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21. 发明授权

US08202446B2 Ionic liquid based mixtures for gas storage and delivery 有权
标题翻译：用于气体储存和输送的离子液体基混合物
公开(公告)号：US08202446B2
公开(公告)日：2012-06-19
申请号：US12493751
申请日：2009-06-29
申请人： Daniel Joseph Tempel , Philip Bruce Henderson , Jeffrey Richard Brzozowski , Ronald Martin Pearlstein , Diwakar Garg
发明人： Daniel Joseph Tempel , Philip Bruce Henderson , Jeffrey Richard Brzozowski , Ronald Martin Pearlstein , Diwakar Garg
IPC分类号： B01D19/00 , F17C11/00
CPC分类号： C01B3/001 , C01B9/08 , C01B13/0285 , C01B25/06 , C01B32/80 , F17C11/00 , F17C11/005 , F17C11/007 , Y02E60/321 , Y02E60/324
摘要： A mixture and method for the storage and delivery of a gas are disclosed herein. In one aspect, there is provided a mixture comprising: an ionic liquid comprising an anion and a cation, at least a portion of the gas that is disposed within and reversibly chemically reacted with the ionic liquid, and optionally an unreacted gas. In another aspect, there is provided a method for delivering a gas from a mixture comprising an ionic liquid and one or more gases comprising: reacting at least a portion of the gas with the ionic liquid to provide the mixture comprising a chemically reacted gas and an ionic liquid and separating the chemically reacted gas from the mixture wherein the chemically reacted gas after the separating step has substantially the same chemical identity as the chemically reacted gas prior to the reacting step.
摘要翻译：本文公开了用于储存和输送气体的混合物和方法。在一个方面，提供了一种混合物，其包含：包含阴离子和阳离子的离子液体，所述气体的至少一部分设置在离子液体内并可逆地与离子液体化学反应，以及任选的未反应气体。在另一方面，提供了一种从包含离子液体和一种或多种气体的混合物输送气体的方法，包括：使至少一部分气体与离子液体反应，以提供包含化学反应气体和离子液体并且从混合物中分离化学反应的气体，其中分离步骤之后的化学反应气体在反应步骤之前具有与化学反应气体基本上相同的化学同一性。

22. 发明申请

US20120142191A1 Chemical Mechanical Planarization Composition And Method With Low Corrosiveness 有权
标题翻译：化学机械平面化组合物和低腐蚀性的方法
公开(公告)号：US20120142191A1
公开(公告)日：2012-06-07
申请号：US13154662
申请日：2011-06-07
申请人： Xiaobo Shi , Ronald Martin Pearlstein
发明人： Xiaobo Shi , Ronald Martin Pearlstein
IPC分类号： H01L21/306 , C09K13/00
CPC分类号： H01L21/3212 , C09G1/02 , C09K13/00
摘要： A CMP composition and associated method are provided that afford good corrosion protection and low defectivity levels both during and subsequent to CMP processing. This composition and method are useful in CMP (chemical mechanical planarization) processing in semiconductor manufacture involving removal of metal(s) and/or barrier layer material(s) and especially for CMP processing in low technology node applications.
摘要翻译：提供CMP组合物和相关方法，其在CMP处理期间和之后提供良好的腐蚀保护和低缺陷水平。该组合物和方法可用于涉及去除金属和/或阻挡层材料的半导体制造中的CMP（化学机械平面化）处理，特别是用于低技术节点应用中的CMP处理。

23. 发明授权

US07357138B2 Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials 失效
标题翻译：蚀刻高介电常数材料和清洁高介电常数材料沉积室的方法
公开(公告)号：US07357138B2
公开(公告)日：2008-04-15
申请号：US10723714
申请日：2003-11-26
申请人： Bing Ji , Stephen Andrew Motika , Ronald Martin Pearlstein , Eugene Joseph Karwacki, Jr. , Dingjun Wu
发明人： Bing Ji , Stephen Andrew Motika , Ronald Martin Pearlstein , Eugene Joseph Karwacki, Jr. , Dingjun Wu
IPC分类号： B08B9/00 , B08B6/00
CPC分类号： C23C16/4405 , B08B7/00 , B08B7/0035
摘要： A process for the removal of a substance from a substrate for etching and/or cleaning applications is disclosed herein. In one embodiment, there is provided a process for removing a substance having a dielectric constant greater than silicon dioxide from a substrate by reacting the substance with a reactive agent that comprises at least one member from the group consisting a halogen-containing compound, a boron-containing compound, a hydrogen-containing compound, nitrogen-containing compound, a chelating compound, a carbon-containing compound, a chlorosilane, a hydrochlorosilane, or an organochlorosilane to form a volatile product and removing the volatile product from the substrate to thereby remove the substance from the substrate.
摘要翻译：本文公开了用于从用于蚀刻和/或清洁应用的基底中去除物质的方法。在一个实施方案中，提供了一种通过使该物质与包含至少一种成员的物质与含卤素的化合物，硼的物质反应从物质中除去介电常数大于二氧化硅的物质的方法含氢化合物，含氮化合物，螯合化合物，含碳化合物，氯硅烷，氢氯代硅烷或有机氯硅烷，以形成挥发性产物，并从基质中除去挥发性产物，从而除去来自底物的物质。

