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    • 21. 发明授权
    • Method for fabricating polysilicon liquid crystal display device
    • 制造多晶硅液晶显示装置的方法
    • US07790582B2
    • 2010-09-07
    • US11798474
    • 2007-05-14
    • Kum-Mi Oh
    • Kum-Mi Oh
    • H01L21/02
    • H01L29/66757H01L29/66765
    • A method for fabricating a polysilicon liquid crystal display device includes: forming a first amorphous silicon layer on a substrate; forming a photoresist pattern on the first amorphous silicon layer; forming a second amorphous silicon layer over the photoresist pattern and the first amorphous silicon layer; defining a channel region on the first amorphous silicon layer; crystallizing the first and second silicon layers; forming an active layer by patterning the crystallized silicon layers; forming a first insulating layer on the active layer; forming a gate electrode on the first insulating layer; forming source and drain electrodes electrically connected to the active layer; and forming a pixel electrode electrically connected to the drain electrode.
    • 一种制造多晶硅液晶显示装置的方法,包括:在基板上形成第一非晶硅层; 在所述第一非晶硅层上形成光致抗蚀剂图案; 在所述光致抗蚀剂图案和所述第一非晶硅层上形成第二非晶硅层; 限定所述第一非晶硅层上的沟道区; 使第一和第二硅层结晶; 通过图案化结晶的硅层形成有源层; 在所述有源层上形成第一绝缘层; 在所述第一绝缘层上形成栅电极; 形成与所述有源层电连接的源极和漏极; 以及形成与漏电极电连接的像素电极。
    • 22. 发明授权
    • Liquid crystal display device including driving circuit and method of fabricating the same
    • 包括驱动电路的液晶显示装置及其制造方法
    • US07488979B2
    • 2009-02-10
    • US12010873
    • 2008-01-30
    • Kum-Mi OhKwang-Sik Hwang
    • Kum-Mi OhKwang-Sik Hwang
    • H01L29/04
    • G02F1/13454H01L27/1255H01L27/1288H01L29/78621Y10S148/15
    • A method of fabricating an array substrate structure for a liquid crystal display device includes defining a display area and a non-display area on a substrate, the display area having a pixel TFT portion and a pixel electrode area, and the non-display area having an n-type driving TFT portion and a p-type driving TFT portion; forming a first gate electrode in the display area, a second and a third gate electrodes and a first capacitor electrode in the non-display area; an amorphous silicon layer on the substrate; crystallizing the amorphous silicon layer to a polycrystalline silicon layer and doping specific portions of the polycrystalline silicon layer with plurality of impurity concentrations; and forming a first semiconductor layer in the display area, a second and a third semiconductor layers and a second capacitor electrode in the non-display area.
    • 制造液晶显示装置的阵列基板结构的方法包括在基板上限定显示区域和非显示区域,所述显示区域具有像素TFT部分和像素电极区域,并且所述非显示区域具有 n型驱动TFT部分和p型驱动TFT部分; 在显示区域中形成第一栅电极,在非显示区域中形成第二和第三栅电极和第一电容器电极; 衬底上的非晶硅层; 将所述非晶硅层结晶到多晶硅层并掺杂多晶杂质浓度的所述多晶硅层的特定部分; 以及在所述显示区域中形成第一半导体层,在所述非显示区域中形成第二和第三半导体层和第二电容器电极。
    • 23. 发明授权
    • Method for fabricating thin film transistor of liquid crystal display device
    • 制造液晶显示装置薄膜晶体管的方法
    • US07410842B2
    • 2008-08-12
    • US11211212
    • 2005-08-19
    • Kum-Mi Oh
    • Kum-Mi Oh
    • H01L21/70
    • H01L27/1288H01L27/1214H01L29/78621
    • A method for fabricating a thin film transistor for an LCD device is presented that uses six mask processes. Portions of a semiconductor layer formed on a substrate are doped with first and second impurities in different regions. A conductive layer is deposited and the conductive and semiconductor layers patterned together by diffraction exposure using a diffraction pattern mask to define source and drain regions and an activate region. Ashing is performed and portions of the conductive layer removed to form the source, drain and channel. A gate insulating layer is formed on the substrate and gates are formed on the gate insulating layer. A passivation film is formed on the substrate and a pixel contact hole exposing one of the drains is etched. A pixel electrode is then deposited such that the pixel electrode is connected to the drain through the pixel contact hole.
    • 提出了一种用于制造用于LCD装置的薄膜晶体管的方法,其使用六个掩模工艺。 在基板上形成的半导体层的部分在不同的区域掺杂有第一和第二杂质。 沉积导电层,并且使用衍射图案掩模通过衍射曝光将导电和半导体层图案化在一起,以限定源极和漏极区域以及激活区​​域。 执行灰化并去除导电层的部分以形成源极,漏极和沟道。 在基板上形成栅极绝缘层,在栅极绝缘层上形成栅极。 在衬底上形成钝化膜,并且蚀刻暴露其中一个漏极的像素接触孔。 然后沉积像素电极,使得像素电极通过像素接触孔连接到漏极。
    • 24. 发明申请
    • Method for fabricating polysilicon liquid crystal display device
    • 制造多晶硅液晶显示装置的方法
    • US20070218576A1
    • 2007-09-20
    • US11798474
    • 2007-05-14
    • Kum-Mi Oh
    • Kum-Mi Oh
    • H01L21/02
    • H01L29/66757H01L29/66765
    • A method for fabricating a polysilicon liquid crystal display device includes: forming a first amorphous silicon layer on a substrate; forming a photoresist pattern on the first amorphous silicon layer; forming a second amorphous silicon layer over the photoresist pattern and the first amorphous silicon layer; defining a channel region on the first amorphous silicon layer; crystallizing the first and second silicon layers; forming an active layer by patterning the crystallized silicon layers; forming a first insulating layer on the active layer; forming a gate electrode on the first insulating layer; forming source and drain electrodes electrically connected to the active layer; and forming a pixel electrode electrically connected to the drain electrode.
    • 一种制造多晶硅液晶显示装置的方法,包括:在基板上形成第一非晶硅层; 在所述第一非晶硅层上形成光致抗蚀剂图案; 在所述光致抗蚀剂图案和所述第一非晶硅层上形成第二非晶硅层; 限定所述第一非晶硅层上的沟道区; 使第一和第二硅层结晶; 通过图案化结晶的硅层形成有源层; 在所述有源层上形成第一绝缘层; 在所述第一绝缘层上形成栅电极; 形成与所述有源层电连接的源极和漏极; 以及形成与漏电极电连接的像素电极。