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21. 发明授权

US06911881B2 Surface acoustic wave device 有权
标题翻译：表面声波装置
公开(公告)号：US06911881B2
公开(公告)日：2005-06-28
申请号：US10460299
申请日：2003-06-13
申请人： Daisuke Tamazaki , Takeshi Nakao , Toshimaro Yoneda
发明人： Daisuke Tamazaki , Takeshi Nakao , Toshimaro Yoneda
IPC分类号： H03H9/25 , H03H9/00 , H03H9/02 , H03H9/145 , H03H9/64
CPC分类号： H03H9/0028 , H03H9/02889 , H03H9/02905 , H03H9/6459
摘要： A surface acoustic wave device has first and second surface acoustic wave filter elements which are arranged on a surface acoustic wave substrate so as to define a filter device having a two-stage configuration. A free surface portion is provided by forming a perforation in an inter-stage connecting portion connecting the first and second surface acoustic wave filter elements.
摘要翻译：表面声波装置具有布置在表面声波基板上的第一和第二表面声波滤波器元件，以限定具有两级结构的滤波器装置。通过在连接第一和第二表面声波滤波器元件的级间连接部分中形成穿孔来提供自由表面部分。

22. 发明公开

US20240313737A1 ACOUSTIC WAVE DEVICE 审中-公开
公开(公告)号：US20240313737A1
公开(公告)日：2024-09-19
申请号：US18659492
申请日：2024-05-09
申请人： Murata Manufacturing Co., Ltd.
发明人： Daisuke ITO
IPC分类号： H03H9/02 , H03H9/145 , H03H9/25
CPC分类号： H03H9/02992 , H03H9/02637 , H03H9/02834 , H03H9/02889 , H03H9/145 , H03H9/25
摘要： An acoustic wave device includes a piezoelectric body layer having a crystal axis and an IDT electrode on the piezoelectric body layer. When an acoustic wave propagation direction is a first direction and an orthogonal or substantially orthogonal direction is a second direction, the crystal axis of the piezoelectric body layer is inclined in the second direction with respect to a thickness direction. The IDT electrode includes first and second busbars that oppose each other, and first and second electrode fingers and each including one end connected to any one of the first and second busbars. A region where the adjacent electrode fingers overlap each other in the first direction is a cross region which includes a central region positioned on a center side in the second direction, and first and second edge regions that oppose each other with the central region interposed therebetween in the second direction.

23. 发明公开

US20240186978A1 METHOD OF MAKING AN ACOUSTIC WAVE RESONATOR WITH MASS LOADING STRIP FOR SUPPRESSION OF HYPERBOLIC MODE 审中-公开
公开(公告)号：US20240186978A1
公开(公告)日：2024-06-06
申请号：US18529276
申请日：2023-12-05
申请人： Skyworks Solutions, Inc.
发明人： Yuya Hiramatsu , Rei Goto , Yumi Torazawa
IPC分类号： H03H9/02 , H03F3/24 , H03H9/145 , H03H9/25 , H03H9/64 , H03H9/72
CPC分类号： H03H9/02889 , H03F3/245 , H03H9/02559 , H03H9/02834 , H03H9/02992 , H03H9/145 , H03H9/14541 , H03H9/1457 , H03H9/25 , H03H9/6406 , H03H9/6489 , H03H9/725 , H03F2200/451
摘要： Aspects of this disclosure relate to an acoustic wave resonator with hyperbolic mode suppression. The acoustic wave resonator can include a piezoelectric layer, an interdigital transducer electrode, a temperature compensation layer, and a mass loading strip. The mass loading strip can be a conductive strip. The mass loading strip can overlap edge portions of fingers of the interdigital transducer electrode. A layer of the mass loading strip can have a density that is at least as high as a density of a material of the interdigital transducer electrode. The material of the interdigital transducer can impact acoustic properties of the acoustic wave resonator.

