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21. 发明授权

US08258492B2 Differential evacuation system 有权
标题翻译：差分疏散系统
公开(公告)号：US08258492B2
公开(公告)日：2012-09-04
申请号：US12631258
申请日：2009-12-04
申请人： Hiroshi Someya , Yukio Watanabe
发明人： Hiroshi Someya , Yukio Watanabe
IPC分类号： G21G5/00
CPC分类号： G03F7/70841 , G03F7/70033 , G03F7/70808 , H05G2/003 , H05G2/008
摘要： [Technical Problem] To provide a differential evacuation system capable of easily maintaining, at a low cost, a large differential pressure between a light generation chamber and an illumination optical chamber in which optical processing, e.g. exposure, is performed by using extreme ultraviolet (EUV) light generated in the light generation chamber, and yet capable of sufficiently ensuring a desired optical path.[Solution to Problem] The differential evacuation system has a light generation chamber 10 that generates EUV light, an illumination optical chamber 100 in which optical processing is performed by using the EUV light generated in the light generation chamber 10, and a chamber connecting passage 150 that connects together the light generation chamber 10 and the illumination optical chamber 100 to guide the EUV light generated in the light generation chamber 10 into the illumination optical chamber 100. The chamber connecting passage 150 has a flow path constricting portion 151 and is increased in inner diameter in a conical tube shape at portions thereof that are at opposite sides, respectively, of the flow path constricting portion 151. An enlarged-diameter part 160 is provided at a position of the chamber connecting passage 150 that is closer to the light generation chamber 10, which is the higher in pressure of the two chambers 10 and 100, than the flow path constricting portion 151, and vacuum pumps 170 are attached to the enlarged-diameter part 160.
摘要翻译：技术问题提供一种能够以低成本容易地维持光生成室和照明光学室之间的大的压差的差分抽空系统，其中光学处理，例如，曝光是通过使用在光产生室中产生的极紫外（EUV）光进行的，并且能够充分确保期望的光路。 [问题的解决方案]差分抽空系统具有产生EUV光的光生成室10，通过使用在光生成室10中产生的EUV光进行光学处理的照明光学室100和室连接通路150 将光生成室10和照明光学室100连接在一起，将发光室10内产生的EUV光引导到照明光学室100中。室连通路150具有流路收缩部151，内部增大直径在分别位于流路收缩部151的相对侧的部分处的锥形管形状。扩径部160设置在室连接通道150的靠近光生成室的位置如图10所示，两个腔室10和100的压力比流路收缩部分151高，并且真空泵170附接到扩径部160。

22. 发明申请

US20100181498A1 Differential evacuation system 有权
标题翻译：差分疏散系统
公开(公告)号：US20100181498A1
公开(公告)日：2010-07-22
申请号：US12631258
申请日：2009-12-04
申请人： Hiroshi Someya , Yukio Watanabe
发明人： Hiroshi Someya , Yukio Watanabe
IPC分类号： G21K5/02
CPC分类号： G03F7/70841 , G03F7/70033 , G03F7/70808 , H05G2/003 , H05G2/008
摘要： [Technical Problem] To provide a differential evacuation system capable of easily maintaining, at a low cost, a large differential pressure between a light generation chamber and an illumination optical chamber in which optical processing, e.g. exposure, is performed by using extreme ultraviolet (EUV) light generated in the light generation chamber, and yet capable of sufficiently ensuring a desired optical path.[Solution to Problem] The differential evacuation system has a light generation chamber 10 that generates EUV light, an illumination optical chamber 100 in which optical processing is performed by using the EUV light generated in the light generation chamber 10, and a chamber connecting passage 150 that connects together the light generation chamber 10 and the illumination optical chamber 100 to guide the EUV light generated in the light generation chamber 10 into the illumination optical chamber 100. The chamber connecting passage 150 has a flow path constricting portion 151 and is increased in inner diameter in a conical tube shape at portions thereof that are at opposite sides, respectively, of the flow path constricting portion 151. An enlarged-diameter part 160 is provided at a position of the chamber connecting passage 150 that is closer to the light generation chamber 10, which is the higher in pressure of the two chambers 10 and 100, than the flow path constricting portion 151, and vacuum pumps 170 are attached to the enlarged-diameter part 160.
摘要翻译：技术问题提供一种能够以低成本容易地维持光生成室和照明光学室之间的大的压差的差分抽空系统，其中光学处理，例如，曝光是通过使用在光产生室中产生的极紫外（EUV）光进行的，并且能够充分确保期望的光路。 [问题的解决方案]差分抽空系统具有产生EUV光的光生成室10，通过使用在光生成室10中产生的EUV光进行光学处理的照明光学室100和室连接通路150 将光生成室10和照明光学室100连接在一起，将发光室10内产生的EUV光引导到照明光学室100中。室连通路150具有流路收缩部151，内部增大直径在分别位于流路收缩部151的相对侧的部分处的锥形管形状。扩径部160设置在室连接通道150的靠近光生成室的位置如图10所示，两个腔室10和100的压力比流路收缩部分151高，并且真空泵170附接到扩径部160。

