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    • 26. 发明申请
    • Aerosol generating apparatus and method, and film forming apparatus and method using the same
    • 气溶胶发生装置和方法,以及使用该装置和方法的成膜装置及方法
    • US20070204865A1
    • 2007-09-06
    • US11707118
    • 2007-02-16
    • Takami Arakawa
    • Takami Arakawa
    • A62B7/00A61M15/00A62B9/00
    • B22F9/026B22F7/08C23C24/04
    • An aerosol generating apparatus capable of stably generating an aerosol with controlled concentration, and a film forming apparatus using the aerosol generating apparatus. The aerosol generating apparatus includes a powder containing chamber formed with an opening for leading out powder contained therein, an assist gas lead-in part for assisting lead-out of the powder when the powder is led out from the opening, and a dispersion gas lead-in part for supplying a gas for dispersing the powder led out from the opening. Further, the film forming apparatus includes the aerosol generating apparatus, a substrate stage for holding a substrate, and a nozzle for injecting the aerosol generated by the aerosol generating apparatus toward the substrate.
    • 能够稳定地产生具有受控浓度的气溶胶的气溶胶发生装置和使用该气溶胶发生装置的成膜装置。 气溶胶发生装置包括形成有用于引出其中所含的粉末的开口的粉末容纳室,辅助气体引入部分,用于在粉末从开口引出时辅助引出粉末;以及分散气体引线 - 用于供应用于分散从开口引出的粉末的气体的一部分。 此外,成膜装置包括气溶胶发生装置,用于保持基板的基板台和用于将由气溶胶发生装置产生的气溶胶喷射到基板的喷嘴。