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21. 发明专利

JP2000234916A LIGHT BEAM FORM MEASURING APPARATUS AND ALIGNMENT MEASURING APPARATUS 失效
公开(公告)号：JP2000234916A
公开(公告)日：2000-08-29
申请号：JP3621499
申请日：1999-02-15
申请人： KONISHIROKU PHOTO IND
发明人： OISHI ATSUSHI , KITAMURA MITSUHARU
IPC分类号： G01B11/24 , G01B11/08 , G01J1/02 , G01J1/04 , G01J1/22 , H01S3/00
摘要： PROBLEM TO BE SOLVED: To provide a light beam form measuring apparatus capable of highly precise measurement without fine change of image sensing magnification when an attenuation filter of amount of light is set on and removed from an optical path in order to cope with light beams having various kinds of amount of light, as a first task. SOLUTION: In this light beam form measuring apparatus, a light beam is magnified with a magnification optical system, the magnified image is picked up with an image sensing element, and the form and the diameter of the light beam are measured by processing the picked-up image. The magnification optical system 2 is constituted of an infinite point correction optical system provided with an objective lens 21 and an imaging lens 22. An attenuation filter 6 of amount of light for adjusting amount of light is arranged between the lenses 21 and 21. When the filter is set on and removed from an optical path in order to cope with light beams having various kinds of amount of light, image sensing magnification does not generate fine change. As a result a light beam form measuring apparatus capable of highly precise measurement can be provided.

22. 发明专利

JP2640769B2 失效
公开(公告)号：JP2640769B2
公开(公告)日：1997-08-13
申请号：JP30731188
申请日：1988-12-05
申请人： HAMAMATSU HOTONIKUSU KK
发明人： YAMASHITA YUTAKA , TSUCHA KOJI , OOTA KAZUYOSHI
IPC分类号： G01N21/01 , G01J1/02 , G01J1/04 , G01J1/22 , G01J1/44 , G01N21/59

23. 发明专利

JPH03285128A SELECTION OF COLOR TONE OF LIGHT EMITTING ELEMENT 失效
公开(公告)号：JPH03285128A
公开(公告)日：1991-12-16
申请号：JP8679190
申请日：1990-03-30
申请人： SHARP KK
发明人： OTANI TADASHI
IPC分类号： G01J3/50 , G01J1/22
摘要： PURPOSE:To enhance measuring accuracy and to select color tone of a light emitting element by calculating the ratio of the light output of a photodetector obtained when a cut filter is interposed and that of the photodetector obtained when no cut filter is interposed. CONSTITUTION:At first, a cut filter 2 having a spectral characteristic is set on an LED light emitting element 1 having an emission spectrum distribution and a photodetector 3 is further mounted thereon to measure the short current of the photodetector 3 by a digital multimeter 5. Next, the short current of the photodetector 3 is measured by the digital multimeter 5 in such a state that the cut filter 2 is detached. Subsequently, the ratio R of the short current obtained when the cut filter 2 is interposed between the light emitting element 1 and the photodetector and that obtained when no cut filter 2 is interposed is calculated. By separating color ranks on the basis of this numerical value R, light tone of the LED light emitting element 1 can be selected.

24. 发明专利

JPH0377934B2 失效
公开(公告)号：JPH0377934B2
公开(公告)日：1991-12-12
申请号：JP11187184
申请日：1984-05-31
申请人： YOKOGAWA ELECTRIC CORP
发明人： KURITA YOSHIO , NAITO SEIICHI
IPC分类号： G01J1/42 , G01J1/16 , G01J1/22

25. 实用新型

JPS57173030U 失效
公开(公告)号：JPS57173030U
公开(公告)日：1982-10-30
申请号：JP6022881
申请日：1981-04-24
IPC分类号： G01J1/42 , G01J1/22 , G01N21/15 , G08B17/12 , G08B21/00

26. 发明专利

JPS5022421B1 失效
公开(公告)号：JPS5022421B1
公开(公告)日：1975-07-30
申请号：JP1601069
申请日：1969-03-03
IPC分类号： G01J1/10 , G01J1/22 , G01N21/27 , G01N21/02

