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21. 发明申请

WO2014074742A1 ELECTRON EXCITED X-RAY FLUORESCENCE DEVICE 审中-公开
标题翻译：电子激光X射线荧光装置
公开(公告)号：WO2014074742A1
公开(公告)日：2014-05-15
申请号：PCT/US2013/068997
申请日：2013-11-07
申请人： TRIBOGENICS, INC. , CAMARA, Carlos
发明人： CAMARA, Carlos
IPC分类号： G01N23/225 , G01N23/223
CPC分类号： G01N23/2252 , G01N2223/076 , G01N2223/079 , G01N2223/309
摘要： A device for providing for electron excited x-ray fluorescence may include means for driving two contacting surfaces against each other in a low fluid pressure environment, such that high energy electrons strike a sample under test and provide for x-ray fluorescence of the sample. The sample under test may be in or on a sample holder, whose position with respect to the contacting surfaces is adjustable. For example, the sample holder may be positionable to be a different distances from the contacting surfaces.
摘要翻译：用于提供电子激发的X射线荧光的装置可以包括用于在低流体压力环境中相互驱动两个接触表面的装置，使得高能电子撞击被测样品并提供样品的x射线荧光。待测样品可以在样品架上或上，其相对于接触表面的位置是可调节的。例如，样品保持器可以定位成与接触表面不同的距离。

22. 发明申请

WO2006051550A2 ELECTRICAL MEASUREMENTS IN SAMPLES 审中-公开
标题翻译：样品中的电气测量
公开(公告)号：WO2006051550A2
公开(公告)日：2006-05-18
申请号：PCT/IL2005/001201
申请日：2005-11-15
申请人： YEDA RESEARCH AND DEVELOPMENT COMPANY LTD. , COHEN, Hagai , LUBOMIRSKY, Igor
发明人： COHEN, Hagai , LUBOMIRSKY, Igor
IPC分类号： G01R31/302
CPC分类号： G01N27/66 , G01N2223/076 , G01N2223/079 , G01N2223/081
摘要： A method and device are presented for measuring the electrical properties of a specimen. The specimen is excited with high energy radiation to cause emission of internal charged particles from the specimen. Electrical power is supplied to a circuit, that is formed by the specimen and any added component connected to a back contact of the specimen. The electric power supply includes at least one of the following: irradiating the circuit with low energy charged particles; subjecting the circuit to an external field of the kind affecting the flux of emitted internal charged particles, and supplying a bias voltage to the back contact of the specimen. During the power supply to the specimen, at least one of the following is carried out: an electric current through the specimen is measured, and the emitted charged particles are analyzed versus their energy (using a contactless voltmeter) which provides local potential values at chemical entities of the specimen. This technique enables determination of rich, chemically resolved, electrical properties of a specimen, such as I-V characteristic, and/or evaluation of a work function characteristic, and/or characterization of electric leakage or breakdown conditions of the sample, and/or characterization of accumulation of charge within at least one region of the sample, and/or chemically resolved photovoltaic characteristics (photovoltage and/or photocurrent) of the sample.
摘要翻译：提出了一种用于测量样本的电特性的方法和装置。用高能辐射激发试样以引起样品内部带电粒子的发射。向电路提供电源，该电路由样本和与样本的背面触点连接的任何附加组件形成。电源包括以下中的至少一个：用低能量带电粒子照射电路; 使电路经受影响发射的内部带电粒子的通量的外部场，并且向样本的背部触点提供偏置电压。在向试样供电期间，至少执行下列操作之一：测量通过试样的电流，并分析发射的带电粒子与它们的能量（使用非接触式电压表）的比较，该能量在化学试剂中提供局部电位值标本的实体。该技术能够确定样本的丰富的，化学分辨的电特性，例如IV特性，和/或评估功函数特性，和/或表征样本的漏电或击穿条件，和/或表征电荷在样品的至少一个区域内的积累和/或样品的化学分解的光伏特性（光电压和/或光电流）。