23. 发明授权

US07684306B2 Optical pickup apparatus 失效
标题翻译：光拾取装置
公开(公告)号：US07684306B2
公开(公告)日：2010-03-23
申请号：US11496814
申请日：2006-07-31
申请人： Kazunori Matsubara , Shinzoh Murakami , Tetsuo Ueyama , Kazuhiro Tsuchida , Yukio Watanabe , Osamu Miyazaki
发明人： Kazunori Matsubara , Shinzoh Murakami , Tetsuo Ueyama , Kazuhiro Tsuchida , Yukio Watanabe , Osamu Miyazaki
IPC分类号： G11B7/00
CPC分类号： G11B7/1353
摘要： There is provided an optical pickup apparatus that can obtain a stable servo signal by reducing stray light generated by diffraction in a recording layer other than a recording layer on which light is condensed. A hologram element provided in an optical pickup apparatus for recording information onto a recording medium and/or reproducing information on the recording medium by use of light includes fourth and fifth divisions where at least first-order diffracted light among diffracted light beams obtained by reflection and diffraction on a recording layer other than a light-condensed recording layer on which light is condensed by an objective lens so as not to be directed toward first and second light-receiving elements for detecting focus position information and third to eighth light-receiving elements for detecting track position information.
摘要翻译：提供了一种光拾取装置，其可以通过减少除了聚光的记录层之外的记录层中的衍射产生的杂散光，从而获得稳定的伺服信号。提供在用于通过使用光将信息记录在记录介质上和/或在记录介质上再现信息的光学拾取装置中的全息元件包括第四和第五分割，其中至少一级衍射光通过反射和除了聚光记录层之外的记录层上的衍射，其中光被物镜聚光，以便不被指向用于检测聚焦位置信息的第一和第二光接收元件和用于检测聚焦位置信息的第三至第八光接收元件检测轨迹位置信息。

24. 发明申请

US20080050854A1 Semiconductor Light Emitting Element and Method for Manufacturing the Same 审中-公开
公开(公告)号：US20080050854A1
公开(公告)日：2008-02-28
申请号：US11875767
申请日：2007-10-19
申请人： Hideto Sugawara , Yukio Watanabe , Hirohisa Abe , Kuniaki Konno
发明人： Hideto Sugawara , Yukio Watanabe , Hirohisa Abe , Kuniaki Konno
IPC分类号： H01L21/02
CPC分类号： H01L33/20 , H01L33/0079 , H01L33/16 , H01L33/22 , H01L2224/32245 , H01L2224/48091 , H01L2224/48247 , H01L2224/73265 , H01L2924/10155 , H01L2924/00014 , H01L2924/00
摘要： A high-luminance light emitting element is manufactured by a method comprising: forming a light emitting layer on a first surface of a GaP substrate including the first surface and a second surface opposed to the first surface and having an area smaller than the first area, the light emitting layer emitting light of a wavelength λ permitted to pass through the GaP substrate; forming a plurality of side surfaces on the GaP substrate to be respectively aslant by substantially the same angle to become narrower toward the second surface; and forming a plurality of depressions and protrusions as high as 0.1λ to 3λ on the side surfaces.

25. 发明申请

US20070108169A1 Rotor using electrical steel sheet with low iron loss, rotor manufacturing method, laser peening method, and laser peening apparatus 审中-公开
标题翻译：转子采用低铁损电动钢板，转子制造方法，激光喷丸处理方法和激光喷丸装置
公开(公告)号：US20070108169A1
公开(公告)日：2007-05-17
申请号：US10572855
申请日：2004-09-21
申请人： Munekatsu Shimada , Hideaki Ono , Takae Ono , Tetsurou Tayu , Makoto Kano , Yu Owada , Naoshi Sakata , Kimihiro Shibata , Toshimitsu Matsuoka , Nobuhiko Tanaka , Yukio Watanabe , Yuji Sano , Hironobu Kimura
发明人： Munekatsu Shimada , Hideaki Ono , Takae Ono , Tetsurou Tayu , Makoto Kano , Yu Owada , Naoshi Sakata , Kimihiro Shibata , Toshimitsu Matsuoka , Nobuhiko Tanaka , Yukio Watanabe , Yuji Sano , Hironobu Kimura
IPC分类号： B23K26/00 , H02K21/12 , H02K1/27
CPC分类号： H02K15/03 , C21D8/1277 , C21D10/005
摘要： A laser peening apparatus for manufacturing a rotor using an electrical steel sheet with low iron loss for enabling high speed rotation of a motor. The laser peening apparatus includes a laser irradiating device for irradiating with a laser through a liquid the rotor made of an electrical steel sheet with low iron loss, and a drive device for moving the rotor relative to an irradiation spot of the laser so that the laser irradiates along a bridge side on an inner circumference of a magnet insertion window of the rotor.
摘要翻译：一种用于制造具有低铁损的电动钢板的转子的激光喷丸装置，用于使马达能够高速旋转。激光喷丸装置包括激光照射装置，用于通过液体激光照射具有低铁损的电工钢板的转子，以及用于使转子相对于激光照射点移动的驱动装置，使得激光器沿转子的磁体插入窗的内周沿桥侧照射。

