用于轮胎压力监测系统（TPMS）的无线传感器网络系统的小型压电发电机，用于监测轮胎的内部环境，例如轮胎中的空气压力的变化。特别地，当安装在轮胎中的气压，温度和加速度传感器的系统在用于汽车的TPMS中运行时，用于TPMS的小压电发电机可以用作电源来代替常规电池。压电发电机包括具有用于向外部传输电力的电极的基板，形成在基板上的金属板，以及设置在金属板上并将由压电材料产生的电力传递到电极的压电体。

33. 发明授权

US08047074B2 Humidity sensor and method of manufacturing the same 有权
标题翻译：湿度传感器及其制造方法
公开(公告)号：US08047074B2
公开(公告)日：2011-11-01
申请号：US12617701
申请日：2009-11-12
申请人： Chi Hoon Jun , Sang Choon Ko , Chang Auck Choi , Byoung Gon Yu
发明人： Chi Hoon Jun , Sang Choon Ko , Chang Auck Choi , Byoung Gon Yu
IPC分类号： G01N27/12
CPC分类号： G01N27/121
摘要： Provided are a humidity sensor and a method of manufacturing the same. The humidity sensor has high sensitivity, quick response time, improved temperature characteristics, low hysteresis and excellent durability. Moreover, for the humidity sensor, a humidity sensitive layer may be formed of various materials. The humidity sensor may be manufactured in a small size on a large scale.The humidity sensor includes a substrate, an open cavity with an open upper portion formed to have a depth and a width in the substrate, a plurality of electrode pads formed on the substrate, a heater connected to one pad of the electrode pads at one end, and connected to another pad of the electrode pads at the other end to be suspended over the open cavity, a plurality of sensing electrodes formed on the same plane as the heater, and suspended over the open cavity to output a sensed signal to the electrode pads, a humidity sensitive layer formed on the heater and the sensing electrodes, suspended over the open cavity, and changed in characteristic according to the humidity, and an ambient temperature measurement part configured to measure the temperature around the humidity sensor, wherein the temperature is used as a reference temperature to control a heating temperature of the heater.
摘要翻译：提供了一种湿度传感器及其制造方法。湿度传感器灵敏度高，响应时间快，温度特性好，滞后小，耐久性好。此外，对于湿度传感器，湿度敏感层可以由各种材料形成。湿度传感器可以大规模制造。湿度传感器包括基底，具有形成为在基底中具有深度和宽度的敞开上部的开口腔，形成在基底上的多个电极垫，一端连接到电极垫的一个垫并且在另一端连接到电极焊盘的另一焊盘以悬挂在开放空腔上，多个感测电极形成在与加热器相同的平面上，并且悬挂在开放空腔上以将感测到的信号输出到电极衬垫，形成在加热器上的湿度敏感层和悬挂在开放空腔上的感测电极，并且根据湿度改变特性;以及环境温度测量部件，被配置为测量湿度传感器周围的温度，其中温度为用作参考温度来控制加热器的加热温度。

34. 发明申请

US20100147070A1 HUMIDITY SENSOR AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：湿度传感器及其制造方法
公开(公告)号：US20100147070A1
公开(公告)日：2010-06-17
申请号：US12617701
申请日：2009-11-12
申请人： Chi Hoon JUN , Sang Choon Ko , Chang Auck Choi , Byoung Gon Yu
发明人： Chi Hoon JUN , Sang Choon Ko , Chang Auck Choi , Byoung Gon Yu
IPC分类号： G01N19/10 , B05D5/12 , B44C1/22
CPC分类号： G01N27/121
摘要： Provided are a humidity sensor and a method of manufacturing the same. The humidity sensor has high sensitivity, quick response time, improved temperature characteristics, low hysteresis and excellent durability. Moreover, for the humidity sensor, a humidity sensitive layer may be formed of various materials. The humidity sensor may be manufactured in a small size on a large scale.The humidity sensor includes a substrate, an open cavity with an open upper portion formed to have a depth and a width in the substrate, a plurality of electrode pads formed on the substrate, a heater connected to one pad of the electrode pads at one end, and connected to another pad of the electrode pads at the other end to be suspended over the open cavity, a plurality of sensing electrodes formed on the same plane as the heater, and suspended over the open cavity to output a sensed signal to the electrode pads, a humidity sensitive layer formed on the heater and the sensing electrodes, suspended over the open cavity, and changed in characteristic according to the humidity, and an ambient temperature measurement part configured to measure the temperature around the humidity sensor, wherein the temperature is used as a reference temperature to control a heating temperature of the heater.
摘要翻译：提供了一种湿度传感器及其制造方法。湿度传感器灵敏度高，响应时间快，温度特性好，滞后小，耐久性好。此外，对于湿度传感器，湿度敏感层可以由各种材料形成。湿度传感器可以大规模制造。湿度传感器包括基底，具有形成为在基底中具有深度和宽度的敞开上部的开口腔，形成在基底上的多个电极垫，一端连接到电极垫的一个垫并且在另一端连接到电极焊盘的另一焊盘以悬挂在开放空腔上，多个感测电极形成在与加热器相同的平面上，并且悬挂在开放空腔上以将感测到的信号输出到电极衬垫，形成在加热器上的湿度敏感层和悬挂在开放空腔上的感测电极，并且根据湿度改变特性;以及环境温度测量部件，被配置为测量湿度传感器周围的温度，其中温度为用作参考温度来控制加热器的加热温度。