24. 发明公开

US20230344407A1 ACOUSTIC WAVE DEVICE HAVING MASS LOADING STRIP WITH BUFFER LAYER 审中-公开
公开(公告)号：US20230344407A1
公开(公告)日：2023-10-26
申请号：US18191488
申请日：2023-03-28
申请人： Skyworks Solutions, Inc.
发明人： Yumi Torazawa , Hironori Fukuhara , Yuji Yashiro , Kenta Morita
IPC分类号： H03H9/02 , H03H9/145 , H03H9/25
CPC分类号： H03H9/02889 , H03H9/145 , H03H9/02834 , H03H9/25
摘要： An acoustic wave device is disclosed. The acoustic wave device can include a piezoelectric layer, an interdigital transducer electrode formed with the piezoelectric layer, a temperature compensation layer over the interdigital transducer electrode. The interdigital transducer electrode includes a bus bar and fingers that extend from the bus bar. The fingers each includes an edge portion and a body portion. The acoustic wave device can include a mass loading strip overlaps the edge portions of the fingers. The acoustic wave device can include a portion of the temperature compensation layer is positioned between the mass loading strip and the piezoelectric layer. The acoustic wave device can include a buffer layer that is disposed at least partially between the mass loading strip and the temperature compensation layer. A thickness of the buffer layer can be at least one forth a thickness of the mass loading strip. The buffer layer can be disposed at least partially between a bottom side, a top side, and a side wall of the mass loading strip and the temperature compensation layer.

25. 发明授权

US11791798B2 Acoustic wave device 有权
公开(公告)号：US11791798B2
公开(公告)日：2023-10-17
申请号：US16674011
申请日：2019-11-05
申请人： Murata Manufacturing Co., Ltd.
发明人： Kazuhiro Takigawa
IPC分类号： H03H9/25 , H03H9/02 , H03H9/145
CPC分类号： H03H9/25 , H03H9/02559 , H03H9/02637 , H03H9/02889 , H03H9/02992 , H03H9/14541
摘要： An acoustic wave device includes a piezoelectric substrate, and an IDT electrode provided on the piezoelectric substrate. The IDT electrode includes an overlap region where first and second electrode fingers overlap each other in a first direction. The overlap region includes a central region located in a substantially central portion of the overlap region with respect to a second direction. The central region includes a low acoustic velocity portion with an acoustic velocity less than the acoustic velocity in another portion. The overlap region includes first and second low acoustic velocity regions. The first and second low acoustic velocity regions are respectively located on first-and-second-busbar sides from the central region. The IDT electrode includes first and second high acoustic velocity regions. The first and second high acoustic velocity regions are respectively located outside the first and second low acoustic velocity regions with respect to the second direction.

26. 发明申请

US20180212586A1 ELASTIC WAVE DEVICE 审中-公开
公开(公告)号：US20180212586A1
公开(公告)日：2018-07-26
申请号：US15924311
申请日：2018-03-19
申请人： Murata Manufacturing Co., Ltd.
发明人： Masakazu MIMURA
IPC分类号： H03H9/02 , H03H9/10 , H03H9/145 , H03H9/25
CPC分类号： H03H9/02889 , H01L41/0477 , H03H3/10 , H03H9/02559 , H03H9/02637 , H03H9/1092 , H03H9/145 , H03H9/14541 , H03H9/25
摘要： An elastic wave device includes an interdigital transducer electrode, a dielectric film, and a frequency adjustment film are disposed on a LiNbO3 substrate. When Euler Angles of the LiNbO3 substrate are within a range of about 0°±5°, within a range of about θ±1.5°, within a range of about 0°±10°, the interdigital transducer electrode includes a main electrode, a film thickness of the main electrode normalized by a wavelength determined in accordance with an electrode finger pitch of the interdigital transducer electrode is denoted as T, and a density ratio of a material of the main electrode to Pt is denoted as r, the film thickness of the main electrode and θ of the Euler Angles satisfy θ=−0.05°/(T/r−0.04)+31.35°.

27. 发明授权

US09667226B2 Surface acoustic wave device and filter with additional covering films 有权
公开(公告)号：US09667226B2
公开(公告)日：2017-05-30
申请号：US14572246
申请日：2014-12-16
申请人： TAIYO YUDEN CO., LTD.
发明人： Hidetaro Nakazawa , Kentaro Nakamura , Shogo Inoue , Jun Tsutsumi , Takashi Matsuda
IPC分类号： H03H9/64 , H03H9/02 , H03H9/145 , H03H3/08
CPC分类号： H03H9/6489 , H03H3/08 , H03H9/02881 , H03H9/02889 , H03H9/02944 , H03H9/02952 , H03H9/14541
摘要： A surface acoustic wave device includes: a pair of comb-type electrodes that are provided on a piezoelectric substrate and include electrode fingers and dummy electrode fingers, the electrode fingers of one of the pair of comb-type electrodes facing the dummy electrode fingers of the other comb-type electrode; and additional films that are provided to cover gaps between tip ends of the electrode fingers and tip ends of the dummy electrode fingers and to overlap with at least one of first through third groups in which the first and second groups respectively include the electrode fingers and the dummy electrode fingers located at opposite sides of the gaps in a first direction in which the electrode fingers extend, and the third group includes the electrode fingers located at sides of the gaps in a second direction that crosses the first direction.

