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    • 21. 发明授权
    • Mechanism and method for controlling focal point position of UV light and apparatus and method for inspection
    • UV灯的焦点位置控制机构及方法及检测方法
    • US06801650B1
    • 2004-10-05
    • US09661743
    • 2000-09-14
    • Hiroki KikuchiAsahiko NogamiMasayuki Morita
    • Hiroki KikuchiAsahiko NogamiMasayuki Morita
    • G06K900
    • G01R31/2887G01N21/9501G01N21/956G01N2021/9513G01N2021/95676G01R31/311G03F7/70483G03F7/70691
    • A method and apparatus for controlling the focal position of the UV light for auto-focussing the converged UV light, and a method and apparatus and for inspecting a device, such as a semiconductor wafer or liquid crystal using the converged UV light, in which the UV light converged is to be auto-focussed accurately and speedily. The method includes an inspection stage 11 for supporting a semiconductor wafer, an objective lens for UV light 40 or converging a UV laser light for illuminating the laser light converged to the semiconductor wafer, a distance sensor 41 secured to this objective lens for UV light 40 to detect the distance to the semiconductor wafer and a controller for causing movement of the inspection stage 11 in a perpendicular direction. The controller causes the distance between the objective lens for UV light 40 and the semiconductor wafer to coincide with the target distance T based on the distance as detected by the distance sensor 41.
    • 用于控制用于自动聚焦的UV光的UV光的焦点位置的方法和装置,以及使用会聚的UV光来检测诸如半导体晶片或液晶的装置的方法和装置,其中 紫外光会聚是准确,快速地自动聚焦。 该方法包括:用于支撑半导体晶片的检查台11,用于UV光40的物镜或会聚用于照射会聚到半导体晶片的激光的UV激光;固定到该用于UV光40的物镜的距离传感器41 以检测到半导体晶片的距离和用于使检查台11沿垂直方向移动的控制器。 控制器使得用于UV光40的物镜与半导体晶片之间的距离与距离传感器41检测到的距离相对应于目标距离T.
    • 24. 发明授权
    • Current driving circuit
    • 电流驱动电路
    • US08653754B2
    • 2014-02-18
    • US13008125
    • 2011-01-18
    • Hiroki KikuchiMasao YonemaruTakashi Oki
    • Hiroki KikuchiMasao YonemaruTakashi Oki
    • H05B37/02H03K3/26G05F1/10
    • H03F3/347G05F3/262H03F3/087H03F2200/456H03F2200/91
    • A current driving circuit may include a reference voltage input terminal; a resistor connection terminal; an output terminal via which the light emitting element is connected; a reference voltage generating unit; a transistor arranged such that one terminal thereof is connected to the resistor connection terminal; and an operational amplifier including first and second non-inverting input terminals and a single inverting input terminal, and arranged such that the output terminal thereof is connected to a control terminal of the transistor, the internal reference voltage is input to the first non-inverting input terminal, the external reference voltage is input to the second non-inverting input terminal, and the inverting input terminal thereof is connected to the resistor connection terminal. When the external resistor is connected between the resistor connection terminal and a ground terminal, a driving current is output via the output terminal.
    • 电流驱动电路可以包括参考电压输入端; 电阻连接端子; 连接发光元件的输出端子; 参考电压产生单元; 晶体管,其一端连接到电阻器连接端子; 以及包括第一和第二非反相输入端子和单反相输入端子的运算放大器,并且被布置为使得其输出端子连接到晶体管的控制端子,内部参考电压被输入到第一非反相 输入端子,外部参考电压输入到第二同相输入端子,其反相输入端子连接到电阻器连接端子。 当外部电阻连接在电阻连接端子和接地端子之间时,通过输出端子输出驱动电流。
    • 27. 发明授权
    • Power supply unit and portable device
    • 电源单元和便携式设备
    • US08120344B2
    • 2012-02-21
    • US11718220
    • 2005-10-25
    • Taichi HoshinoHiroki Kikuchi
    • Taichi HoshinoHiroki Kikuchi
    • G05F1/00H02J7/00
    • G05F1/575
    • A power supply unit, adapted to provide a predetermined output voltage from its output circuit, compares a feedback voltage associated with the output voltage of the output circuit with a reference voltage so as to control the output circuit. The power supply unit is enabled and disabled in response to an externally supplied operation command signal. The reference voltage is generated by a reference voltage generation circuit, which is operable on the voltage of the operation command signal, and is controllably enabled when the voltage of the operation command signal exceeds a predetermined level, but otherwise disabled. Thus, the reference voltage is stabilized to improve the ripple rejection characteristic of the power supply unit without increasing its current consumption.
    • 适于从其输出电路提供预定输出电压的电源单元将与输出电路的输出电压相关联的反馈电压与参考电压进行比较,以便控制输出电路。 响应于外部提供的操作命令信号,电源单元被使能和禁用。 参考电压由基准电压产生电路产生,该电路可根据操作指令信号的电压进行操作,并且当操作指令信号的电压超过预定值时被控制地使能,否则禁用。 因此,参考电压被稳定以提高电源单元的纹波抑制特性,而不增加其电流消耗。
    • 30. 发明授权
    • Power supply unit and portable device
    • 电源单元和便携式设备
    • US07626371B2
    • 2009-12-01
    • US11718223
    • 2005-09-28
    • Taichi HoshinoHiroki Kikuchi
    • Taichi HoshinoHiroki Kikuchi
    • G05F1/00H02J7/00
    • G05F1/575Y10S323/901
    • A step-like operation command signal is inputted into a time-constant circuit to generate a gradually rising operation command input voltage, which is supplied to a power supply unit. Enablement and disablement of the power supply unit is controlled on the basis of the operational command input voltage. When the operation command input voltage exceeds a first predetermined voltage level, a detection signal and a reference voltage are generated, and at the same time an error amplification circuit is enabled. On the other hand, when the operation command input voltage exceeds a second predetermined voltage level, a level shift voltage for initiating a soft start is generated, which enables execution of a soft start of the power supply unit without increasing its consumption current and reduction of the number of its terminals.
    • 步进式操作命令信号被输入到时间常数电路中以产生提供给电源单元的逐渐上升的操作命令输入电压。 基于操作命令输入电压来控制电源单元的启用和禁用。 当操作命令输入电压超过第一预定电压电平时,产生检测信号和参考电压,同时产生误差放大电路。 另一方面,当操作命令输入电压超过第二预定电压电平时,产生用于启动软启动的电平转换电压,这使得能够在不增加其消耗电流的情况下执行电源单元的软起动,并且减小 其终端数量。