23. 发明公开

EP3240013A1 THREE-DIMENSIONAL IMAGING IN CHARGED-PARTICLE MICROSCOPY 有权
标题翻译：带电粒子显微镜的三维成像
公开(公告)号：EP3240013A1
公开(公告)日：2017-11-01
申请号：EP16166998.1
申请日：2016-04-26
申请人： FEI Company
发明人： Boughorbel, Faysal , Potocek, Pavel , Gestmann, Ingo
IPC分类号： H01J37/22 , H01J37/28 , G01N23/22
CPC分类号： H01J37/28 , G01N23/225 , G01N2223/079 , G01N2223/08 , G01N2223/423 , H01J37/20 , H01J37/222 , H01J37/244 , H01J2237/226
摘要： A method of investigating a specimen using charged-particle microscopy, comprising the following steps:
(a) On a surface of the specimen, selecting a virtual sampling grid extending in an XY plane and comprising grid nodes to be impinged upon by a charged-particle probing beam during a two-dimensional scan of said surface;
(b) Selecting a landing energy E i for said probing beam, with an associated nominal Z penetration depth d i below said surface;
(c) At each of said nodes, irradiating the specimen with said probing beam and detecting output radiation emanating from the specimen in response thereto, thereby generating a scan image l i ;
(d) Repeating steps (b) and (c) for a series {E i } of different landing energies, corresponding to an associated series {d i } of different penetration depths,
further comprising the following steps:
(e) Pre-selecting an initial energy increment ΔE i by which E i is to be altered after a first iteration of steps (b) and (c);
(f) Associating energy increment ΔE i with a corresponding depth increment Δd in the value of d i ;
(g) Selecting said sampling grid to have a substantially equal node pitch p in X and Y, which pitch p is matched to the value of Δd so as to produce a substantially cubic sampling voxel;
(h) Selecting subsequent energy values in the series {E i } so as to maintain a substantially constant depth increment Δd between consecutive members of the series {d i }, within the bounds of selected minimum and maximum landing energies E min and E max , respectively.
摘要翻译：包括以下步骤：（a）在样本的表面上选择在XY平面中延伸并且包括将由带电粒子撞击的网格节点的虚拟采样网格在所述表面的二维扫描期间探测光束; （b）为所述探测光束选择着陆能量E i，其中相关的标称Z穿透深度di低于所述表面; （c）在每个所述节点处，用所述探测光束照射样本并响应于此探测从样本发出的输出辐射，由此产生扫描图像li; （d）对与不同穿透深度的相关系列{di}对应的不同着陆能量的系列{Ei}重复步骤（b）和（c），还包括以下步骤：（e）预先选择初始在步骤（b）和（c）的第一次迭代之后Ei将被改变的能量增量ΔEi; （f）将能量增量ΔEi与di中的相应深度增量Δd相关联; （g）选择所述采样网格在X和Y中具有基本相等的节点节距p，该节距p与Δd的值相匹配，从而产生基本上立方体的采样体素; （h）选择序列{Ei}中的后续能量值，以便在所选最小和最大着落能量Emin和Emax的界限内分别在系列{di}的连续成员之间保持基本恒定的深度增量Δd。

24. 发明公开

EP2939008A1 PROCESS FOR PERFORMING AUTOMATED MINERALOGY 有权
标题翻译：方法用于自动MINERALOGIE
公开(公告)号：EP2939008A1
公开(公告)日：2015-11-04
申请号：EP13869553.1
申请日：2013-12-26
申请人： FEI Company
发明人： SMITH, Michael, D. , MOELLER, Kurt
IPC分类号： G01N23/225 , G01N23/203
CPC分类号： G01N23/2252 , G01N23/203 , G01N23/2251 , G01N2223/072 , G01N2223/076 , G01N2223/079 , G01N2223/305 , G01N2223/32 , G01N2223/418 , G01N2223/616 , H01J37/20 , H01J37/21
摘要： A method and system for determining the mineral content of a sample using an electron microscope. The method includes directing an electron beam toward an area of interest of a sample, the area of interest comprising an unknown composition of minerals. The working distance between the backscattered electron detector of the microscope and the area of interest of the sample is determined. Compensation is made for the difference between the working distance and a predetermined working distance in which the predetermined working distance being the working distance that provides desired grayscale values for detected backscattered electrons. One way of compensating for working distance variation is to used an autofocus feature of the microscope to adjust the working distance. Backscattered electrons from the area of interest of the sample are then detected.

