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    • 35. 发明申请
    • SILICA GLASS CONTAINING TIO2 AND OPTICAL MATERIAL FOR EUV LITHOGRAPHY
    • 含有二氧化硅的二氧化硅玻璃和光学材料用于EUV光刻
    • WO2004089838A1
    • 2004-10-21
    • PCT/JP2004/004829
    • 2004-04-02
    • ASAHI GLASS COMPANY LIMITEDIWAHASHI, Yasutomi,KOIKE, Akio,
    • IWAHASHI, Yasutomi,KOIKE, Akio,
    • C03C3/06
    • C03C3/06C03B19/1484C03B2201/42C03C4/0085C03C2201/42
    • A silica glass containing TiO 2 , characterized in that the fluctuation of the refractive index (Δn) is at most 2 ~10 -4 within an area of 30 mm ~ 30 mm in at least one plane. A silica glass containing TiO 2 , characterized in that the TiO 2 concentration is at least 1 mass%, and the striae pitch is at most 10 µm. An optical material for EUV lithography, characterized in that it is made of a silica glass containing TiO 2 , and the fluctuation of the refractive index (Δn) is at most 2 ~10 -4 in a plane perpendicular to the incident light direction. An optical material for EUV lithography, characterized in that it is made of a silica glass containing TiO 2 , wherein the TiO 2 concentration is at least 1 mass%, and the difference between the maximum value and the minimum value of the TiO 2 concentration is at most 0.06 mass% in a plane perpendicular to the incident light direction.
    • 含有TiO 2的二氧化硅玻璃,其特征在于,在至少一个平面内,在30mm〜30mm的范围内,折射率(Deltan)的波动为2〜10 -4以下。 含有TiO 2的二氧化硅玻璃,其特征在于,TiO 2浓度为1质量%以上,所述条纹间距为10μm以下。 一种用于EUV光刻的光学材料,其特征在于它由含有二氧化钛的石英玻璃制成,并且在垂直于入射光方向的平面中折射率(Deltan)的波动为至多2〜10 -4。 一种用于EUV光刻的光学材料,其特征在于,其由TiO 2的二氧化硅玻璃制成,其中TiO 2浓度为至少1质量%,并且TiO 2浓度的最大值和最小值之间的差为至多0.06 在垂直于入射光方向的平面中的质量%。
    • 36. 发明申请
    • COVER GLASS FOR A SOLAR BATTERY
    • 太阳能电池盖玻璃
    • WO2003054974A1
    • 2003-07-03
    • PCT/JP2002/013020
    • 2002-12-12
    • ASAHI GLASS COMPANY, LIMITEDKAGEYAMA, JunichiSATO, KazuoKAMBE, Mika
    • KAGEYAMA, JunichiSATO, KazuoKAMBE, Mika
    • H01L31/0236
    • H01L31/0236C03B13/08H01L31/048H01L31/0488H01L31/18Y02B10/12Y02E10/50
    • A transparent substrate for a cover for a solar battery, which can increase the quantity of incident light entering into the solar battery module in daytime and throughout the year and/or can prevent effectively an environmental problem caused by the reflection of light at a light entering side of the module, a method for producing the transparent substrate and a solar battery module having such substrate, are presented. Hemispherical concave portions 40 are formed in a surface of light entering side of a cover glass almost over the entire surface wherein the ratio d/D of the depth d of the central portion of each concave portion to the radius D of the opening of the concave portion is from 0.10 to 0.50 and the proportion of area occupied by a flat portion where no concave portion 40 is formed in the surface of light entering side is not more than 40 %.
    • 一种用于太阳能电池盖的透明基板,其可以在白天和全年增加入射到太阳能电池模块的入射光的量,和/或可以有效地防止由光入射的光的反射引起的环境问题 模块的一侧,制造透明基板的方法以及具有这种基板的太阳能电池模块。 半球形凹部40形成在几乎在整个表面上的玻璃进入玻璃面侧的表面,其中每个凹部的中心部分的深度d与凹部的开口的半径D的比D / D 部分为0.10〜0.50,并且在进入光的表面中没有形成凹部40的平坦部所占的面积比例不大于40%。
    • 38. 发明申请
    • STRENGTHENED GLASS AND METHODS FOR MAKING THE SAME BY USING DIFFERENTIAL CHEMISTRY
    • 强化玻璃及其制造方法使用差异化学
    • WO2015049888A1
    • 2015-04-09
    • PCT/JP2014/060352
    • 2014-04-03
    • ASAHI GLASS COMPANY, LIMITED
    • KRESKI, Patrick Kenneth
    • C03C21/00
    • C03C21/002Y10T428/315
    • Provided is a method for strengthening a substrate by an exchange medium and a modified exchange medium, the substrate including a treatment-rich volume and a treatment- poor volume; the method containing: applying the modified exchange medium to a surface of the treatment-rich volume; and applying the exchange medium to a surface of the treatment- poor volume; in which the exchange medium including a composition including an invading alkali ion and the composition is associated with an ion exchange rate of the invading alkali ion; the modified exchange medium including a modified composition including invading alkali ion and the modified composition is associated with a modified ion exchange rate of the invading alkali ion, and in which the modified ion exchange rate is slower than the ion exchange rate.