35. 发明授权

US06987435B2 Micro-electromechanical actuators 失效
公开(公告)号：US06987435B2
公开(公告)日：2006-01-17
申请号：US10185654
申请日：2002-06-27
申请人： Jong Soo Ko , Dae Sik Lee , Myung Lae Lee , Chi Hoon Jun , Youn Tae Kim
发明人： Jong Soo Ko , Dae Sik Lee , Myung Lae Lee , Chi Hoon Jun , Youn Tae Kim
IPC分类号： H01H51/22
CPC分类号： H01H53/06 , B81B3/0021 , B81B2201/038 , B81B2203/0109 , B81B2203/051 , B81B2203/056 , B81B2203/058 , G02B6/266 , G02B6/3546 , G02B6/3572 , H01H1/0036 , H01H2001/0078
摘要： The present invention relates to a micro-electromechanical actuator. An electromagnetic-type micro-electromechanical actuator of the present invention has a conductive beam formed in a micro electronic substrate on an upper side of a magnetic substance, so that the conductive beam can be moved toward an in-plane mode in parallel to the micro electronic substrate depending on a direction that current flows. Therefore, the micro-electromechanical actuator can be applied to most of electromagnetic micro-electromechanical systems that require an in-plane mode.

36. 发明授权

US6069073A Method for forming diffusion barrier layers 失效
标题翻译：形成扩散阻挡层的方法
公开(公告)号：US6069073A
公开(公告)日：2000-05-30
申请号：US126094
申请日：1998-07-30
申请人： Youn Tae Kim , Chi Hoon Jun , Jong Tae Baek
发明人： Youn Tae Kim , Chi Hoon Jun , Jong Tae Baek
IPC分类号： C23C14/58 , C23C28/00 , H01L21/285 , H01L21/768 , H01L21/28
CPC分类号： H01L21/76856 , H01L21/28518 , H01L21/76841 , H01L21/76855
摘要： An improved method for forming diffusion barrier layers for sub-micron connects in integrated circuits is disclosed. The dual diffusion barriers is easily formed according to two-step annealing processes. The anneal includes two anneal cycles or steps, each cycle is performed at a separate and distinct temperature cycles. Each cycle is performed in the presence of ammonia (NH3) or nitrogen ambient. As a result of the first low-temperature cycle, a nitridation occurs at the upper surface to form a binary diffusion barrier layer. As a result of the second high-temperature cycle, an out-diffusion of silicon ions occurs at the lower surface to form a ternary alloys. The dual diffusion barriers obtained by a simple and easy two-step anneal processing exhibits an improved barrier performance. Furthermore, it is possible to form highly stable multilevel interconnections without any deterioration problems by reducing the sophisticated processing steps.
摘要翻译：公开了一种用于在集成电路中形成用于亚微米连接的扩散阻挡层的改进方法。根据两步退火工艺容易形成双扩散阻挡层。退火包括两个退火循环或步骤，每个循环在单独且不同的温度循环下进行。每个循环在氨（NH 3）或氮气氛下进行。作为第一低温循环的结果，在上表面发生氮化，形成二元扩散阻挡层。作为第二高温循环的结果，在下表面发生硅离子的扩散，形成三元合金。通过简单且容易的两步退火处理获得的双扩散阻挡层显示出改进的阻挡性能。此外，通过减少复杂的处理步骤，可以形成高度稳定的多电平互连而没有任何劣化问题。