24. 发明授权

US07013916B1 Sub-atmospheric gas delivery method and apparatus 失效
标题翻译：次气体输送方法及装置
公开(公告)号：US07013916B1
公开(公告)日：2006-03-21
申请号：US09641933
申请日：2000-08-18
申请人： Ronald Martin Pearlstein , John Giles Langan , Dao-Hong Zheng , John Irven , Benjamin Lee Hertzler
发明人： Ronald Martin Pearlstein , John Giles Langan , Dao-Hong Zheng , John Irven , Benjamin Lee Hertzler
IPC分类号： F16K11/20 , F16K31/12 , G05D7/00
CPC分类号： F16K1/305 , F16K37/0091 , F17C13/04 , F17C2205/0338 , F17C2205/035 , F17C2205/0391 , F17C2227/044 , F17C2227/048 , F17C2270/0518 , G05D16/10 , Y10T137/0379 , Y10T137/0396 , Y10T137/4245 , Y10T137/5762 , Y10T137/7069 , Y10T137/7794 , Y10T137/7796 , Y10T137/86083 , Y10T137/87917
摘要： An apparatus for containing and delivering hazardous gases at sub-atmospheric pressure from a pressurized container is provided which includes a valve body in sealed communication with an outlet orifice of the pressurized container. The outlet orifice of the pressurized container is open to an interior chamber of the pressurized container. A fluid discharge path is located in the valve body, between the outlet orifice of the pressurized container and an outlet orifice of the valve body. A pressure regulator having a pressure sensing means capable of responding to sub-atomospheric pressure, is integral to the valve body, in-line in the fluid discharge path with the pressure regulator pre-set to a pressure below atmospheric pressure to allow the gas to be delivered through the regulator from the interior chamber only when the pressure regulator senses a downstream pressure at or below the pre-set pressure. Finally, a high pressure shut-off valve integral to the valve body and in-line in the fluid discharge path and upstream from the pressure regulator is included. The gas flows through from the interior chamber of the pressurized container through the fluid discharge path, through the outlet orifice of the pressurized container, and through the outlet orifice of the valve body only when the outlet orifice is connected to a vacuum system. A method of containing and delivering hazardous gases at sub-atmospheric pressure is also provided.
摘要翻译：提供了一种用于从加压容器中容纳和传送低于大气压的有害气体的装置，其包括与加压容器的出口孔密封连通的阀体。加压容器的出口孔通向加压容器的内部室。流体排放路径位于阀体中，位于加压容器的出口孔与阀体的出口孔之间。压力调节器具有能够响应亚大气压力的压力感测装置，与压力调节器预先设定为低于大气压的压力一起在流体排放路径中与阀体成一体，以允许气体只有当压力调节器感测到等于或低于预设压力的下游压力时，才能通过调节器从内部室输送。最后，包括与阀体成一体并且在流体排放路径中并且在压力调节器上游的一体的高压截止阀。如果出口孔连接到真空系统，则气体从加压容器的内部腔室通过流体排出通道，通过加压容器的出口孔流过阀体的出口孔。还提供了一种在低于大气压的压力下容纳和输送有害气体的方法。

