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    • 25. 发明申请
    • IMPRINT APPARATUS
    • US20100098799A1
    • 2010-04-22
    • US12582732
    • 2009-10-21
    • Miho SasakiMasahiko OginoAkihiro MiyauchiNoritake ShizawaKyoichi Mori
    • Miho SasakiMasahiko OginoAkihiro MiyauchiNoritake ShizawaKyoichi Mori
    • B29C59/16B29C59/02
    • B29C59/022B29C2035/0827B29C2059/023
    • An imprint apparatus has a head unit with a fine structure. The head unit includes a fine imprint pattern layer including fine concavities and convexities, a resin layer on a face of the fine imprint pattern layer opposite to a face where the concavities and convexities are formed, a first pressurizing base member on a face of the resin layer opposite to a face contacting the fine imprint pattern layer, and a second pressurizing base member on a face of the first pressurizing base member opposite to a face contacting the resin layer. The resin layer has a modulus of elasticity smaller than that of the fine imprint pattern layer, and the first pressurizing base member has a modulus of elasticity smaller than that of the resin layer. A light source or a heat source may be further provided. The head unit may be light permeable. A replacement layer may be further provided for replacement.
    • 压印装置具有精细结构的头单元。 头单元包括精细的凹凸图案,在与形成凹凸面的面相反的微细图案层的表面上的树脂层,树脂的表面上的第一加压基材 在与第一加压基体的与接触树脂层的面相反的表面上的第二加压基底部件与接触精细压印图案层的面相反。 树脂层的弹性模量小于精细印刷图案层的弹性模量,第一加压基材的弹性模量小于树脂层的弹性模量。 可以进一步提供光源或热源。 头单元可以是透光的。 还可以提供更换层以进行更换。
    • 27. 发明申请
    • Imprint device and microstructure transfer method
    • 压印装置和微结构转印方法
    • US20060286193A1
    • 2006-12-21
    • US11438336
    • 2006-05-23
    • Takashi AndoSusumu KomoriyaMasahiko OginoChiseki HaginoyaAkihiro Miyauchi
    • Takashi AndoSusumu KomoriyaMasahiko OginoChiseki HaginoyaAkihiro Miyauchi
    • B28B11/08
    • G03F7/0002B82Y10/00B82Y40/00G03F9/703G03F9/7088
    • In an imprint device and a microstructure transfer method, a fluid is ejected at the back of at least either a stamper or a transfer target body during pressurization of the stamper and the transfer target body. The fluid is ejected through plural holes formed in a stage disposed at the back of at least either the stamper or the transfer target body. The plural holes are connected to independent pressure regulating mechanisms, which can individually control the amount of fluid ejection, the timing of start of ejection, and so on. When the stamper is peeled from the transfer target body, the plural holes are evacuated to fix the stamper or the transfer target body to the stage by suction so as to peel the stamper. The present invention enables to apply uniform pressure to the stamper against the surface of the target substrate, to control the in-plane pressure distribution according to the surface profile or external appearance of the stamper or the target substrate, and to peel the stamper from the target substrate immediately after pressurization.
    • 在压印装置和微结构转印方法中,在压模和转印体的加压期间,在至少压模或转印体的至少一个的背面喷射流体。 流体通过形成在设置在压模或转印体中的至少一个的背面的台中的多个孔喷出。 多个孔连接到独立的压力调节机构,其可以单独控制流体喷射的量,喷射开始的时间等。 当压模从转印体上剥离时,将多个孔抽真空,通过抽吸将压模或转印目标体固定在平台上,从而剥离压模。 本发明能够对压模施加均匀的压力以抵抗目标基板的表面,以根据压模或目标基板的表面轮廓或外观来控制平面内的压力分布,并且将压模从 加压后立即进行目标基材。