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21. 发明专利

JP2000072405A REACTION FURNACE FOR GENERATING WATER 失效
公开(公告)号：JP2000072405A
公开(公告)日：2000-03-07
申请号：JP24787498
申请日：1998-09-02
申请人： OMI TADAHIRO , FUJIKIN KK
发明人： OMI TADAHIRO , KAWADA KOJI , MINAMI YUKIO , HIRAO YOSHIYUKI , IKEDA SHINICHI
IPC分类号： H01L21/31 , B01J23/42 , C01B5/00 , H01L21/316
摘要： PROBLEM TO BE SOLVED: To provide a reaction furnace for generating water capable of stably attaining water generation reaction rate exceeding 99% even under the condition that the temp. of the furnace is =1000 sccm. SOLUTION: The inside of a reaction furnace main body 1 is partitioned into two of upper and lower chambers 14 and 15 by a gas permeable diffusion filter 2. A gaseous starting material being a gaseous mixture of hydrogen with oxygen is fed to the upper part 1st chamber 14 from a gaseous starting material feed port 4 formed on the top wall 12 of the reaction furnace main body 1 and introduced into the lower part 2nd chamber 15 while being diffused by a 1st reflection plate 3 and the diffusion filter 2. Hydrogen and oxygen introduced to the 2nd chamber 15 radically react with each other by bringing it to contact with a platinum catalytic film 5 formed on the peripheral wall 11 and the bottom wall 13 of the reaction furnace main body 1 and the produced water is taken out from a water take-out port 7 of the bottom wall 13. The reaction of hydrogen with oxygen occurs mainly in a narrow space 15a between a 2nd reflection plate 6 and the bottom wall having the size that the outer peripheral part is adjacent to the inner surface of the peripheral wall 11 of the reaction furnace main body 1.

22. 发明专利

JPH116585A PIPE JOINT 失效
公开(公告)号：JPH116585A
公开(公告)日：1999-01-12
申请号：JP16104797
申请日：1997-06-18
申请人： OMI TADAHIRO , FUJIKIN KK
发明人： OMI TADAHIRO , YAMAJI MICHIO , IKEDA SHINICHI , SHINOHARA TSUTOMU , KOJIMA TETSUYA
IPC分类号： F16L17/06 , F16L19/02
摘要： PROBLEM TO BE SOLVED: To provide an optimum shape of an annular seal projection provided on a butting end face of a joint member. SOLUTION: Each seal projection 7, 8 is located closely to the radial outside of inner peripheries 1a, 2a of butting end faces of joint members (1), (2). The contour shapes of cross section of each seal projections 7, 8 is constituted of circular arc parts 7b, 8b extending from the butting end faces toward the radial outside and linear parts 7a, 8a continued to the circular arc parts 7b, 8b. The centers of the circular arc parts 7b, 8b are located at the radial inside of the intersection of the circular arc parts 7b, 8b and the linear parts 7a, 8a and the linear parts 7a, 8a are axially inclined by 45 deg..

23. 发明专利

JPH10270437A WATER CONTENT PRODUCING REACTOR 失效
公开(公告)号：JPH10270437A
公开(公告)日：1998-10-09
申请号：JP7413097
申请日：1997-03-26
申请人： OMI TADAHIRO , FUJIKIN KK , HITACHI LTD
发明人： OMI TADAHIRO , KAWADA KOJI , TANABE YOSHIKAZU , IKEDA SHINICHI , MORIMOTO AKIHIRO , MINAMI YUKIO
IPC分类号： H01L21/31 , C01B5/00
摘要： PROBLEM TO BE SOLVED: To raise the water content producing reactivity to stably produce the water content under specified condition by providing an inlet reflector, filter and outlet reflector-diffuser in a reactor and providing a diffusion filter having a Pt coating in the outlet reflector-diffuser. SOLUTION: A gas diffusing member 8 is composed of an inlet reflector, filter and outlet reflector-diffuser 12 which has a diffusion filter 12c and Pt coating 12d on the outer surface of the filter 12 at the space side. A Pt coating 13 provided on the inner wall of a reactor 1 top covert a non-radical H or O gas into radicals, thus H and O are brought into reaction instantaneously to produce water. The coating 13 stably produces water continuously at 1000 cc/min or more at about 500 deg.C over the entire area due to the reaction heat.

