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    • 22. 发明申请
    • ANISOTROPIC CONDUCTIVE CONNECTOR AND INSPECTION EQUIPMENT OF CIRCUIT DEVICE
    • 各向异性导电连接器和电路设备检查设备
    • US20090230975A1
    • 2009-09-17
    • US12089608
    • 2006-09-28
    • Daisuke YamadaKiyoshi KimuraFujio Hara
    • Daisuke YamadaKiyoshi KimuraFujio Hara
    • G01R31/28H01R4/58
    • H01R12/714G01R1/0735G01R3/00H01R12/7076H01R12/7082H01R13/2414
    • Disclosed are an anisotropically conductive connector device, by which a good electrically connected state can be surely achieved even when the pitch of electrodes to be inspected is extremely small, and the good electrically connected state is stably retained even when used under a high-temperature environment, and an inspection apparatus for circuit devices, having this anisotropically conductive connector device. This anisotropically conductive connector device has an elastic anisotropically conductive film, in which a plurality of conductive path-forming parts each extending in a thickness-wise direction of the film are arranged mutually insulated by an insulating part, and a sheet-like connector composed of an insulating sheet, in which a plurality of through-holes each extending in a thickness-wise direction have been formed, and a plurality of electrode structures arranged in the respective through-holes in the insulating sheet so as to protrude from both surfaces of the insulating sheet. Each of the electrode structures is positioned on each of the conductive path-forming parts, the insulating sheet is integrally fixed to the insulating part, and each of the electrode structures is obtained by forming electrode parts having a diameter greater than the diameter of the through-hole on both ends of a body part inserted into the through-hole in the insulating sheet and is movable in the thickness-wise direction of the sheet.
    • 公开了一种各向异性导电连接器装置,即使当被检查的电极的间距极小时,也可以确实获得良好的电连接状态,并且即使在高温环境下使用也能够稳定地保持良好的电连接状态 以及具有该各向异性导电连接器装置的电路装置检查装置。 该各向异性导电连接器装置具有弹性各向异性导电膜,其中沿着膜的厚度方向延伸的多个导电路径形成部分由绝缘部分相互绝缘地布置,并且片状连接器由 绝缘片,其中已经形成有沿厚度方向延伸的多个通孔,以及布置在绝缘片中的各个通孔中的多个电极结构,以便从所述绝缘片的两个表面突出 绝缘片。 每个电极结构位于每个导电路径形成部分上,绝缘片一体地固定到绝缘部分,并且每个电极结构通过形成直径大于直通直径的直径的电极部分而获得 - 在插入绝缘片中的通孔中的主体部分的两端上,并且能够在片材的厚度方向上移动。
    • 23. 发明授权
    • Circuit board apparatus for wafer inspection, probe card, and wafer inspection apparatus
    • 用于晶片检查的电路板装置,探针卡和晶片检查装置
    • US07821283B2
    • 2010-10-26
    • US12158499
    • 2006-12-20
    • Daisuke YamadaKiyoshi KimuraFujio Hara
    • Daisuke YamadaKiyoshi KimuraFujio Hara
    • G01R31/26
    • G01R1/07378G01R3/00G01R31/2889H01R13/2414H01R2201/20
    • Disclosed herein are a circuit board device for wafer inspection having high connection reliability, and a probe card and a wafer inspection apparatus, which are equipped with this circuit board device for wafer inspection. The circuit board device for wafer inspection has a board body and a connector device provided on the board body and obtained by stacking a plurality of connector units on each other, wherein each of the connector units has a first anisotropically conductive elastomer sheet, a composite conductive sheet, a second anisotropically conductive elastomer sheet and a pitch converting board, the composite conductive sheet has an insulating sheet, in which a plurality of through-holes have been formed, and rigid conductors respectively arranged into the through-holes in this insulating sheet so as to protrude from both surfaces of the insulating sheet, and in each of the rigid conductors, terminal portions having a diameter greater than the diameter of the through-hole are formed on both ends of a body portion inserted into the through-hole in the insulating sheet in order for the conductor to be provided movably in the thickness-wise direction of the insulating sheet.
