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31. 发明专利

JP2005314732A Method for manufacturing deposition-preventive tool 有权
标题翻译：制造沉积预防工具的方法
公开(公告)号：JP2005314732A
公开(公告)日：2005-11-10
申请号：JP2004132569
申请日：2004-04-28
申请人： Densho Engineering Co Ltd , Nec Electronics Corp , Necエレクトロニクス株式会社 , 株式会社電硝エンジニアリング
发明人： SUMIMOYA IWAO , TAKADA TATSUO
IPC分类号： C23C4/12 , C23C4/02
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a deposition-preventive tool made of a base metal which has a metal thermal-sprayed film of high adhesiveness and can be used for the tool of a manufacturing system such as a CVD system and a PVD system. SOLUTION: A surface 11a of a base metal 11 is roughened by sand blasting. A first thermal-sprayed film 12 is deposited on the roughened surface by the plasma thermal spraying method. The thermal-sprayed film by the plasma thermal spraying has strong binding force with the base metal. A second thermal-sprayed film 13 by flame thermal spraying or arc thermal spraying is deposited on the first thermal-sprayed film 12. The second thermal-sprayed film has a roughened surface. Thus, when the thermal-sprayed film is used in a deposition-preventive tool, the film is not easily peeled even when a dispersive film deposition material is deposited, and the defective fraction of wafers can be reduced. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：解决的问题：提供一种用于制造具有高粘合性的金属热喷涂膜的贱金属制造的防沉积工具的方法，并且可用于诸如CVD的制造系统的工具系统和PVD系统。解决方案：贱金属11的表面11a通过喷砂粗糙化。通过等离子体热喷涂方法将第一热喷涂膜12沉积在粗糙表面上。通过等离子体热喷涂的热喷涂膜与贱金属具有很强的结合力。通过火焰热喷涂或电弧热喷涂的第二热喷涂膜13沉积在第一热喷涂膜12上。第二热喷涂膜具有粗糙表面。因此，当将热喷涂膜用于防沉积工具时，即使沉积分散膜沉积材料，膜也不容易剥离，并且可以减少晶片的不合格部分。版权所有（C）2006，JPO＆NCIPI

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