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    • 25. 发明授权
    • Phase-changeable devices having an insulating buffer layer and methods of fabricating the same
    • 具有绝缘缓冲层的相变装置及其制造方法
    • US06841793B2
    • 2005-01-11
    • US10620830
    • 2003-07-16
    • Se-Ho Lee
    • Se-Ho Lee
    • H01L27/10G11C16/02H01L27/115H01L27/24H01L45/00H01L47/00
    • G11C13/0004H01L27/2436H01L45/06H01L45/1233H01L45/126H01L45/144H01L45/1666
    • Phase-changeable devices and method of fabricating phase-changeable devices are provided. The phase-changeable devices have a first insulating layer disposed on a first electrode. A heater plug extends through the first insulating layer and contacts the first electrode. A buffer insulating layer region is disposed on the first insulating layer opposite the first electrode and a phase-changeable material region is disposed on the buffer insulating layer region. The phase-changeable material region may extend into the buffer insulating layer region. The phase-changeable material region contacts a surface of the heater plug. A second electrode disposed on the phase-changeable material region. Spacers may be provided on sidewalls of the buffer insulating layer region between the phase-changeable material region and the buffer insulating layer region. The buffer insulating layer region may have a thermal expansion coefficient between the thermal expansion coefficients of the first insulating layer and the phase-changeable material region.
    • 提供了相变装置和制造相变装置的方法。 相变装置具有设置在第一电极上的第一绝缘层。 加热器插头延伸穿过第一绝缘层并接触第一电极。 缓冲绝缘层区域设置在与第一电极相对的第一绝缘层上,相变材料区域设置在缓冲绝缘层区域上。 相变材料区域可以延伸到缓冲绝缘层区域中。 相变材料区域接触加热器插头的表面。 设置在相变材料区域上的第二电极。 间隔件可以设置在相变材料区域和缓冲绝缘层区域之间的缓冲绝缘层区域的侧壁上。 缓冲绝缘层区域可以具有在第一绝缘层和相变材料区域的热膨胀系数之间的热膨胀系数。