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    • 24. 发明授权
    • Manufacturing method of vacuum airtight container
    • 真空密封容器的制造方法
    • US08002602B2
    • 2011-08-23
    • US12349258
    • 2009-01-06
    • Tokutaka MiuraMitsutoshi HasegawaYoichi Ando
    • Tokutaka MiuraMitsutoshi HasegawaYoichi Ando
    • H01J9/00
    • H01J9/261H01J9/385H01J29/94H01J31/127H01J2209/385H01J2329/945
    • A manufacturing method of a vacuum airtight container includes a baking step of baking, in a vacuum atmosphere, a container in which a first non-evaporable getter and a second non-evaporable getter having an activation temperature higher than that of the first non-evaporable getter are disposed. The baking step further includes steps of baking the entire container by increasing the temperatures of the container to a temperature T1 and holding the temperature T1, which is equal to or higher than an activation temperature of the first non-evaporable getter and is lower than an activation temperature of the second non-evaporable getter. After holding the temperature T1, the entire container is baked by increasing the temperature of the container to a temperature T2, which is higher than the activation temperature of the second non-evaporable getter.
    • 真空密封容器的制造方法包括在真空气氛中烘烤具有比第一不可蒸发的活化温度高的第一非蒸发性吸气剂和第二非蒸发性吸气剂的容器的烘烤步骤 吸气剂处理。 烘烤步骤还包括以下步骤:通过将容器的温度增加到温度T1并保持等于或高于第一非蒸发性吸气剂的活化温度并且低于第一非蒸发性吸气剂的活化温度的温度T1来烘烤整个容器 第二非蒸发吸气剂的活化温度。 在保持温度T1之后,通过将容器的温度提高到比第二非蒸发性吸气剂的活化温度高的温度T2来烘烤整个容器。