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    • 22. 发明授权
    • Plasma processing methods and apparatus
    • 等离子体处理方法和装置
    • US07179397B2
    • 2007-02-20
    • US10414603
    • 2003-04-15
    • Oleg Siniaguine
    • Oleg Siniaguine
    • C23C16/00C23C16/453C23F1/00B65H1/00
    • H01L21/67017C23C16/4584C23C16/513C23C16/54H01J37/32743H01J37/32788H01J2237/20228H01J2237/31701H01L21/67745H01L21/67796H01L21/68707
    • To move an article in and out of plasma during plasma processing, the article is rotated by a first drive around a first axis, and the first drive is itself rotated by a second drive. As a result, the article enters the plasma at different angles for different positions of the first axis. The plasma cross-section at the level at which the plasma contacts the article is asymmetric so that those points on the article that move at a greater linear velocity (due to being farther from the first axis) move longer distances through the plasma. As a result, the plasma processing time becomes more uniform for different points on the article surface. In some embodiments, two shuttles are provided for loading and unloading the plasma processing system. One of the shuttles stands empty waiting to unload the processed articles from the system, while the other shuttle holds unprocessed articles waiting to load them into the system. After the plasma processing terminates, the empty shuttle unloads processed articles from the system, takes the articles away, and gets unloaded and reloaded with unprocessed articles. Meanwhile, the other shuttle loads unprocessed articles into the system and the plasma processing begins. Since the plasma processing system does not wait for the first shuttle, the productivity of the system is increased.
    • 为了在等离子体处理期间将物品移入和移出等离子体,物品通过围绕第一轴线的第一驱动器旋转,并且第一驱动器本身由第二驱动器旋转。 结果,物品以不同的角度进入等离子体,用于第一轴的不同位置。 等离子体接触制品的等离子体横截面是不对称的,使得以更大的线速度(由于离第一轴越远)移动的制品上的那些点移动通过等离子体的较长距离。 结果,物品表面上的不同点的等离子体处理时间变得更加均匀。 在一些实施例中,提供两个梭子来装载和卸载等离子体处理系统。 其中一个班车空着,等待从系统中卸载已处理的物品,而另一个梭子将未加工物品等待装载到系统中。 等离子处理结束后,空梭从系统中卸载加工物品,取出物品,卸载并重新加载未加工物品。 同时,其他梭子将未处理的物品装载到系统中,等离子体处理开始。 由于等离子体处理系统不等待第一班车,所以系统的生产率提高。
    • 27. 发明授权
    • Apparatus for plasma jet treatment of substrates
    • 用于等离子体处理基板的装置
    • US6105534A
    • 2000-08-22
    • US194247
    • 1998-11-25
    • Oleg SiniaguineIskander Tokmouline
    • Oleg SiniaguineIskander Tokmouline
    • H01J37/32C23C16/458C23C16/50C23C16/513C23C16/54C23F4/00H01L21/302H01L21/3065C23C16/00
    • C23C16/513C23C16/4584C23C16/54
    • An apparatus for processing substrates with a plasma jet with increased throughput is described. The apparatus comprises at least two carrousels for holding a plurality of substrates. Each of the carrousels includes a rotatable angle drive having a rotation axis Da, a plurality of arms extending radially from the angle drive and a plurality of rotatable substrate holders. Each of the substrate holders is connected to one of the arms, each of the rotatable substrate holders has a rotation axis Ha positioned at a distance R from the rotation axis Da of the rotatable angle drive. The carousel angle drive provides programmable motion of the substrates being treated relative to a plasma jet generator. The plasma jet generator is movable from a first position Z.sub.1 adjacent to the first carousel to a second position Z.sub.2 adjacent to the second carousel. While the substrates on the first carousel are being treated by the plasma jet, the substrates on the second carousel can be loaded or unloaded. Once the treatment of the substrates on the first carousel is completed, the plasma jet is moved from the first position Z.sub.1 to the second position Z.sub.2 to treat the substrates on the second carousel and allow loading and unloading of substrates from the first carousel.
    • PCT No.PCT / US97 / 09234。 371日期:1998年11月25日 102(e)1998年11月25日日期PCT提交1997年5月30日PCT公布。 第WO92 / 45857号公报 日期1997年12月4日描述了一种用于通过具有增加的生产量处理等离子体射流来处理衬底的设备。 该装置包括用于保持多个基板的至少两个转盘。 每个转盘包括具有旋转轴线Da的可旋转角度驱动器,从角度驱动器径向延伸的多个臂和多个可旋转衬底保持器。 每个基板保持器连接到一个臂,每个可旋转的基板保持器具有旋转轴线Ha,旋转轴线Ha位于距可旋转角度驱动器的旋转轴线Da的距离R处。 传送带角度驱动器提供了相对于等离子体射流发生器进行处理的基板的可编程运动。 等离子体喷射发生器可从邻近第一转盘的第一位置Z1移动到与第二转盘相邻的第二位置Z2。 当通过等离子体射流处理第一转盘上的基板时,第二转盘上的基板可被装载或卸载。 一旦第一转盘上的基板的处理完成,等离子体射流从第一位置Z1移动到第二位置Z2,以处理第二转盘上的基板,并允许从第一转盘装载和卸载基板。