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    • 21. 发明授权
    • Magnetic vibrator with inclined pole pieces
    • 具有倾斜极片的磁性振动器
    • US08912692B2
    • 2014-12-16
    • US12873691
    • 2010-09-01
    • Sean ChangChing-Hsiang Yu
    • Sean ChangChing-Hsiang Yu
    • H02K33/02H02K33/16
    • H02K33/16
    • A magnetic vibrator including a first magnetic portion and a second magnetic portion is disclosed. The first magnetic portion includes an inner plate, a first magnet and a second magnet. The inner plate is disposed between the first magnet and the second magnet. The second magnetic portion includes a coil and a wrapper. The coil is disposed around the first magnetic portion and wrapped in the wrapper. The wrapper has a gap corresponding to the inner plate. An interval is configured between the first magnetic portion and the second magnetic portion. When a current is occurred in the coil, the first magnetic portion and the second magnetic portion are actuated to move axially with respect to each other.
    • 公开了一种包括第一磁性部分和第二磁性部分的磁性振动器。 第一磁性部分包括内板,第一磁体和第二磁体。 内板设置在第一磁体和第二磁体之间。 第二磁性部分包括线圈和包装物。 线圈围绕第一磁性部分设置并包裹在包装中。 包装物具有对应于内板的间隙。 间隔被配置在第一磁性部分和第二磁性部分之间。 当线圈中发生电流时,第一磁性部分和第二磁性部分被致动以相对于彼此轴向移动。
    • 23. 发明授权
    • Depositing tungsten into high aspect ratio features
    • 将钨沉积成高纵横比特征
    • US08435894B2
    • 2013-05-07
    • US13351970
    • 2012-01-17
    • Anand ChandrashekarRaashina HumayunMichal DanekAaron R. FellisSean Chang
    • Anand ChandrashekarRaashina HumayunMichal DanekAaron R. FellisSean Chang
    • H01L21/44
    • H01L21/486H01L21/28556H01L21/32136H01L21/76865H01L21/76877
    • Methods and apparatuses for filling high aspect ratio features with tungsten-containing materials in a substantially void-free manner are provided. In certain embodiments, the method involves depositing an initial layer of a tungsten-containing material followed by selectively removing a portion of the initial layer to form a remaining layer, which is differentially passivated along the depth of the high-aspect ration feature. In certain embodiments, the remaining layer is more passivated near the feature opening than inside the feature. The method may proceed with depositing an additional layer of the same or other material over the remaining layer. The deposition rate during this later deposition operation is slower near the feature opening than inside the features due to the differential passivation of the remaining layer. This deposition variation, in turn, may aid in preventing premature closing of the feature and facilitate filling of the feature in a substantially void free manner.
    • 提供了以基本上无空隙的方式用含钨材料填充高纵横比特征的方法和装置。 在某些实施方案中,该方法包括沉积含钨材料的初始层,然后选择性地去除初始层的一部分以形成沿着高纵横比特征的深度差异钝化的剩余层。 在某些实施例中,剩余层在特征开口附近比在特征内更加钝化。 该方法可以继续在剩余层上沉积相同或其它材料的附加层。 由于剩余层的差分钝化,在该后续沉积操作期间的沉积速率在特征开口附近比在特征内部的沉积速率更慢。 这种沉积变化又可以有助于防止特征的过早闭合并且有助于以基本无空隙的方式填充特征。
    • 24. 发明申请
    • DEPOSITING TUNGSTEN INTO HIGH ASPECT RATIO FEATURES
    • 沉积在高比例特征中
    • US20120115329A1
    • 2012-05-10
    • US13351970
    • 2012-01-17
    • Anand ChandrashekarRaashina HumayunMichal DanekAaron R. FellisSean Chang
    • Anand ChandrashekarRaashina HumayunMichal DanekAaron R. FellisSean Chang
    • H01L21/768
    • H01L21/486H01L21/28556H01L21/32136H01L21/76865H01L21/76877
    • Methods and apparatuses for filling high aspect ratio features with tungsten-containing materials in a substantially void-free manner are provided. In certain embodiments, the method involves depositing an initial layer of a tungsten-containing material followed by selectively removing a portion of the initial layer to form a remaining layer, which is differentially passivated along the depth of the high-aspect ration feature. In certain embodiments, the remaining layer is more passivated near the feature opening than inside the feature. The method may proceed with depositing an additional layer of the same or other material over the remaining layer. The deposition rate during this later deposition operation is slower near the feature opening than inside the features due to the differential passivation of the remaining layer. This deposition variation, in turn, may aid in preventing premature closing of the feature and facilitate filling of the feature in a substantially void free manner.
    • 提供了以基本上无空隙的方式用含钨材料填充高纵横比特征的方法和装置。 在某些实施方案中,该方法包括沉积含钨材料的初始层,然后选择性地去除初始层的一部分以形成沿着高纵横比特征的深度差异钝化的剩余层。 在某些实施例中,剩余层在特征开口附近比在特征内更加钝化。 该方法可以继续在剩余层上沉积相同或其它材料的附加层。 由于剩余层的差分钝化,在该后续沉积操作期间的沉积速率在特征开口附近比在特征内部的沉积速率更慢。 这种沉积变化又可以有助于防止特征的过早闭合并且有助于以基本无空隙的方式填充特征。
    • 27. 发明授权
    • Projection system and optical path transfer device thereof
    • 投影系统及其光路传输装置
    • US07157688B2
    • 2007-01-02
    • US10901118
    • 2004-07-29
    • Sean ChangAlbert Lin
    • Sean ChangAlbert Lin
    • H01J3/14
    • H04N5/7416G02B17/04G02B26/0833
    • A projection system. The projection system has a light source, a relay module, an optical path switching device and an optical path transfer device. The light source emits a light beam, and the relay module relays the light beam. The optical path switching device is used to receive and switch the light beam and has at least one active area. The optical path transfer device is disposed between the relay module and the optical path switching device directing the light beam toward the optical path switching device in a first angle, and the optical path transfer device has an incident surface tilted perpendicular to an incidence of the light beam.
    • 投影系统。 投影系统具有光源,中继模块,光路切换装置和光路传送装置。 光源发射光束,继电器模块中继光束。 光路切换装置用于接收和切换光束并且具有至少一个有效区域。 光路传送装置设置在继电器模块和光路切换装置之间,其以第一角度将光束引向光路切换装置,并且光​​路传送装置具有垂直于光入射的入射面 光束。