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    • 21. 发明申请
    • Method of manufacturing a substrate with concave portions, a substrate with concave portions, a microlens substrate, a transmission screen, and a rear projection
    • US20060087025A1
    • 2006-04-27
    • US11252701
    • 2005-10-18
    • Nobuo Shimizu
    • Nobuo Shimizu
    • H01L23/48
    • G02B3/0031B29D11/00278B29D11/00365G02B3/0012
    • A method of manufacturing a substrate 6 provided with a plurality of concave portions 61 is disclosed. The substrate 6 is used for manufacturing a microlens substrate provided with a plurality of microlenses as convex lenses which are to be formed using the plurality of concave portions 61. The method includes the steps of: preparing a base substrate 7, the base substrate 7 having two major surfaces; forming at least one layer on the one of the two major surfaces of the base substrate 7; forming a plurality of openings 81 in the at least one layer to form a mask 8, the diameter of each of the plurality of openings 81 being in the range of 0.8 to 20 μm; forming the plurality of concave portions 61 in the base substrate 7 by subjecting the base substrate 7 with the mask 8 on which the plurality of openings 81 have been formed to an etching process so that each of the formed concave portions 61 has a substantially elliptic shape; and removing the mask 8 from the base substrate 7 (6). In this case, the plurality of formed concave portions 61 are arranged on the base substrate 7 in a houndstooth check manner. Further, in the case where the depth of each of the formed concave portions 61 in a direction perpendicular to the major surface of the base substrate 7 is defined as D (μm) and the value obtained by dividing the difference between the length of each of the formed concave portions 61 in a long axis direction and the diameter of each of the formed openings 81 by two is defined as S (μm), then D and S satisfy the relation: 0.90≦S/D≦1.40. Moreover, a ratio of an area occupied by all the plurality of formed concave portions 61 in a usable area where the plurality of concave portions 61 are formed with respect to the entire usable area is 90% or more when viewed from above the one major surface of the base substrate 7.
    • 23. 发明授权
    • Steam-turbine power plant and steam turbine
    • 蒸汽轮机发电厂和汽轮机
    • US6123504A
    • 2000-09-26
    • US391945
    • 1995-02-21
    • Masao ShigaRyo HiragaTakeshi OnodaNobuo ShimizuNorio YamadaMitsuo KuriyamaKishio HidakaShigeyoshi NakamuraYutaka FukuiToshio Fujita
    • Masao ShigaRyo HiragaTakeshi OnodaNobuo ShimizuNorio YamadaMitsuo KuriyamaKishio HidakaShigeyoshi NakamuraYutaka FukuiToshio Fujita
    • F01D5/02B23K35/00B23K35/30C21D9/38C22C38/00F01D5/14F01D5/28F01D5/30F01D25/00F01K7/22
    • F01D5/28B23K35/308C21D9/38B23K35/004C21D2211/005
    • A steam turbine includes a rotor shaft, movable blades assembled on the rotor shaft, fixed blades for guiding inflow of steam to the moving blades, and an inner casing for holding the fixed blades. The rotor shaft and at least a first stage of the movable blades are made of high-strength martensitic steel comprising 0.05-0.20(%) of C, at most 0.15(%) of Si, 0.3-0.7(%) of Mn, 9.5-13(%) of Cr, 0.3-0.7(%) of Ni, 0.05-0.35(%) of V, 0.02-0.15(%) of Nb, 0.01-0.06(%) of N, 0.05-0.5(%) of Mo, 1.0-3.5(%) of W, 2-10(%) of Co and 0.0005-0.03(%) of B and at least 78(%) of Fe (the percentages being given in terms of weight). The inner casings is made of martensitic cast steel comprising 0.06-0.16(%) of C, at most 0.5(%) of Si, at most 1(%) of Mn, 0.2-1.0(%) of Ni, 8-12(%) of Cr, 0.05-0.35(%) of V, 0.01-0.15(%) of Nb, 0.01-0.1(%) of N, at most 1.5% of Mo, 1-4(%) of W and 0.0005-0.03(%) of B and at least 85(%) of Fe (the percentages being given in terms of weight). The rotor shaft has a length of at least 5 (m) and has a minimum diameter of at least 600 (mm) at a portion where the fixed blades are assembled. The first stage of said moving blades has a length of at least 35 (mm) at a blade portion thereof.
    • 蒸汽涡轮机包括转子轴,组装在转子轴上的可动叶片,用于引导蒸汽流入活动叶片的固定叶片以及用于保持固定叶片的内壳体。 转子轴和可动刀片的至少第一级由高强度马氏体钢制成,包括0.05-0.20(%)C,最多0.15(%)的Si,0.3-0.7(%)的Mn,9.5 -13(%)Cr,0.3-0.7(%)Ni,0.05-0.35(%)V,0.02-0.15(%)Nb,0.01-0.06(%)N,0.05-0.5(%) 的Mo,1.0-3.5(%)W,2-10(%)Co和0.0005-0.03(%)B和至少78(%)Fe(百分比以重量计)。 内壳由马氏体铸钢制成,包括C:0.06-0.16(%),最多0.5(%)Si,最多1(%)Mn,0.2-1.0(%)Ni,8-12( %),V 0.05〜0.35(%),Nb:0.01-0.15(%),N:0.01-0.1(%),Mo:1.5%以下,W:1-4(%):0.0005〜 B的0.03(%)和Fe的至少85(%)(以重量计)。 转子轴具有至少5(m)的长度,并且在组装固定叶片的部分处具有至少600(mm)的最小直径。 所述活动叶片的第一阶段在叶片部分处具有至少35(mm)的长度。
    • 28. 发明授权
    • Method of manufacturing member with concave portions, member with concave portions, lens substrate, transmission type screen and rear projection
    • 具有凹部的构件的制造方法,具有凹部的构件,透镜基板,透射型屏幕和后投影
    • US07892443B2
    • 2011-02-22
    • US11654308
    • 2007-01-17
    • Nobuo ShimizuKazuto Yoshimura
    • Nobuo ShimizuKazuto Yoshimura
    • B44C1/22
    • B23K26/066B23K26/0661B23K26/355B23K26/389B29D11/00365
    • A method of manufacturing a member with concave portions includes preparing a base material, forming a mask formation film on the base material, forming a number of openings in the mask formation film by laser irradiation treatments using a branching filter, and etching the base material to form the concave portions in the base material. The branching filter branches laser light into first laser beams and second laser beams. Each of irradiation regions of the mask formation film sequentially is subjected to the laser irradiation treatment, so that first openings are formed by the first laser beams and second openings are formed by the second laser beams. Each of the irradiation regions has portions where no opening is formed by the first beams of the laser irradiation treatment for the irradiation region while openings will be formed by the second laser beams in one or more of the subsequent laser irradiation treatments. In the base material, concave portions for examination use are formed using some of the openings formed by the second laser beams used in the laser irradiation treatments for the specified irradiation regions.
    • 制造具有凹部的部件的方法包括:准备基材,在基材上形成掩模形成膜,通过使用分支过滤器的激光照射处理在掩模形成膜中形成多个开口,并将基材蚀刻到 在基材中形成凹部。 分支滤波器将激光分支成第一激光束和第二激光束。 对掩模形成膜的照射区域依次进行激光照射处理,由第一激光形成第一开口部,第二激光光束形成第二开口部。 每个照射区域具有通过用于照射区域的激光照射处理的第一光束而不形成开口的部分,同时在随后的一次或多次激光照射处理中由第二激光束形成开口。 在基材中,使用由用于特定照射区域的激光照射处理中的第二激光形成的一些开口形成用于检查用的凹部。