25. 发明公开

EP2044596A2 INTEGRATED METHOD TO ANALYZE CRYSTALS IN DEPOSITS 失效转让
标题翻译：集成方法晶体在存款分析
公开(公告)号：EP2044596A2
公开(公告)日：2009-04-08
申请号：EP07809184.0
申请日：2007-05-24
申请人： Areva NP Inc.
发明人： POP, Mihai, G., M. , LOCKAMON, Brian, Glenn , OLESHKO, Vladimir , HOWE, James
IPC分类号： G21C19/42
CPC分类号： G21C17/0225 , G01N23/2251 , G01N23/2252 , G01N2223/079 , G21C17/017 , G21F9/004 , G21F9/30 , G21Y2002/103
摘要： A method to analyze crystals in a deposit on a surface of a nuclear generating station heating surface, wherein the method extracts a sample of material from the surface of the nuclear generating station heating surface and also includes conducting at least one of a high resolution scanning electron microscope/energy dispersive X-ray spectrometry of the sample and a scanning transmission electron microscope/selected area electron diffraction/spot and elemental mapping analysis of the sample.

26. 发明公开

US20230288355A1 ELECTRON SPECTROSCOPY BASED TECHNIQUES FOR DETERMINING VARIOUS CHEMICAL AND ELECTRICAL CHARACTERISTICS OF SAMPLES 审中-公开
公开(公告)号：US20230288355A1
公开(公告)日：2023-09-14
申请号：US18002848
申请日：2021-06-28
申请人： COZAI LTD
发明人： Hagai COHEN
IPC分类号： G01N23/2273 , G01N21/64
CPC分类号： G01N23/2273 , G01N21/64 , G01N2223/6116 , G01N2223/085 , G01N2223/079 , G01N2223/304 , G01N2223/306 , G01N2223/405
摘要： A measurement system and method are presented for measuring one or more parameters of a sample. The measurement system comprises an excitation system and a detection system. The excitation system is configured to generate combined exciting radiation comprising one- or multi-parameter modulation of multiple exciting signals of different types to be applied to at least a portion of a sample under measurements to thereby induce electron emission response of said at least portion of the sample to said combined exciting radiation. The detection system is configured for detecting the electron emission response of the at least portion of the sample and generating measured data indicative of a modulated change of an electrical state of the at least portion of the sample, thereby enabling determination of one or more parameters of the sample from the measured data.

27. 发明申请

US20170236687A1 CROSS SECTIONAL DEPTH COMPOSITION GENERATION UTILIZING SCANNING ELECTRON MICROSCOPY 有权
公开(公告)号：US20170236687A1
公开(公告)日：2017-08-17
申请号：US15581164
申请日：2017-04-28
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人： Eric J. Campbell , Sarah K. Czaplewski
IPC分类号： H01J37/28 , G01N23/22 , G01B15/00
CPC分类号： H01J37/28 , G01B15/02 , G01B15/04 , G01N23/22 , G01N23/2252 , G01N2223/079 , G01N2223/304 , G01N2223/418 , G01N2223/633 , H01J37/222 , H01J2237/221 , H01J2237/24578 , H01J2237/24585 , H01J2237/248 , H01J2237/2807 , H01J2237/2815
摘要： A method for generating cross-sectional profiles using a scanning electron microscope (SEM) includes scanning a sample with an electron beam to gather an energy-dispersive X-ray spectroscopy (EDS) spectrum for an energy level to determine element composition across an area of interest. A mesh is generated to locate positions where a depth profile will be taken. EDS spectra are gathered for energy levels at mesh locations. A number of layers of the sample are determined by distinguishing differences in chemical composition between depths as beam energies are stepped through. A depth profile is generated for the area of interest by compiling the number of layers and the element composition across the mesh.