37. 发明授权

US07963147B2 Micro gas sensor and method for manufacturing the same 有权
标题翻译：微气体传感器及其制造方法
公开(公告)号：US07963147B2
公开(公告)日：2011-06-21
申请号：US11951986
申请日：2007-12-06
申请人： Chi-Hoon Jun , Sang-Choon Ko , Hyeon-Bong Pyo , Seon-Hee Park
发明人： Chi-Hoon Jun , Sang-Choon Ko , Hyeon-Bong Pyo , Seon-Hee Park
IPC分类号： G01N7/00 , G01N27/12
CPC分类号： G01N27/128
摘要： Provided are a micro gas sensor for measuring a gas concentration configured to achieve a high heating and cooling rate of a gas sensitive layer, achieve temperature uniformity, and achieve durability against thermal impact and mechanical impact; and a method for manufacturing the micro gas sensor. The micro gas sensor includes: a vacuum cavity disposed in a substrate; a support layer covering the vacuum cavity; a sealing layer sealing the support layer and the vacuum cavity; a micro heater disposed on the sealing layer; a plurality of electrodes disposed on the micro heater, insulated from the micro heater; and a gas sensitive layer covering the electrodes.
摘要翻译：提供一种微气体传感器，用于测量构成为实现气敏感层的高加热和冷却速度的气体浓度，实现温度均匀性，并且实现耐热冲击和机械冲击的耐久性; 以及微气体传感器的制造方法。微气体传感器包括：设置在基板中的真空腔; 覆盖真空腔的支撑层; 密封层，密封支撑层和真空腔; 设置在密封层上的微加热器; 设置在微加热器上的多个电极，与微加热器绝缘; 以及覆盖电极的气敏层。

38. 发明授权

US07760274B2 Programmable mask for fabricating biomolecule array or polymer array, apparatus for fabricating biomolecule array or polymer array including the programmable mask, and method of fabricating biomolecule array or polymer array using the programmable mask 失效
标题翻译：用于制造生物分子阵列或聚合物阵列的可编程掩模，用于制造包括可编程掩模的生物分子阵列或聚合物阵列的装置，以及使用可编程掩模制造生物分子阵列或聚合物阵列的方法
公开(公告)号：US07760274B2
公开(公告)日：2010-07-20
申请号：US11634408
申请日：2006-12-06
申请人： Moon Youn Jung , Dong Ho Shin , Se Ho Park , Hyeon Bong Pyo , Chi Hoon Jun
发明人： Moon Youn Jung , Dong Ho Shin , Se Ho Park , Hyeon Bong Pyo , Chi Hoon Jun
IPC分类号： G02F1/13
CPC分类号： G03F7/70291 , B01J19/0046 , B01J2219/00286 , B01J2219/00434 , B01J2219/00448 , B01J2219/00527 , B01J2219/00585 , B01J2219/00596 , B01J2219/00605 , B01J2219/00608 , B01J2219/00612 , B01J2219/00637 , B01J2219/00659 , B01J2219/00689 , B01J2219/00711 , B01J2219/0072 , B01J2219/00722 , B82Y30/00 , G03F7/70275
摘要： Provided are a programmable mask for promptly fabricating a biomolecule or polymer array having high density, an apparatus for fabricating a biomolecule or polymer array including the mask, and a method of fabricating a biomolecule or polymer array using the programmable mask. The programmable mask for fabricating a biomolecule array or polymer array includes a first substrate including a black matrix having openings and first pixel electrodes; a second substrate including thin film transistors for switching pixel regions which correspond to the openings according to applied electric signals and second pixel electrodes connected to drain electrodes of the thin film transistors; a liquid crystal layer interposed between the first substrate and the second substrate, the liquid crystal layer including liquid crystal whose arrangement can be changed according to electric signals of the thin film transistors so as to selectively transmit light; a first polarizing plate laminated on one side of the first substrate; a second polarizing plate laminated on one side of the second substrate; and a lens array layer laminated on one side of the second polarizing plate including lenses which correspond to the pixel regions.
摘要翻译：提供了一种用于及时制造具有高密度的生物分子或聚合物阵列的可编程掩模，用于制造包括掩模的生物分子或聚合物阵列的装置，以及使用可编程掩模制造生物分子或聚合物阵列的方法。用于制造生物分子阵列或聚合物阵列的可编程掩模包括包括具有开口的黑矩阵的第一基底和第一像素电极; 第二基板，包括用于根据施加的电信号切换对应于开口的像素区域的薄膜晶体管和连接到薄膜晶体管的漏极的第二像素电极; 介于所述第一基板和所述第二基板之间的液晶层，所述液晶层包括可根据所述薄膜晶体管的电信号而配置的液晶，以选择性地透射光; 层叠在第一基板的一侧的第一偏振片; 层叠在所述第二基板的一侧的第二偏振片; 以及层叠在第二偏振片的一侧上的透镜阵列层，其包括对应于像素区域的透镜。