27. 发明专利

JP2002174551A ILLUMINANCE CALIBRATION SYSTEM 失效
公开(公告)号：JP2002174551A
公开(公告)日：2002-06-21
申请号：JP2000370725
申请日：2000-12-05
申请人： OYO DENKI KK , HOKUSHIN KOKI KK
发明人： MURACHI ATSUSHI , YOSHIMURA HARUMI
IPC分类号： G01J1/02 , G01J1/04 , G01J1/06 , G01J1/22 , H05B37/02
摘要： PROBLEM TO BE SOLVED: To solve the problem of the conventional illuminance calibration system being applicable to only the case, where the quantity of light of a diaphragm mechanism is linearly related to the amount of operation and an illuminance-switching speed is limited, and of a means for making the illuminance uniform is expensive, complex, and time-consuming. SOLUTION: An illuminance control mechanism comprises a variable diaphragm 7 for changing the illuminance, a plurality of ND filters 8 and 9, a drive means 19 for combining each ND filter, a memory for previously storing the combination of the ND filters for achieving target illuminance value, and a control means for operating a drive means, based on the target illuminance value and for performing control so that the illuminance reaches a target value. Also, an illumination mechanism comprises a uniformizing means 2 for making the illuminance uniform, a mask for limiting the visual field of illumination, and an illumination means for performing telecentric illumination at an exposure position.

28. 发明专利

JPH11326345A NEAR-FIELD OPTICAL MICROSCOPE 失效
公开(公告)号：JPH11326345A
公开(公告)日：1999-11-26
申请号：JP12591098
申请日：1998-05-08
申请人： OLYMPUS OPTICAL CO
发明人： YAMAGUCHI MITSUSHIRO
IPC分类号： G01B11/30 , G01J1/22 , G01N37/00 , G01Q60/18
摘要： PROBLEM TO BE SOLVED: To provide a near-field optical microscope which can measure stably without being affected by an intensity change of an output light of a light source. SOLUTION: A luminous flux projected from a wavelength variable laser light source 3 enters a neutral density(ND) continuous filter 4. The ND continuous filter 4 has a continuous density distribution, attenuating the entering light in accordance with a position where the light enters. The ND continuous filter 4 is supported to be able to change a position where it traverses an optical path and is moved by a driving motor 8. The luminous flux passing the ND continuous filter 4 is split to two by a beam splitter 5, and the light passing the beam splitter 5 is reflected at a mirror 9 and irradiated to a sample 1 and a probe 12 arranged in the vicinity of a front face of the sample. The luminous flux reflected by the beam splitter 5 enters a photodetector 6. A control circuit 7 controls by the driving motor 8 the position where the ND continuous filter 4 traverses the optical path so that an output of the photodetector 6, namely, the light output from the light source 3 has a constant intensity.

29. 发明专利

JPH02151735A PROTECTIVE DEVICE OF LIGHT DETECTOR 失效
公开(公告)号：JPH02151735A
公开(公告)日：1990-06-11
申请号：JP30731188
申请日：1988-12-05
申请人： HAMAMATSU PHOTONICS KK
发明人： YAMASHITA YUTAKA , TSUCHIYA KOJI , OTA KAZUYOSHI
IPC分类号： G01N21/01 , G01J1/02 , G01J1/04 , G01J1/22 , G01J1/44 , G01N21/59
摘要： PURPOSE:To protect a light detector during a period when strong light of certain definite quantity or more is incident on the side of the detector and to allow light to be incident at the point of time when said strong light becomes less than the definite quantity by providing a photodetector, a control circuit and a light deflecting element. CONSTITUTION:When an object 3 to be detected enters between optical fibers 2, 4, transmitted light toward a light detector 5 suddenly becomes weak to be sent to a photodetector 11 through a beam splitter 10. When the quantity of the light received by the element 11 becomes a definite value or less, the control signal of a control circuit 2 is not outputted. Whereupon, a light deflecting element 9 performs diffraction action on the basis of the signal subjected to defraction control of a drive circuit 13 and diffracts the greater part of the light from a light source 1 to allow said light to be incident to one optical fiber 2. The light is transmitted through the object 3 to be detected through said one optical fiber 2 to be received by other optical fiber 4 and further sent to the detector 5. The bleeder 14 of the detector 5 is released from inverse bias when the control signal from the circuit 12 is lost and the detector 5 returns to usual sensitivity and the data of the object 3 to be detected is obtained by the detector 5.

30. 实用新型

JPH0247529U 失效
公开(公告)号：JPH0247529U
公开(公告)日：1990-03-30
申请号：JP12567488
申请日：1988-09-28
IPC分类号： G01J1/22 , G01J1/42

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