24. 发明专利

JPH1082707A PRESSURE DETECTOR 失效
公开(公告)号：JPH1082707A
公开(公告)日：1998-03-31
申请号：JP23870696
申请日：1996-09-10
申请人： OMI TADAHIRO , FUJIKIN KK
发明人： OMI TADAHIRO , DOI RYOSUKE , NISHINO KOJI , IKEDA SHINICHI
IPC分类号： G01L9/04 , G01L9/00 , G01L19/00 , G01L19/06
摘要： PROBLEM TO BE SOLVED: To eliminate the possibility of lowering the quality of product even a pressure detector is applied to a semiconductor production process, by forming a passive film on the gas-contact face of a stainless steel diaphragm having specified dimensions provided on a diaphraqm base. SOLUTION: A diaphragm 3 of about 50μm thick having an inside diameter of about 10mm is made of stainless steel and has a gas-contact face 3a on which a passive film 3b of chromium oxide, a fluorinated passive film 3b or a mixed oxide passive film 3b of aluminum oxide and chromium oxide is formed. After forming the diaphragm 3 integrally with a diaphragm base 4, the diaphragm base 4 formed with the passive film 3b and a sensor base 1 are abutted against the gas contact face 3a of the diaphragm 3 and the entire circumference of the side wall face is welded 8. Subsequently, an oil injection hole 1b is filled with a pressure transmission medium (silicon oil) 5 and a sealing body (ball) 6 is welded 10 to the sensor base 1 thus sealing the silicon oil 5 hermetically.

25. 发明专利

JPH0821573A PIPE FITTING 失效
公开(公告)号：JPH0821573A
公开(公告)日：1996-01-23
申请号：JP15890794
申请日：1994-07-11
申请人： OMI TADAHIRO , FUJIKIN KK
发明人： OMI TADAHIRO , YAMAJI MICHIO , IKEDA SHINICHI , SHINOHARA TSUTOMU , KOJIMA TETSUYA
IPC分类号： F16L19/02 , F16L19/03
摘要： PURPOSE:To provide a pipe fitting which allows easy checking of any gasket existing or not. CONSTITUTION:A pipe fitting is equipped with a retainer 5 to hold a gasket 3 at one of the pipe fitting members 1. The two pipe fitting members 1, 2 are made of stainless steel and are silver white. The retainer 5 is of stainless steel and is colored blue so that distinction is practicable from the fitting members 1, 2. Existence of retainer 5, accordingly of gasket 3, can be checked only by ocularly judging whether the color seen through a window 40 in a nut 4 is blue or silver white.

26. 发明专利

JP2000240838A SOLENOID-DRIVEN METAL DIAPHRAGM TYPE ON/OFF CONTROL VALVE 失效
公开(公告)号：JP2000240838A
公开(公告)日：2000-09-08
申请号：JP4783199
申请日：1999-02-25
申请人： FUJIKIN KK , OMI TADAHIRO , TAKAHASHI KEN , TOHOKU STEEL
发明人： YAMAJI MICHIO , TANIGAWA TAKESHI , IKEDA SHINICHI , DOI RYOSUKE , NISHINO KOJI , IDETA EIJI , YANAI YASUYUKI
IPC分类号： H01F7/06 , F16K7/12 , F16K7/14 , F16K31/06 , H01F7/127 , H01F7/16
摘要： PROBLEM TO BE SOLVED: To miniaturize, simplify structure, speedup action, and also enable reduction of initial drive electric power in a metal diaphragm on/off control valve. SOLUTION: In this solenoid-driven metal diaphragm type on/off control valve, an electromagnet M is formed from a cylindrical yoke 18 enclosing a cylindrical plunger 19, a coil 17 arranged inside the yoke 18, and a moving iron core 20 threadably attached to the plunger 19 so as to be arranged facing an end face of the yoke 18 with an interval G in between, the yoke 18 is formed in a cylindrical form from a short length first yoke part and a long length second yoke part, and the coil 17 is arranged between the first and second yoke parts. The moving iron core 20 is formed from a cylindrical first iron core part and a collar shaped second movable iron core part, a shaft 21 connected to a stem 7 of the valve and the plunger 19 is connected via an adjusting screw 15, and the interval G between the yoke 18 and the moving iron core 20 fixed to the plunger 19 is adjusted by this adjusting screw 15.

