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    • 24. 发明专利
    • DE4109931A1
    • 1991-10-02
    • DE4109931
    • 1991-03-26
    • MITSUBISHI ELECTRIC CORP
    • MATSUDA TETSUYAYAMAMOTO SHUNJIYAMADA TADATOSHIUSHIJIMA TOSHIE
    • G21K1/093H05H7/04H05H13/04
    • Semicircular superconducting deflection magnets for deflecting electron beams along a semiconductor orbit. The magnet 1 comprises a pair of race-track shaped main coils 2 and 3 disposed symmetrically with respect to the plane of the orbit S. Each one of the main coils 2 and 3 is divided into two parts 21 and 22 or 31 and 32, the end portions 21a and 22a or 31a and 32a being displaced from each other in the direction of the orbit S, so that the magnetomotive force thereof is distributed evenly along the orbit S (FIGS. 12 through 14). According to another aspect, rectangular cancellation coils 25, 26, 35, and 36 are provided at the end portions 21a, 22a, 31a, and 32a, respectively, of the coil parts 21, 22, 31, and 32, such that the magnetomotive force of each one of the end portions is cancelled by the magnetomotive force of the adjacent parallel running side of a cancellation coil (FIGS. 21 through 23). According to still another aspect, sextupole correction coils 5 are disposed near the end portions 2a of the main coils 2 along the orbit S.