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    • 26. 发明授权
    • Metal pattern forming method
    • 金属图案形成方法
    • US06582767B1
    • 2003-06-24
    • US09702852
    • 2000-11-01
    • Motoo FukushimaEiichi TabeiTomoyoshi FurihataMasaya Arakawa
    • Motoo FukushimaEiichi TabeiTomoyoshi FurihataMasaya Arakawa
    • B05D310
    • B82Y30/00C23C18/1605H01L21/288H01L21/32051H01L21/76838H05K3/182
    • A method for forming a metal pattern by the micro-stamping process involves the steps of treating a substrate bearing a thin film of a reducing silicon polymer with a solution containing a salt of a metal having a standard oxidation-reduction potential of at least 0.54 volt, allowing metal colloid to deposit on the substrate surface, stamping a pattern of an alkane thiol to the substrate surface for transferring the pattern to the metal colloid-bearing silicon polymer thin film, and effecting electroless metal plating for forming a metal pattern only on the region of the silicon polymer thin film which is not covered with the alkane thiol pattern. The finely defined metal pattern can be formed on any type of substrate though inexpensive simple steps and has good adhesion to the substrate.
    • 通过微冲压法形成金属图案的方法包括以下步骤:用含有至少0.54伏特的标准氧化还原电位的金属盐的溶液处理含有还原硅聚合物薄膜的基片 ,允许金属胶体沉积在基材表面上,将烷烃硫醇的图案压印到基材表面上,以将图案转移到含金属胶体的硅聚合物薄膜上,并进行化学镀金以仅形成金属图案 未被烷烃硫醇图案覆盖的硅聚合物薄膜的区域。 精细限定的金属图案可以通过廉价的简单步骤形成在任何类型的基底上,并且对基底具有良好的粘合性。