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    • 27. 发明授权
    • Film forming device, film forming method, and method for manufacturing electronic appliance
    • 成膜装置,成膜方法和电子设备的制造方法
    • US07488054B2
    • 2009-02-10
    • US11335460
    • 2006-01-20
    • Katsuyuki MoriiKenji Sakamoto
    • Katsuyuki MoriiKenji Sakamoto
    • B41J2/135
    • H01L51/0005H01L21/6715H01L51/0068H01L51/0081
    • A film forming device includes: a first discharge unit for discharging a first liquid material, in which a film forming material is dissolved in a solvent or dispersed in a dispersion medium; a second discharge unit for discharging a second liquid material containing a liquid with the same component as the solvent or the dispersion medium; and a removal unit for removing the solvent or the dispersion medium from droplets of the first liquid material arranged on a substrate by the first discharge unit, while removing the liquid, arranged on the substrate by the second discharge unit, from droplets of the second liquid material; wherein a film is formed on the substrate, by arranging the droplets of the first liquid material on first parts on the substrate by the first discharge unit, while arranging the droplets of the second liquid material on second parts on the substrate, which are separated from the first parts, by the second discharge unit, thereafter by removing the solvent from the droplets of the first liquid material arranged on the first parts, using the removal unit for solvent removing.
    • 一种成膜装置,包括:第一排出单元,用于排出其中成膜材料溶解在溶剂中或分散在分散介质中的第一液体材料; 第二排出单元,用于排出含有与溶剂或分散介质相同成分的液体的第二液体材料; 以及去除单元,用于通过第一排出单元从配置在基板上的第一液体材料的液滴中除去溶剂或分散介质,同时通过第二排出单元从第二排出单元排出在液体上的液体, 材料; 其特征在于,在所述基板上形成膜,所述第一液体材料的液滴通过所述第一排出单元在所述基板上的第一部件上排列,同时将所述第二液体材料的液滴排列在所述基板上的第二部分上, 第一部分通过第二排出单元,然后使用去除溶剂的除去单元从布置在第一部分上的第一液体材料的液滴中除去溶剂。