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    • 30. 发明专利
    • DE69329359D1
    • 2000-10-12
    • DE69329359
    • 1993-05-28
    • CANON KK
    • MIYAGAWA MASASHIOHKUMA NORIOINADA GENJI
    • B41J2/16G03F7/00
    • A method of fabricating an ink jet recording head includes forming a photosensitive resin layer (3) on a substrate (1) having formed thereon an energy generation device (2) for generating energy for ejecting recording droplets; pattern-wise exposing the photosensitive resin layer to an active radiation to a portion of the photosensitive resin layer where formation of a pattern of an ink fluid path is desired; laminating a top plate (7) on the photosensitive resin layer; and eluting the pattern exposed portion of the photosensitive resin layer to form a pattern of an ink fluid path (10). An ink jet recording head includes a substrate (1); an energy generation device (2) provided on the substrate and for generating energy for ejecting recording droplets; an exposed photosensitive resin layer provided on the substrate, the resin layer (3) comprising a heat-crosslinking positive type resist material, and being provided with an ink fluid path (10) defined between the substrate and the exposed photosensitive resin layer; a top plate (7) laminated on the exposed photosensitive layer, the top plate being provided with an ink supply port (9) communicating with the ink fluid path; and the ink fluid path ending as an ink ejection port (11) on a side opposite to a side of the ink supply port. An ink jet recording apparatus includes a portion for mounting such an ink jet recording head.