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    • 23. 发明申请
    • Magnetic Field Measurement Apparatus
    • 磁场测量装置
    • US20130341745A1
    • 2013-12-26
    • US13980579
    • 2011-03-14
    • Seiichi SuzukiTaro OsabeRyuzo Kawabata
    • Seiichi SuzukiTaro OsabeRyuzo Kawabata
    • H01L43/02
    • H01L43/02G01R33/032
    • A light pumping magnetic measurement apparatus configured to suppress an influence on a magnetic field from a heater and facilitate reduction in size and integration of a gas cell when heating the gas cell in order to improve a sensitivity of detection of the magnetic field is provided. This measurement apparatus includes a first glass substrate, a substrate 102 having a thermal conductivity higher than glass, and a second glass substrate laminated in this order. At least one portion of a through hole formed on the substrate 102 having a thermal conductivity higher than the glass and penetrating therethrough when viewed in cross section constitutes a void 111 hermetically sealed by the first glass substrate and the second glass substrate, the void is filled with alkali metal gas generated by an alkali metal solid substance or liquid 112, and a flow channel (through hole) 113 connected to inlet-outlet ports 114 provided on the laminated substrate is formed in the vicinity of the void 111 of a substrate 103, so that the temperature of the alkali metal gas may be adjusted by causing the fluid to flow to the flow channel (through hole).
    • 提供了一种光泵测量装置,其被配置为抑制对来自加热器的磁场的影响,并且在加热气室时有利于减小气室的尺寸和集成,以提高磁场检测的灵敏度。 该测量装置包括第一玻璃基板,具有高于玻璃的导热率的基板102和依次层压的第二玻璃基板。 形成在基板102上的通孔的至少一部分具有高于玻璃的热导率并且在横截面中观察时贯穿其中,形成由第一玻璃基板和第二玻璃基板气密密封的空隙111,填充空隙 由碱金属固体物质或液体112产生的碱金属气体和与层叠基板上设置的入口排出口114连接的流路(通孔)113形成在基板103的空隙111的附近, 使得可以通过使流体流向流路(通孔)来调节碱金属气体的温度。