39. 发明申请

US20090188110A1 MICRO HEAT PIPE WITH POLIGONAL CROSS-SECTION MANUFACTURED VIA EXTRUSION OR DRAWING 审中-公开
标题翻译：微型热管，通过挤压或拉拔制造出具有极性交叉部分
公开(公告)号：US20090188110A1
公开(公告)日：2009-07-30
申请号：US12414595
申请日：2009-03-30
申请人： Seok Hwan Moon , Ho Gyeong Yun , Sang Choon Ko , Gunn Hwang , Tae Goo Choy , Chi Hoon Jun , Youn Tae Kim
发明人： Seok Hwan Moon , Ho Gyeong Yun , Sang Choon Ko , Gunn Hwang , Tae Goo Choy , Chi Hoon Jun , Youn Tae Kim
IPC分类号： B21D53/02
CPC分类号： B23P15/26 , B21C23/085 , B21C37/151 , B21C37/155 , B23P2700/09 , F28D15/0233 , F28D2015/0225 , F28F1/022 , H01L23/427 , H01L2924/0002 , Y10T29/49353 , H01L2924/00
摘要： A method for fabricating a metal micro heat pipe with a polygonal cross-section to allow working fluid to flow by capillary force generated at edges of the polygonal of the micro heat pipe. The polygonal cross-section is formed of a single metal layer via a single drawing process. The micro heat pipe is formed of a single metal plate.
摘要翻译：一种用于制造具有多边形横截面的金属微热管的方法，以允许工作流体通过在微热管的多边形的边缘处产生的毛细管力流动。多边形横截面通过单个拉丝工艺由单个金属层形成。微热管由单个金属板形成。

40. 发明授权

US07362387B2 Programmable mask and method for fabricating biomolecule array using the same 失效
标题翻译：可编程掩模和使用其制造生物分子阵列的方法
公开(公告)号：US07362387B2
公开(公告)日：2008-04-22
申请号：US11299111
申请日：2005-12-08
申请人： Moon Youn Jung , Hae Sik Yang , Chi Hoon Jun , Yun Tae Kim , Young Shin Kim , Dong Ho Shin
发明人： Moon Youn Jung , Hae Sik Yang , Chi Hoon Jun , Yun Tae Kim , Young Shin Kim , Dong Ho Shin
IPC分类号： G02F1/13
CPC分类号： B01J19/0046 , B01J2219/00434 , B01J2219/00527 , B01J2219/00529 , B01J2219/00596 , B01J2219/00605 , B01J2219/00608 , B01J2219/00659 , B01J2219/00675 , B01J2219/00677 , B01J2219/00689 , B01J2219/00711 , B01J2219/00722 , B82Y30/00 , C40B40/06 , C40B60/14 , G02F1/133528 , G02F1/13454 , G02F1/13725 , G02F1/216 , G02F2203/12 , G03F7/70291 , G03F7/7035 , H01L27/146
摘要： A programmable mask used in a photolithography process for fabricating a biomolecule array and a method for fabricating a biomolecule array using the same are disclosed. Particularly, a TFT-LCD type programmable mask for selectively transmitting incident light in accordance with an electrical signal applied thereto and a method for fabricating a biomolecule array using the same are provided. The ultraviolet light is selectively illuminated to a sample substrate so that the biomolecule array having high density can be fabricated.
摘要翻译：公开了用于制造生物分子阵列的光刻工艺中使用的可编程掩模和使用其的生物分子阵列的制造方法。特别地，提供了根据施加到其上的电信号选择性地透射入射光的TFT-LCD型可编程掩模和使用其的制造生物分子阵列的方法。紫外光被选择性地照射到样品基底上，使得可以制造具有高密度的生物分子阵列。

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