    • 这里公开了一种具有高连接可靠性的晶片检查用电路板装置,以及配备有用于晶片检查的电路板装置的探针卡和晶片检查装置。 用于晶片检查的电路板装置具有板本体和设置在板体上并通过彼此堆叠多个连接器单元而获得的连接器装置,其中每个连接器单元具有第一各向异性导电弹性体片,复合导电 片材,第二各向异性导电弹性体片材和沥青转化板,复合导电片材具有形成有多个通孔的绝缘片和分别布置在该绝缘片中的通孔中的刚性导体 从绝缘片的两个表面突出,并且在每个刚性导体中,直径大于通孔直径的端子部分形成在插入通孔中的主体部分的两端 绝缘片,以使导体沿绝缘片的厚度方向可移动地设置。
    • 24. 发明申请
    • WAFER INSPECTING SHEET-LIKE PROBE AND APPLICATION THEREOF
    • WAFER检查样片探针及其应用
    • US20090072844A1
    • 2009-03-19
    • US11914758
    • 2006-05-19
    • Kiyoshi KimuraFujio HaraDaisuke Yamada
    • Kiyoshi KimuraFujio HaraDaisuke Yamada
    • G01R1/067
    • G01R1/0735G01R1/06711G01R3/00
    • Disclosed herein are a sheet-like probe for wafer inspection, by which a good electrically connected state to a wafer can be surely achieved even when the pitch of electrodes to be inspected in the wafer is extremely small, and applications thereof.The sheet-like probe for wafer inspection of the invention has an insulating sheet, in which a plurality of through-holes each extending in a thickness-wise direction of the insulating sheet have been formed in accordance with a pattern corresponding to a pattern of electrodes to be inspected in all or part of integrated circuits formed on a wafer, and electrode structures arranged in the respective through-holes in the insulating sheet so as to protrude from both surfaces of the insulating sheet. Each of the electrode structures is formed by linking a front-surface electrode part exposed to a front surface of the insulating sheet and having a diameter greater than a front surface-side opening diameter of the through-hole in the insulating sheet to a back-surface electrode part exposed to a back surface of the insulating sheet and having a diameter greater than a back surface-side opening diameter of the through-hole in the insulating sheet through a short circuit part inserted through into the through-hole in the insulating sheet, and is movable in the thickness-wise direction of the insulating sheet.
    • 这里公开了用于晶片检查的片状探针,即使在晶片中要检查的电极的间距非常小时,也可以确实地获得与晶片的良好的电连接状态及其应用。 本发明的晶片检查用片状探针具有绝缘片,其中沿着绝缘片的厚度方向延伸的多个通孔根据与电极图案对应的图案形成 被检查在晶片上形成的集成电路的全部或一部分中,以及布置在绝缘片中的相应通孔中的电极结构,从绝缘片的两个表面突出。 每个电极结构通过将暴露于绝缘片的前表面并且具有大于绝缘片中的通孔的前表面侧开口直径的直径的前表面电极部分连接到背面电极, 表面电极部分暴露于绝缘片的背面并且具有大于绝缘片中的通孔的背表面侧开口直径的直径,该短路部分插入到绝缘片中的通孔中 并且能够在绝缘片的厚度方向上移动。
    • 25. 发明申请
    • Anisotropic conductive sheet and its manufacturing method, adaptor device and its manufacturing method, and circuit device electric test instrument
    • 各向异性导电片及其制造方法,适配器及其制造方法,电路装置电测试仪
    • US20060134378A1
    • 2006-06-22
    • US10544301
    • 2004-04-14
    • Kiyoshi KimuraFujio Hara
    • Kiyoshi KimuraFujio Hara
    • B32B3/10
    • G01R1/0735G01R1/06711G01R1/06755G01R3/00H01R43/007Y10T428/24322
    • Disclosed herein are an anisotropically conductive sheet, by which necessary electrical connection to respective electrodes to be connected can be surely achieved irrespective of the arrangement pattern of such electrodes, and necessary electrical connection to respective electrodes to be connected can be surely achieved even when the electrodes to be connected are arranged at a minute pitch and a high density, and which can be produced at low cost and, production process thereof, adaptor device and production process thereof, and an electrical inspection apparatus for circuit devices, which is equipped with any of them. The anisotropically conductive sheet of the invention is obtained by subjecting a conductive elastomer layer supported on a releasable supporting plate to laser beam machining, thereby forming conductive path-forming parts arranged in accordance with the specific pattern on the releasable supporting plate, forming a material layer for insulating part composed of a material, which will become an elastic polymeric substance by being cured, between the conductive path-forming parts and subjecting the material layer to a curing treatment, thereby forming an insulating part.
    • 这里公开了各向异性导电片,通过该片可以可靠地实现与要连接的各个电极的必要的电连接,而不管这种电极的布置图案如何,并且即使当电极 连接的布置以分钟间距和高密度布置,并且可以以低成本制造,并且其制造工艺,适配器装置及其制造方法以及电路装置的电气检查装置,其具有任何 他们。 本发明的各向异性导电片是通过对支撑在可剥离的支撑板上的导电弹性体层进行激光加工而形成的导电路径形成部件,根据特定图案而布置在可释放支撑板上,形成材料层 在导电路径形成部件和材料层进行固化处理之间,通过固化而成为弹性聚合物质的材料的绝缘部分,从而形成绝缘部分。
    • 26. 发明授权
    • Anisotropically conductive connector and anisotropically conductive connector device
    • 各向异性导电连接器和各向异性导电连接器装置
    • US08124885B2
    • 2012-02-28
    • US12296530
    • 2007-03-30
    • Daisuke YamadaKiyoshi Kimura
    • Daisuke YamadaKiyoshi Kimura
    • H01R12/71G01R31/02H01R4/58
    • H01R12/7082G01R1/0416H01R13/2414H01R43/007
    • An anisotropically conductive connector and an anisotropically conductive connector device. The anisotropically conductive connector includes a supporting member, a plurality of through-holes each extending in a thickness-wise direction of the supporting member, and anisotropically conductive sheets respectively held in the through-holes of the supporting member. Each anisotropically conductive sheet includes a frame plate, a plurality of through-holes each extending in a thickness-wise direction of the frame plate, and a plurality of anisotropically conductive elements arranged in the respective through-holes of the frame plate. Each of the anisotropically conductive elements includes a conductive part, conductive particles contained in an elastic polymeric substance in a state oriented so as to align in a thickness-wise direction of the element, and an insulating part to cover the outer periphery of the conductive part and including an elastic polymeric substance.