28. 发明申请

US20170200583A1 CROSS SECTIONAL DEPTH COMPOSITION GENERATION UTILIZING SCANNING ELECTRON MICROSCOPY 有权
公开(公告)号：US20170200583A1
公开(公告)日：2017-07-13
申请号：US15427764
申请日：2017-02-08
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人： Eric J. Campbell , Sarah K. Czaplewski
IPC分类号： H01J37/28 , H01J37/22
CPC分类号： H01J37/28 , G01B15/02 , G01B15/04 , G01N23/22 , G01N23/2252 , G01N2223/079 , G01N2223/304 , G01N2223/418 , G01N2223/633 , H01J37/222 , H01J2237/221 , H01J2237/24578 , H01J2237/24585 , H01J2237/248 , H01J2237/2807 , H01J2237/2815
摘要： A method for generating cross-sectional profiles using a scanning electron microscope (SEM) includes scanning a sample with an electron beam to gather an energy-dispersive X-ray spectroscopy (EDS) spectrum for an energy level to determine element composition across an area of interest. A mesh is generated to locate positions where a depth profile will be taken. EDS spectra are gathered for energy levels at mesh locations. A number of layers of the sample are determined by distinguishing differences in chemical composition between depths as beam energies are stepped through. A depth profile is generated for the area of interest by compiling the number of layers and the element composition across the mesh.

29. 发明授权

US09625398B1 Cross sectional depth composition generation utilizing scanning electron microscopy 有权
公开(公告)号：US09625398B1
公开(公告)日：2017-04-18
申请号：US14992144
申请日：2016-01-11
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人： Eric J. Campbell , Sarah K. Czaplewski
IPC分类号： G01N23/225 , G01B15/02
CPC分类号： H01J37/28 , G01B15/02 , G01B15/04 , G01N23/22 , G01N23/2252 , G01N2223/079 , G01N2223/304 , G01N2223/418 , G01N2223/633 , H01J37/222 , H01J2237/221 , H01J2237/24578 , H01J2237/24585 , H01J2237/248 , H01J2237/2807 , H01J2237/2815
摘要： A method for generating cross-sectional profiles using a scanning electron microscope (SEM) includes scanning a sample with an electron beam to gather an energy-dispersive X-ray spectroscopy (EDS) spectrum for an energy level to determine element composition across an area of interest. A mesh is generated to locate positions where a depth profile will be taken. EDS spectra are gathered for energy levels at mesh locations. A number of layers of the sample are determined by distinguishing differences in chemical composition between depths as beam energies are stepped through. A depth profile is generated for the area of interest by compiling the number of layers and the element composition across the mesh.

30. 发明申请

US20160011129A1 Sample Plate for X-Ray Analysis and X-Ray Fluorescent Analyzer 有权
标题翻译： X射线分析用样品板和X射线荧光分析仪
公开(公告)号：US20160011129A1
公开(公告)日：2016-01-14
申请号：US14792706
申请日：2015-07-07
申请人： Hitachi High-Tech Science Corporation
发明人： Masahiro Sakuta
IPC分类号： G01N23/223 , G01N35/00 , G01T7/12 , G01N23/22
CPC分类号： G01N23/223 , G01N23/2204 , G01N35/00693 , G01N35/00732 , G01N2035/00702 , G01N2223/079 , G01N2223/309 , G01T7/12
摘要： An sample plate is for X-ray analysis to which a sample is fixed in performing an analysis using an X-ray fluorescent analyzer, and includes: a plate-like body that supports the sample; and a code-indicated portion provided on the plate-like body in which an information on the sample is encoded and indicated.
摘要翻译：样品板用于使用X射线荧光分析仪进行分析时固定样品的X射线分析，并且包括：支撑样品的板状体; 以及设置在板状体上的代码指示部分，其中对样本的信息进行编码和指示。

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