28. 发明申请

US20150180451A1 SURFACE ACOUSTIC WAVE DEVICE AND FILTER 有权
标题翻译：表面声波设备和滤波器
公开(公告)号：US20150180451A1
公开(公告)日：2015-06-25
申请号：US14572246
申请日：2014-12-16
申请人： TAIYO YUDEN CO., LTD.
发明人： Hidetaro NAKAZAWA , Kentaro NAKAMURA , Shogo INOUE , Jun TSUTSUMI , Takashi MATSUDA
IPC分类号： H03H9/64
CPC分类号： H03H9/6489 , H03H3/08 , H03H9/02881 , H03H9/02889 , H03H9/02944 , H03H9/02952 , H03H9/14541
摘要： A surface acoustic wave device includes: a pair of comb-type electrodes that are provided on a piezoelectric substrate and include electrode fingers and dummy electrode fingers, the electrode fingers of one of the pair of comb-type electrodes facing the dummy electrode fingers of the other comb-type electrode; and additional films that are provided to cover gaps between tip ends of the electrode fingers and tip ends of the dummy electrode fingers and to overlap with at least one of first through third groups in which the first and second groups respectively include the electrode fingers and the dummy electrode fingers located at opposite sides of the gaps in a first direction in which the electrode fingers extend, and the third group includes the electrode fingers located at sides of the gaps in a second direction that crosses the first direction.
摘要翻译：表面声波装置包括：一对梳状电极，设置在压电基板上，包括电极指和虚拟电极指，所述一对梳型电极中的一个的电极指与所述虚拟电极指的面对其他梳型电极; 以及附加膜，其被设置为覆盖电极指的末端和虚拟电极指的末端之间的间隙，并且与第一和第三组中的至少一个重叠，其中第一和第二组分别包括电极指和位于电极指的第一方向的间隙的相对侧的虚设电极指，第三组包括位于沿与第一方向相反的第二方向的间隙侧的电极指。

29. 发明专利

JP6415398B2 弾性表面波デバイス及びフィルタ审中-公开
公开(公告)号：JP6415398B2
公开(公告)日：2018-10-31
申请号：JP2015123933
申请日：2015-06-19
申请人：太陽誘電株式会社
发明人：中澤秀太郎 , 松田隆志
IPC分类号： H03H9/64 , H03H9/145
CPC分类号： H03H9/6489 , H03H9/02622 , H03H9/02881 , H03H9/02889

30. 发明专利

JP2017011442A 弾性表面波デバイス及びフィルタ审中-公开
标题翻译：表面声波装置和过滤器
公开(公告)号：JP2017011442A
公开(公告)日：2017-01-12
申请号：JP2015123933
申请日：2015-06-19
申请人：太陽誘電株式会社
发明人：中澤秀太郎 , 松田隆志
IPC分类号： H03H9/64 , H03H9/145
CPC分类号： H03H9/02622 , H03H9/02881 , H03H9/02889
摘要：【課題】低損失化を実現すること。【解決手段】圧電基板10上に設けられ、互いに複数の電極指24と複数のダミー電極指26を含み、互いの前記複数の電極指と前記複数のダミー電極指が向かい合って配置された1組の櫛型電極22と、前記複数の電極指の先端と前記複数のダミー電極指の先端の間の複数の隙間30それぞれを覆ってそれぞれ設けられた複数の付加膜18と、を備え、前記複数の付加膜は、第1方向及び第2方向で前記複数の隙間の側方に位置する電極指及びダミー電極指の少なくとも一部と重なり、前記1組の櫛型電極で励振される弾性波の波長をλ、前記複数の付加膜の材料の密度をρ1、酸化アルミニウムの密度をρ2とした場合、前記複数の電極指の先端と前記複数のダミー電極指の先端の間隔Gは、0
【選択図】図1
摘要翻译：本发明的一个目的是实现低损失。甲设置在压电基板10上，一起包括多个电极指24和多个伪电极指26的，其中一对相对的所述布置多个伪电极指和所述多个相互的电极指的梳形电极22包括多个分别在所述多个间隙30的每个尖端的前端与所述多个所述多个电极指的虚设电极指之间的提供的附加膜18，所述多个附加膜，与电极指和位于所述多个在所述第一方向和第二方向的间隙的侧虚设电极指的重叠的至少一部分中，声波由一对梳状电极的激发波长为λ，所述多个附加的薄膜.rho.1的的材料的密度，如果氧化铝的密度被用作[RHO]如图2所示，端头的前端的间隙G和多个所述多个电极指的是虚设电极指，0的

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