26. 发明申请

US20070053270A1 Optical pickup device recording and/or reproducing information on and/or from a plurality of kinds of recording media 有权
标题翻译：光拾取装置在多种记录介质上记录和/或再现信息
公开(公告)号：US20070053270A1
公开(公告)日：2007-03-08
申请号：US11495907
申请日：2006-07-28
申请人： Tetsuo Ueyama , Osamu Miyazaki , Yukio Watanabe , Yasuo Nakata , Tomio Mashiyama
发明人： Tetsuo Ueyama , Osamu Miyazaki , Yukio Watanabe , Yasuo Nakata , Tomio Mashiyama
IPC分类号： G11B7/135
CPC分类号： G11B7/1353 , G11B7/0903
摘要： An optical pickup device has a semiconductor laser emitting light which is in turn branched via a diffraction grating into at least three beams of light including a main beam and two sub beams which are in turn condensed via an objective lens on an optical disk at a guide groove and reflected by the optical disk to provide three reflections of light which are in turn received by detectors, each divided into two regions, respectively, to generate a tracking error signal. The diffraction grating is divided into three regions including a first region, a second region and a third region located intermediate therebetween, each having a periodical structure out of phase, the periodical structure having grating grooves in a direction determined depending on the phase of the second region to incline relative to a direction perpendicular to the guide groove of the optical disk.
摘要翻译：光学拾取装置具有发射光的半导体激光器，该半导体激光器又通过衍射光栅分支成至少三束光束，所述至少三束光包括主光束和两个子光束，所述至少三个光束又通过物镜在光盘上以引导凹槽并由光盘反射以提供三次反射的光，这些反射又被检测器接收，每个被分成两个区域以产生跟踪误差信号。衍射光栅分为三个区域，包括第一区域，第二区域和位于其间的第三区域，每个区域具有异相的周期性结构，该周期结构具有根据第二区域的相位确定的方向的光栅槽区域相对于垂直于光盘的引导槽的方向倾斜。

27. 发明申请

US20070025228A1 Optical pickup apparatus 失效
标题翻译：光拾取装置
公开(公告)号：US20070025228A1
公开(公告)日：2007-02-01
申请号：US11496814
申请日：2006-07-31
申请人： Kazunori Matsubara , Shinzoh Murakami , Tetsuo Ueyama , Kazuhiro Tsuchida , Yukio Watanabe , Osamu Miyazaki
发明人： Kazunori Matsubara , Shinzoh Murakami , Tetsuo Ueyama , Kazuhiro Tsuchida , Yukio Watanabe , Osamu Miyazaki
IPC分类号： G11B7/135
CPC分类号： G11B7/1353
摘要： There is provided an optical pickup apparatus that can obtain a stable servo signal by reducing stray light generated by diffraction in a recording layer other than a recording layer on which light is condensed. A hologram element provided in an optical pickup apparatus for recording information onto a recording medium and/or reproducing information on the recording medium by use of light includes fourth and fifth divisions where at least first-order diffracted light among diffracted light beams obtained by reflection and diffraction on a recording layer other than a light-condensed recording layer on which light is condensed by an objective lens so as not to be directed toward first and second light-receiving elements for detecting focus position information and third to eighth light-receiving elements for detecting track position information.
摘要翻译：提供了一种光拾取装置，其可以通过减少除了聚光的记录层之外的记录层中的衍射产生的杂散光，从而获得稳定的伺服信号。提供在用于通过使用光将信息记录在记录介质上和/或在记录介质上再现信息的光学拾取装置中的全息元件包括第四和第五分割，其中至少一级衍射光通过反射和除了聚光记录层之外的记录层上的衍射，其中光被物镜聚光，以便不被指向用于检测聚焦位置信息的第一和第二光接收元件和用于检测聚焦位置信息的第三至第八光接收元件检测轨迹位置信息。

