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    • 30. 发明公开
    • VERFAHREN ZUM HERSTELLEN VON STRUKTURIERTEN SINTERVERBINDUNGSSCHICHTEN UND HALBLEITERBAUELEMENT MIT STRUKTURIERTER SINTERVERBINDUNGSSCHICHT
    • 的生产方法结构化烧结LINK层和半导体元件结构化烧结链路层
    • EP2729965A1
    • 2014-05-14
    • EP12731389.8
    • 2012-06-26
    • Robert Bosch GmbH
    • GUYENOT, MichaelGUENTHER, MichaelHERBOTH, Thomas
    • H01L23/492H01L23/373H01L21/60
    • The fundamental concept of the invention is to produce a sintering layer connection between a substrate (11) and a chip (13), said connection creating both an excellent electric and thermal bond between the substrate (11) and the chip (13) and also reducing mechanical stress in the chip (13). The invention relates to a method for producing a sintering layer (12), comprising the steps of applying in a structured fashion a plurality of sintering elements (22a, 22b, 22c) composed of a starting material that forms the sintering layer to a contact area (21) of a main surface (11a) of a substrate (11), arranging a chip to be connected to the substrate on the sintering elements (22a, 22b, 22c), and heating and compressing the sintering elements (22a, 22b, 22c) in order to produce a structured sintering layer which connects the substrate and the chip and which extends within the contact area (21), wherein the area occupation density of the sintering elements (22a, 22b, 22c) on the substrate (11) in a central region (21a) of the contact area (21) is greater than the area occupation density of the sintering elements in an edge region (21c) of the contact area (21), and wherein at least one passage channel (23) runs from each of the sintering elements (22a, 22b, 22c) laterally with respect to the main surface of the substrate to the edge of the contact area (21). A large-area sintering element (22a) can be located in the central region (21a) of the contact surface (21) and a plurality of, for example circular, sintering elements (22c) can be located in an edge region (21c) of the contact surface (21). The sintering elements (22a, 22b, 22c) can also have notches (24). The invention also relates to a corresponding device (10, 10', 10").