27. 发明专利

JP2000208431A METALLIC MATERIAL WHEREIN CHROMIUM OXIDE PASSIVATION FILM IS FORMED, ITS MANUFACTURE AND CORROSIVE FLUID CONTACTING PART AND FLUID SUPPLY/DISCHARGE SYSTEM 失效
公开(公告)号：JP2000208431A
公开(公告)日：2000-07-28
申请号：JP709299
申请日：1999-01-13
申请人： OMI TADAHIRO , FUJIKIN KK , NIPPON KINZOKU CO LTD
发明人： OMI TADAHIRO , SHIRAI YASUYUKI , IKEDA SHINICHI , IDETA EIJI , MORIMOTO AKIHIRO , OGUSHI TETSUTARO , KONISHI TAKEHISA
IPC分类号： H01L21/28 , C23C8/02 , C23C26/00
摘要： PROBLEM TO BE SOLVED: To obtain good anti-corrosion property at a low cost by providing a passivation film consisting of chromium oxide formed by oxidizing a chromium film on a metallic material with surface roughness not exceeding a specified value. SOLUTION: A surface formed by applying chromium to a metallic material whose surface roughness is at most about 1.5 μm is subjected to heat treatment in oxidizing gas atmosphere. Contact property between a metallic material and a film interface is improved by applying chromium to a metallic material whose surface roughness is at most about 1.5 μm in this way and defective adhesion can be resolved as combination force of an interface is increased by carrying out heat treatment. Since interface corrosion is eliminated, good anti-corrosion property can be obtained. Furthermore, since the need for limitation of a metallic material, limitation of part configuration and accurate control of oxidizing atmosphere is eliminated, chromium oxide passivation film treatment can be performed for an arbitrary metallic material and part at a low cost when compared to chromium oxide passivation treatment which is a conventional method.

28. 发明专利

JP2000169109A REACTION FURNACE FOR GENERATING WATER 失效
公开(公告)号：JP2000169109A
公开(公告)日：2000-06-20
申请号：JP34549998
申请日：1998-12-04
申请人： FUJIKIN KK , OMI TADAHIRO
发明人： OMI TADAHIRO , IKEDA SHINICHI , KAWADA KOJI , MORIMOTO AKIHIRO , MINAMI YUKIO , MANOHARU L SHURESTA , TSUBOTA KENJI , MOTOIDEN AKIO , HIRAI NOBORU , KOMEHANA KATSUNORI
IPC分类号： H01L21/31 , B01J23/42 , C01B5/00 , H01L21/316
摘要： PROBLEM TO BE SOLVED: To improve the safety of a reaction furnace for generating water and to reduce the dead space in the inside space of the reaction furnace main body to miniaturize the reaction furnace main body by completely preventing the generation of ignition of hydrogen or backfire in the inside of a reaction furnace main body for generating water. SOLUTION: The reaction furnace for generating water is constituted by an inlet side furnace main body member 1 having a gas supply port 1a, an outlet side furnace main body member having a water gas take-out port 2a, an inlet side reflection body 5 arranged to face a gas supply port in the inside space of reaction furnace main body formed by combining and welding the inlet side furnace main body member with the outlet side furnace main body member to face each other, an outlet side reflection body 6 arranged to face the water gas take-out port 2a in the inside space and a platinum coating catalytic layer 8 formed on the inside wall surface of the outlet side furnace main body member. Water is generated by the reaction of hydrogen with oxygen under a non-combustion condition by allowing hydrogen and oxygen supplied to the inside space of the reaction furnace main body from the gas supply port to contact with the platinum coating catalytic layer 8b to activate the reaction.