    • 本发明提供一种通过交换介质和改性交换介质强化基板的方法,所述基板包括处理量大,体积小, 所述方法包含:将修饰的交换介质施加到处理丰富体积的表面; 并将交换介质施加到处理不良体积的表面; 其中包括含有入侵碱离子和组合物的组合物的交换介质与入侵碱离子的离子交换速率相关联; 包括含有侵入碱离子的改性组合物和改性组合物的改性交换介质与入侵碱离子的改性离子交换速率相关,其中改性离子交换速率低于离子交换速率。
    • 39. 发明申请
    • PAIR OF ELECTRODES FOR DBD PLASMA PROCESS
    • DBD等离子体处理电极对
    • WO2014097621A1
    • 2014-06-26
    • PCT/JP2013/007433
    • 2013-12-18
    • ASAHI GLASS COMPANY LIMITED
    • TIXHON, M. EricMICHEL, M. EricLECLERCQ, M. Joseph
    • C23C16/40C03C17/00C23C16/509C23C16/54H01J37/32
    • H01J37/32348C03C17/002C03C17/245C03C2217/213C03C2218/15C03C2218/153C23C16/402C23C16/509C23C16/545H01J37/32568H01J37/32715H01J2237/332
    • The present invention concerns a device (10) for the surface treatment of a substrate (1) by dielectric barrier discharge that enables the generation of a cold filamentary plasma at atmospheric pressure, comprising a reaction chamber, in which are positioned means for supporting and/or moving the substrate (2) and at least two electrodes (3, 4) arranged in parallel on either side of the means for supporting and/or moving the substrate (2), of which one electrode (3) is intended to be brought to high voltage and a counter-electrode (4) to be earthed. It is characterised in that the counter-electrode (4) has a width (l ce ) and a length (L ce ) that are respectively smaller than the width (l e ) and the length (L e ) of the electrode (3), and in that the counter-electrode (4) is positioned so that it is enclosed in an orthogonal projection (5) of the electrode (3) on a plane containing the counter-electrode (4). The invention also concerns a surface treatment process, in particular for layer deposition, that calls for such a device.
    • 本发明涉及一种用于通过能够在大气压下产生冷丝状等离子体的电介质阻挡放电来对衬底(1)进行表面处理的器件(10),其包括反应室,其中定位有用于支撑和/ 或移动基板(2)和至少两个平行布置的电极(3,4),用于支撑和/或移动基板(2)的装置的两侧,其中一个电极(3)将被带入 到高电压和对电极(4)接地。 其特征在于,对电极(4)的宽度(lce)和长度(Lce)分别小于电极(3)的宽度(le)和长度(Le),因此, 相对电极(4)被定位成使其被包围在包含对电极(4)的平面上的电极(3)的正交突起(5)中。 本发明还涉及要求这种装置的表面处理方法,特别是用于层沉积的表面处理方法。
    • 40. 发明申请
    • IGNITION PROCESS AND DEVICE FOR PAIRS OF DBD ELECTRODES
    • 点火工艺和DBD电极对的装置
    • WO2014097620A1
    • 2014-06-26
    • PCT/JP2013/007432
    • 2013-12-18
    • ASAHI GLASS COMPANY LIMITED
    • TIXHON, M. EricMICHEL, M. EricLECLERCQ, M. Joseph
    • H01J37/32
    • H01J37/32532C23C16/455C23C16/50H01J37/32174H01J37/32348
    • A process for surface treatment by dielectric barrier discharge (DBD) comprising the following operations: - feeding or passing a substrate into a reaction chamber (2), in which at least two electrodes (10, 12) and at least one counter-electrode (13, 14, 15) are positioned, wherein at least one dielectric barrier (16) is placed between these at least two electrodes (10, 12) and this at least one counter-electrode (13, 14, 15); - switching an inductance (L1, L2) in series with each of said electrodes (10, 12), wherein said inductances (L1, L2) are wound onto a common magnetic core in such a manner that the resulting magnetic flux of the two inductances is zero when identical currents circulate in the two electrodes (10, 12); - generating a high-frequency electric voltage of such a value that it causes the generation of a plasma between the at least two electrodes (10, 12) and the at least one counter-electrode (13, 14, 15); - feeding into the reaction chamber a mixture, the composition of which is such that on contact with the plasma, it breaks down and generates substances able to react with the surface of the substrate (4);
    • 一种通过电介质阻挡放电(DBD)进行表面处理的方法,包括以下操作:将基底馈送或通过反应室(2),其中至少两个电极(10,12)和至少一个对电极 13,14,15)被定位,其中至少一个电介质阻挡层(16)被放置在这些至少两个电极(10,12)和该至少一个对电极(13,14,15)之间。 - 与每个所述电极(10,12)串联地切换电感(L1,L2),其中所述电感(L1,L2)以这样的方式缠绕到公共磁芯上,使得所得到的两个电感 当相同的电流在两个电极(10,12)中循环时为零; - 产生这样一个值的高频电压,使其在所述至少两个电极(10,12)和所述至少一个对电极(13,14,15)之间产生等离子体; - 将反应室的组成物与等离子体接触,分解并产生能够与衬底(4)的表面反应的物质;