    • 各向异性导电连接器和各向异性导电连接器装置。 各向异性导电连接器包括支撑构件,沿支撑构件的厚度方向延伸的多个通孔以及分别保持在支撑构件的通孔中的各向异性导电片。 每个各向异性导电片包括框架板,沿着框架板的厚度方向延伸的多个通孔和布置在框架板的各个通孔中的多个各向异性导电元件。 每个各向异性导电元件包括​​导电部分,包含在弹性聚合物质中的导电颗粒处于以元件的厚度方向取向的状态和绝缘部分,以覆盖导电部分的外周 并且包括弹性聚合物质。
    • 27. 发明申请
    • ANISOTROPICALLY CONDUCTIVE CONNECTOR AND ANISOTROPICALLY CONDUCTIVE CONNECTOR DEVICE
    • 各向异性导电连接器和非均匀导电连接器装置
    • US20090159325A1
    • 2009-06-25
    • US12296530
    • 2007-03-30
    • Daisuke YamadaKiyoshi Kimura
    • Daisuke YamadaKiyoshi Kimura
    • H01R12/04
    • H01R12/7082G01R1/0416H01R13/2414H01R43/007
    • An anisotropically conductive connector and an anisotropically conductive connector device. The anisotropically conductive connector includes a supporting member, a plurality of through-holes each extending in a thickness-wise direction of the supporting member, and anisotropically conductive sheets respectively held in the through-holes of the supporting member. Each anisotropically conductive sheet includes a frame plate, a plurality of through-holes each extending in a thickness-wise direction of the frame plate, and a plurality of anisotropically conductive elements arranged in the respective through-holes of the frame plate. Each of the anisotropically conductive elements includes a conductive part, conductive particles contained in an elastic polymeric substance in a state oriented so as to align in a thickness-wise direction of the element, and an insulating part to cover the outer periphery of the conductive part and including an elastic polymeric substance.
    • 各向异性导电连接器和各向异性导电连接器装置。 各向异性导电连接器包括支撑构件,沿支撑构件的厚度方向延伸的多个通孔以及分别保持在支撑构件的通孔中的各向异性导电片。 每个各向异性导电片包括框架板,沿着框架板的厚度方向延伸的多个通孔和布置在框架板的各个通孔中的多个各向异性导电元件。 每个各向异性导电元件包括​​导电部分,包含在弹性聚合物质中的导电颗粒处于以元件的厚度方向取向的状态和绝缘部分,以覆盖导电部分的外周 并且包括弹性聚合物质。
    • 28. 发明申请
    • Shift range change apparatus
    • 换档范围更换装置
    • US20090000411A1
    • 2009-01-01
    • US12213827
    • 2008-06-25
    • Seiji NakayamaKiyoshi KimuraTaku Itoh
    • Seiji NakayamaKiyoshi KimuraTaku Itoh
    • F16H61/00B60W10/10
    • F16H63/3466F16H59/66F16H2061/326Y10T74/19251Y10T74/2003Y10T74/20085Y10T477/647
    • A shift range change mechanism changes a shift range of an automatic transmission of a vehicle. A parking change mechanism disables rotation of a drive axle of the vehicle by engaging a park pole supported by a stationary member against a parking gear, which is rotated synchronously with the drive axle of the vehicle, at time of setting the shift range to parking. The parking change mechanism enables the rotation of the drive axle by disengaging the park pole from the parking gear at time of parking release of the shift range. An electric rotatable actuator drives the shift range change mechanism and the parking change mechanism. An SBW ECU controls power supply to an electric motor of the rotatable actuator. The SBW ECU increases an output torque of the electric motor only at the time of the parking release.
    • 变速范围变更机构改变车辆的自动变速器的变速范围。 停车改变机构通过将固定部件支撑的停放杆与在车辆的变速范围设定为停车时相对于与车辆的驱动轴同步旋转的驻车档杆而使车辆的驱动轴旋转。 停车变更机构能够通过在停车释放变速范围的时候将驻车杆与驻车档分离,来驱动驱动轴的旋转。 电动可旋转致动器驱动变速范围变更机构和停车变更机构。 SBW ECU控制对可旋转致动器的电动机的电力供应。 SBW ECU仅在停车释放时增加电动机的输出转矩。