28. 发明授权

US07122446B2 Semiconductor light-emitting element 有权
标题翻译：半导体发光元件
公开(公告)号：US07122446B2
公开(公告)日：2006-10-17
申请号：US10896222
申请日：2004-07-20
申请人： Koichi Nitta , Haruhiko Okazaki , Yukio Watanabe , Chisato Furukawa
发明人： Koichi Nitta , Haruhiko Okazaki , Yukio Watanabe , Chisato Furukawa
IPC分类号： H01L21/30
CPC分类号： H01L33/20 , B82Y20/00 , G02B6/1225 , H01L33/10 , H01L33/12 , H01L33/22 , H01L33/38 , H01L33/405 , H01L2224/48091 , H01L2224/48247 , H01L2224/48465 , H01L2224/73265 , H01L2924/00014 , H01L2924/00
摘要： Part of light emitted downward by an active layer is reflected by an electrode functioning as a reflective layer, and travels upward to radiate outside. Since the electrode is made of a metal, it reflects almost all light regardless of its incident angle, and light can be efficiently extracted.
摘要翻译：由有源层向下发射的光的一部分由用作反射层的电极反射，并向上传播以辐射到外部。由于电极由金属制成，所以它几乎反射所有的光，而不管其入射角如何，并且可以有效地提取光。

29. 发明申请

US20060020771A1 Parallel computer having a hierarchy structure 审中-公开
标题翻译：具有层次结构的并行计算机
公开(公告)号：US20060020771A1
公开(公告)日：2006-01-26
申请号：US11234265
申请日：2005-09-26
申请人： Atsushi Kunimatsu , Yukio Watanabe , Hideki Yasukawa
发明人： Atsushi Kunimatsu , Yukio Watanabe , Hideki Yasukawa
IPC分类号： G06F15/00
CPC分类号： G06F9/5066 , G06F15/8007
摘要： In a multiprocessor system of a hierarchy configuration as a parallel computer of a common-bus structure, a processing unit (120) in an intermediate stage has a processor (123) having a programmable function that is equal to a normal processor, an instruction memory (125), and a data memory (127). The processing unit (120) receives a status signal from a lower processor (143), and a DMA controller (151) having a memory for the transfer of large sized data performs compression, decompression, programmable load dispersion, and load dispersion according to the state of operation of each lower processor.
摘要翻译：在作为公共总线结构的并行计算机的层次结构的多处理器系统中，中间阶段的处理单元（120）具有处理器（123），其具有等于正常处理器的可编程功能，指令存储器（125）和数据存储器（127）。处理单元（120）从下处理器（143）接收状态信号，并且具有用于传送大尺寸数据的存储器的DMA控制器（151）根据该处理器执行压缩，解压缩，可编程负载色散和负载色散每个下位处理器的运行状态。

30. 发明申请

US20050180293A1 Optical pickup 有权
标题翻译：光学拾音
公开(公告)号：US20050180293A1
公开(公告)日：2005-08-18
申请号：US10512188
申请日：2003-04-18
申请人： Tetsuo Ueyama , Keiji Sakai , Renzaburou Miki , Osamu Miyazaki , Yukio Watanabe
发明人： Tetsuo Ueyama , Keiji Sakai , Renzaburou Miki , Osamu Miyazaki , Yukio Watanabe
IPC分类号： G11B7/1353 , G11B7/09 , G11B7/095 , G11B7/00
CPC分类号： G11B7/1353 , G11B7/0903 , G11B7/0956
摘要： An optical pickup converts a laser beam from a semiconductor laser (1) into a parallel ray with a collimator lens (2), and divides it into a main beam (30), a sub-beam (+1st order component) (31), and a sub-beam (−1st order component) (32) with a gradient multiple-division type phase difference grating (3). After passing through a beam splitter (4), an objective lens (5) condenses the light beams on a track (61) of an optical disc (6), and the reflected light that has passed through the objective lens 5 is reflected at the beam splitter (4) and is guided into optical detectors (8A, 8B, and 8C) by a condensing lens (7). Accordingly, in a tracking error signal detecting method using the push-pull signals of the main beam and sub-beams, an offset produced by an objective lens shift or a disc tilt can be cancelled at low cost without lowering the efficiency of using light.
摘要翻译：光学拾取器将来自半导体激光器（1）的激光束用准直透镜（2）转换成平行光线，并将其分割成主光束（30），子光束（+ 1次分量）（31），和具有梯度多分割型相位差光栅（3）的子光束（-1阶分量）（32）。在通过分束器（4）之后，物镜（5）将光束会聚在光盘（6）的轨道（61）上，并且已经通过物镜5的反射光在分束器（4），并通过聚光透镜（7）被引导到光学检测器（8A，8B和8C）中。因此，在使用主光束和子光束的推挽信号的跟踪误差信号检测方法中，可以以低成本消除由物镜偏移或盘倾斜产生的偏移而不降低使用光的效率。

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