25. 发明授权

US08821751B2 Chemical mechanical planarization composition and method with low corrosiveness 有权
标题翻译：化学机械平面化组合物和腐蚀性低的方法
公开(公告)号：US08821751B2
公开(公告)日：2014-09-02
申请号：US13154662
申请日：2011-06-07
申请人： Xiaobo Shi , Ronald Martin Pearlstein
发明人： Xiaobo Shi , Ronald Martin Pearlstein
IPC分类号： C09K13/02 , C09K13/06 , C09K13/08 , C09K13/04 , C09K13/00 , H01L21/302 , H01L21/461 , C03C15/00 , C03C25/68
CPC分类号： H01L21/3212 , C09G1/02 , C09K13/00
摘要： A CMP composition and associated method are provided that afford good corrosion protection and low defectivity levels both during and subsequent to CMP processing. This composition and method are useful in CMP (chemical mechanical planarization) processing in semiconductor manufacture involving removal of metal(s) and/or barrier layer material(s) and especially for CMP processing in low technology node applications.
摘要翻译：提供CMP组合物和相关方法，其在CMP处理期间和之后提供良好的腐蚀保护和低缺陷水平。该组合物和方法可用于涉及去除金属和/或阻挡层材料的半导体制造中的CMP（化学机械平面化）处理，特别是用于低技术节点应用中的CMP处理。

26. 发明授权

US07648682B2 Wick systems for complexed gas technology 失效
标题翻译：复合气体技术的芯片系统
公开(公告)号：US07648682B2
公开(公告)日：2010-01-19
申请号：US11743925
申请日：2007-05-03
申请人： Wayne Thomas McDermott , Daniel Joseph Tempel , Philip Bruce Henderson , Ronald Martin Pearlstein
发明人： Wayne Thomas McDermott , Daniel Joseph Tempel , Philip Bruce Henderson , Ronald Martin Pearlstein
IPC分类号： B01D50/00 , B01D53/02 , B01D19/00
CPC分类号： F17C11/00 , Y10T137/0396
摘要： The invention relates to an improvement in apparatus and process for effecting storage and delivery of a gas. The storage and delivery apparatus is comprised of a storage and dispensing vessel containing a medium capable of storing a gas and permitting delivery of the gas stored in the medium from the vessel, the improvement comprising: (a) a reactive liquid having Lewis acidity or basicity; (b) a gas liquid complex in a reversible reacted state formed under conditions of pressure and temperature by contacting the gas having Lewis acidity with the reactive liquid having Lewis basicity or the gas having Lewis basicity with the reactive liquid having Lewis acidity; (c) a non-reactive wick medium holding and dispersing the reactive liquid and the gas liquid complex therein.
摘要翻译：本发明涉及用于实现气体的储存和输送的设备和方法的改进。储存和输送装置由储存和分配容器组成，储存和分配容器含有能够储存气体并允许从容器中输送存储在介质中的气体的介质，其改进包括：（a）具有路易斯酸度或碱度的反应性液体 ; （b）在压力和温度条件下通过使具有路易斯酸度的气体与具有路易斯碱性的反应性液体或具有路易斯碱性的气体与具有路易斯酸度的反应性液体接触而形成的可逆反应状态的气液络合物; （c）保持并分散其中的反应性液体和气体液体络合物的非反应性芯吸介质。

27. 发明授权

US07563308B2 Ionic liquid based mixtures for gas storage and delivery 失效
标题翻译：用于气体储存和输送的离子液体基混合物
公开(公告)号：US07563308B2
公开(公告)日：2009-07-21
申请号：US11208723
申请日：2005-08-23
申请人： Daniel Joseph Tempel , Philip Bruce Henderson , Jeffrey Richard Brzozowski , Ronald Martin Pearlstein , Diwakar Garg
发明人： Daniel Joseph Tempel , Philip Bruce Henderson , Jeffrey Richard Brzozowski , Ronald Martin Pearlstein , Diwakar Garg
IPC分类号： B01D19/00 , F17C11/00
CPC分类号： C01B3/001 , C01B9/08 , C01B13/0285 , C01B25/06 , C01B32/80 , F17C11/00 , F17C11/005 , F17C11/007 , Y02E60/321 , Y02E60/324
摘要： A mixture and method for the storage and delivery of a gas are disclosed herein. In one aspect, there is provided a mixture comprising: an ionic liquid comprising an anion and a cation, at least a portion of the gas that is disposed within and reversibly chemically reacted with the ionic liquid, and optionally an unreacted gas. In another aspect, there is provided a method for delivering a gas from a mixture comprising an ionic liquid and one or more gases comprising: reacting at least a portion of the gas with the ionic liquid to provide the mixture comprising a chemically reacted gas and an ionic liquid and separating the chemically reacted gas from the mixture wherein the chemically reacted gas after the separating step has substantially the same chemical identity as the chemically reacted gas prior to the reacting step.
摘要翻译：本文公开了用于储存和输送气体的混合物和方法。在一个方面，提供了一种混合物，其包含：包含阴离子和阳离子的离子液体，所述气体的至少一部分设置在离子液体内并可逆地与离子液体化学反应，以及任选的未反应气体。在另一方面，提供了一种从包含离子液体和一种或多种气体的混合物输送气体的方法，包括：使至少一部分气体与离子液体反应，以提供包含化学反应气体和离子液体并且从混合物中分离化学反应的气体，其中分离步骤之后的化学反应气体在反应步骤之前具有与化学反应气体基本上相同的化学同一性。