29. 发明专利

JPH11211593A MOUNTING STRUCTURE OF PRESSURE DETECTOR 失效
公开(公告)号：JPH11211593A
公开(公告)日：1999-08-06
申请号：JP884198
申请日：1998-01-20
申请人： OMI TADAHIRO , FUJIKIN KK
发明人： OMI TADAHIRO , DOI RYOSUKE , NISHINO KOJI , UNO TOMIO , YAMAJI MICHIO , IKEDA SHINICHI
IPC分类号： G01L9/04 , G01L9/00 , G01L19/00 , G01L19/06 , G01L19/14
摘要： PROBLEM TO BE SOLVED: To prevent the occurrence of such a phenomenon that a diaphragm is strained by a stress applied to a diaphragm type pressure detector, and to prevent the output characteristic and temperature characteristic of the detector, after the detector is incorporated in the main body of a mounting structure for pressure detector provided to a conduit, equipment, etc., front largely varying as compared with those before the detector is incorporated in the main body. SOLUTION: A first step section 18 and a second step section 19 are provided below the detector inserting hole 12 of the main body 11 of a fitting, and the space between the horizontal surface of the second step section 19 and the lower contact surface of a gasket 13 is sealed. Then, flange sections are provided above the sensor base 1 of a pressure sensor and a diaphragm base 4 and both flange sections are combinedly fixed in such a state that the flange sections face oppositely each other. In addition, the space between the lower flange surface of the diaphragm base 4 and the upper contacting surface of the gasket 13 is sealed and the gasket 13 is constituted of a metallic gasket having a nearly rectangular cross section and provided with the upper and lower contacting surfaces. Moreover, the upper flange surface of the sensor base 1 is pressed down by means of a cylindrical sensor retainer 16.

30. 发明专利

JPH09303308A FLUID CONTROL DEVICE 失效
公开(公告)号：JPH09303308A
公开(公告)日：1997-11-25
申请号：JP11620496
申请日：1996-05-10
申请人： OMI TADAHIRO , FUJIKIN KK
发明人： OMI TADAHIRO , HIRAO YOSHIYUKI , MINAMI YUKIO , YAMAJI MICHIO , HIROSE TAKASHI , IKEDA SHINICHI
IPC分类号： F15B11/00 , F15B13/00 , F15B13/02 , F15B13/08 , F16K27/00 , H01L21/02
摘要： PROBLEM TO BE SOLVED: To provide a fluid control device optimal for securing the purity of the fluid, of which purity should be secured at a high level, such as the process gas and for reducing the used variable thereof by using a relatively long passage as an auxiliary passage for flowing the fluid, of which purity should be secured at a high level. SOLUTION: A fluid control device is provided with a relatively long auxiliary passage 18, which is formed of a flow-out passage 12 of an upper valve main body 4 and a bypass passage 15 of a lower valve main body 5, and a relatively short auxiliary passage 17, which is formed of a part of a flow-out passage 14 of the lower valve main body 5. A process gas A is flowed to the relatively long auxiliary passage 18, and a purge gas B is flowed to the relatively short passage 17. Consequently, when the fluid, of which purity should be secured at a high degree, is flowed, the fluid is accumulated in the only relatively short auxiliary passage 17. On the other hand, in the case where the short auxiliary passage 17 is used as the auxiliary passage for the fluid, of which purity should be secured at a high degree, the fluid is accumulated in the relatively long auxiliary passage 18 when the fluid, of which purity should be secured at a high degree, is flowed.

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