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    • 28. 发明授权
    • Process for forming functional zinc oxide films using alkyl zinc
compound and oxygen-containing gas
    • 使用烷基锌化合物和含氧气体形成功能性氧化锌膜的方法
    • US5002796A
    • 1991-03-26
    • US354716
    • 1989-05-22
    • Shoji Nishida
    • Shoji Nishida
    • C23C16/18C23C16/40C23C16/50C23C16/511G02F1/1343H01B1/08H01L21/205H01L31/04H01L31/075H01L31/18
    • H01L31/1884C23C16/407G02F1/13439H01B1/08H01L31/075Y02B10/10Y02E10/548
    • A functional zinc oxide deposited thin film having high light permeability and low resistivity can be obtained at a low temperature of about 200.degree. C. on an inexpensive substrate such as glass by a method of activating a starting material gas by means of activation energy, in a space different from a film-forming space thereby forming a precursor contributing to the formation of a deposited film, activating a starting material gas in a space different from the film-forming space and the space just-mentioned above by means of activation energy thereby forming an active species that chemically reacts with the precursor, and introducing the precursor and the active species into the film-forming space, thereby depositing a film, wherein the starting material gas for forming the precursor is an alkyl zinc compound and the starting material for forming the active species is an oxygen gas or an ozone gas. This enables mass production of photovoltaic devices at high efficiency using a PN junction or PIN junction or high performance flat display device using liquid crystals, by which practical provision of power sources for domestic equipments or power sources for electric power appliance or large area display device can be obtained at a reduced cost.
    • 通过活化能活化起始原料气体的方法,可以在廉价的基板如玻璃上,在约200℃的低温下获得具有高透光性和低电阻率的功能氧化锌沉积薄膜, 与成膜空间不同的空间,从而形成有助于形成沉积膜的前体,借助于活化能在与成膜空间不同的空间和上述空间中活化原料气体,从而 形成与前体发生化学反应的活性物质,并将前体和活性物质引入成膜空间,从而沉积膜,其中用于形成前体的起始原料气体是烷基锌化合物和用于 形成活性物质是氧气或臭氧气体。 这使得可以使用PN结或PIN结或使用液晶的高性能平面显示装置高效率地批量生产光电器件,通过该实施例,用于家用设备或用于电力设备或大面积显示装置的电源的电源的实际供应可以 以较低的成本获得。