28. 发明授权

US07160359B2 Built in purifier for reactive gases 有权
标题翻译：内置反应气体净化器
公开(公告)号：US07160359B2
公开(公告)日：2007-01-09
申请号：US10884824
申请日：2004-07-02
申请人： Jean Louise Vincent , Ronald Martin Pearlstein , Kerry Renard Berger , Anthony John Lachawiec, Jr.
发明人： Jean Louise Vincent , Ronald Martin Pearlstein , Kerry Renard Berger , Anthony John Lachawiec, Jr.
IPC分类号： B01D35/02 , F17C13/00
CPC分类号： B01D35/02 , B01D46/0036 , B01D46/4272 , B01D2275/40
摘要： The present invention is an apparatus for containing and dispensing a high purity fluid comprising an outer vessel capable of containing a quantity of high purity fluid in its interior; an outlet associated with the outer vessel for dispensing the high purity fluid; a valve capable of controlling high purity fluid flow out of the outer vessel through the outlet; an inner vessel at least partly situated in the outer vessel and communicating with the outlet and an inlet which communicates with the interior of the outer vessel; a purification media contained within the inner vessel for purifying the high purity fluid of undesired components; and fluid flow control device which prevents high purity fluid from flowing from the inner vessel to the interior of the outer vessel.
摘要翻译：本发明是用于容纳和分配高纯度流体的装置，其包括能够在其内部容纳一定量的高纯度流体的外部容器; 与用于分配高纯度流体的外部容器相关联的出口; 能够通过出口控制高纯度流体流出外容器的阀; 至少部分地位于所述外部容器中并与所述出口连通的内部容器和与所述外部容器的内部连通的入口; 内部容器中的净化介质，用于净化不期望的组分的高纯度流体; 以及流体流动控制装置，其防止高纯度流体从内部容器流动到外部容器的内部。

29. 发明授权

US06277342B1 Storage and safe delivery of hazardous specialty gases by acid/base reactions with ionic polymers 有权
标题翻译：通过酸性/碱性反应与离子聚合物保存和安全运送有害特种气体
公开(公告)号：US06277342B1
公开(公告)日：2001-08-21
申请号：US09379007
申请日：1999-08-23
申请人： Ronald Martin Pearlstein , Steven Arthur Rogers
发明人： Ronald Martin Pearlstein , Steven Arthur Rogers
IPC分类号： F17C500
CPC分类号： B01J20/261 , B01J20/26 , C01B6/34 , F17C11/00
摘要： A method for delivering a gas having a proton affinity of less than 866 kJ/mol is disclosed. A support including at least one polymer sufficiently acidic to protonate the gas is contacted with the gas to protonate the gas. The protonated gas condenses to form a solid salt which is sorbed by the support. The gas is dispensed by deprotonating the sorbed solid salt to regenerate said gas. The at least one polymer of the support has a first Hammett acidity value greater than a second Hammett acidity value of a conjugate acid of the gas. Also provided is an apparatus for performing the method. The invention is especially useful for storing, transporting and delivering hazardous gases, such as arsine and phosphine. The polymer can be polymeric sulfonic acids, polymeric perfluoroalkylsulfonic acids, fluorinated sulfonic acid polymers, cross-linked sulfonated polystyrene-divinylbenzene macroreticular copolymers, carboxylic acid polymers, halogenated carboxylic acid functionalized polymers and mixtures thereof.
摘要翻译：公开了一种递送具有小于866kJ / mol的质子亲和力的气体的方法。包含至少一种足够酸性以质子化气体的载体的载体与气体接触以质子化气体。质子化气体冷凝形成由载体吸附的固体盐。通过使吸附的固体盐去质子化再生气体来分配气体。载体的至少一种聚合物具有大于气体的共轭酸的第二哈米特酸值的第一哈米特酸度值。还提供了一种用于执行该方法的装置。本发明特别适用于储存，运输和输送有害气体，如胂和磷化氢。聚合物可以是聚合磺酸，聚合全氟烷基磺酸，氟化磺酸聚合物，交联磺化聚苯乙烯 - 二乙烯基苯网大网络共聚物，羧酸聚合物，卤代羧酸官能化聚合物及其混合物。

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