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    • 36. 发明专利
    • METHOD AND DEVICE FOR VAPOR-DEPOSITING TITANIUM NITRIDE ON SUBSTRATE BY CHEMICAL VAPOR DEPOSITION METHOD
    • JPH10303148A
    • 1998-11-13
    • JP5165098
    • 1998-03-04
    • LSI LOGIC CORP
    • ZHAO JOE WHSIA WEI-JENCATABAY WILBUR G
    • C23C16/34C23C16/44C23C16/455H01L21/28H01L21/285
    • PROBLEM TO BE SOLVED: To provide a method and device for forming titanium nitride on substrate, by which a titanium nitride layer which is thinner in thickness than a titanium nitride layer formed of the surface of a substrate can be formed on the side edge section of the substrate. SOLUTION: In a method for vapor-depositing titanium nitride on substrate, the quantity of titanium nitride vapor-deposited on the side edge section 6 of a semiconductor substrate 2 is suppressed, but the vapor deposition itself is not inhibited completely. Therefore, one or more kinds of vapor-deposition suppressing gases are made to flow to the side edge section 6 in the direction which is substantially opposite to the flowing direction of a process gas flowing to the section 6. The flows of the vapor-deposition suppressing gases to the section 6 guide part of the process gas in a direction in which the process gas is separated from the section 6, locally dilute the process gas near the section 6 in a vapor deposition chamber 30, or perform the above-mentioned two actions in a combined state. Therefore, the quantity of the titanium nitride vapor-deposited on the side edge section 6 is reduced. The vapor- deposition suppressing gases flow through a plurality of holes 52 formed through a substrate supporting table 4 below the substrate 2. The holes 52 have openings which are arranged at intervals along the circumferential direction near the top section of a table 40. The vapor- deposition suppressing gases come out in the vicinity of the side edge section 6 below the upper surface 4 of the substrate 2 through the openings of the holes 52.