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    • 21. 发明授权
    • Processing system and processing method
    • 处理系统及处理方法
    • US09199805B2
    • 2015-12-01
    • US13570440
    • 2012-08-09
    • Masaaki FuruyaToyoyasu Tauchi
    • Masaaki FuruyaToyoyasu Tauchi
    • B65G57/00H01L21/677
    • B65G57/00H01L21/67742H01L21/67781
    • According to one embodiment, a processing system includes a storage section, a processing section, a mounting section, a first transport section, and a second transport section. The mounting section includes a plurality of holding sections with a first spacing in a stacking direction. The first transport section is configured to transport the workpiece between the storage section and the mounting section and to enter the mounting section at a first position in the stacking direction. The second transport section is configured to transport the workpiece between the processing section and the mounting section and to enter the mounting section at a second position different from the first position in the stacking direction. The first position is provided at two sites in the stacking direction across the second position. The first transport section and the second transport section are enabled to enter the mounting section around a same time.
    • 根据一个实施例,处理系统包括存储部分,处理部分,安装部分,第一传送部分和第二传送部分。 安装部包括在层叠方向上具有第一间隔的多个保持部。 第一输送部构造成在存储部和安装部之间输送工件,并且在堆叠方向的第一位置进入安装部。 第二输送部构造成在处理部和安装部之间输送工件,并且在与层叠方向上的第一位置不同的第二位置进入安装部。 第一位置在跨越第二位置的层叠方向上的两个位置设置。 第一输送部和第二输送部能够同时进入安装部。
    • 25. 发明授权
    • Non-contact type mechanical seal
    • 非接触式机械密封
    • US06325382B1
    • 2001-12-04
    • US09576125
    • 2000-05-22
    • Yasutaka IwamotoMasaaki FuruyaMasahito IkeharaYoshimitsu Sekiya
    • Yasutaka IwamotoMasaaki FuruyaMasahito IkeharaYoshimitsu Sekiya
    • F16J1554
    • F16J15/342F16J15/3404
    • A static pressure non-contact type mechanical seal that exhibits and maintains a high sealing function or performance for a prolonged period even when sealing gases containing foreign matter such as oil. A labyrinth seal (7) comprising a plurality of annular grooves (71) and annular plates (72) extending into the grooves is provided, the labyrinth seal partitioning a region C on the outside diameter side of the seal faces (31, 41) in the seal case (2) from the inside region A of a gas treatment machine (1). The seal case is provided with a return passage (8) communicating with the bottom portions of the annular grooves 71 and opening into the inside region A of the machine. The seal case also includes a purge gas feed passage for supplying purge gas to the region C on the outside diameter side of the seal faces, the purge gas pressure being higher than that in the inside region. A foreign matter recovery passage (101) is also provided in the seal case, the recovery passage opening into the region C on the outside diameter side of the seal faces and communicating with a foreign matter recovery tank (103) maintained under the same pressure as the region C.
    • 静压非接触型机械密封,即使在密封含有异物如油的气体时也能长时间显示和保持高密封功能或性能。 提供了一种迷宫式密封件(7),其包括多个环形槽(71)和延伸到槽中的环形板(72),所述迷宫式密封件将密封面(31,41)的外径侧上的区域C分隔成 来自气体处理机(1)的内部区域A的密封壳体(2)。 密封壳体设置有与环形槽71的底部连通并且打开到机器的内部区域A中的返回通道(8)。 密封壳还包括用于向密封面的外径侧的区域C供给吹扫气体的吹扫气体供给通道,吹扫气体压力高于内部区域的吹扫气体压力。 异物回收通道(101)还设置在密封壳体中,回收通道开口到密封面的外径侧的区域C,并与异物回收罐(103)连通,该异物回收槽 地区C.