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    • 24. 发明申请
    • METHOD OF FORMING A FINE PATTERN OF A SEMICONUCTOR DEVICE USING A DOUBLE PATTERNING TECHNIQUE
    • 使用双重绘图技术形成半导体器件的精细图案的方法
    • US20100151655A1
    • 2010-06-17
    • US12485970
    • 2009-06-17
    • Yong-il KIMHyeong-sun HONGMakoto YOSHIDABong-soo KIM
    • Yong-il KIMHyeong-sun HONGMakoto YOSHIDABong-soo KIM
    • H01L21/762
    • H01L21/76229
    • A method of forming a fine pattern of a semiconductor device uses a double patterning technique. A first mask pattern is formed on a first hard mask layer disposed on a substrate. A conformal buffer layer is formed over the first mask pattern. A second mask pattern is formed such that segments of the buffer layer are interposed between the first and second mask patterns, and each topographical feature of the second mask pattern is disposed between two adjacent ones of each respective pair of topographical features of the first mask pattern. A first hard mask pattern is formed by etching the first hard mask layer using the first mask pattern, the second mask pattern, and/or the buffer layer as an etch mask. A trench is formed by etching the substrate using the first hard mask pattern as an etch mask. An isolation layer, of a material that is different from that of first hard mask pattern, is formed in the trench.
    • 形成半导体器件的精细图案的方法使用双重图案化技术。 在设置在基板上的第一硬掩模层上形成第一掩模图案。 在第一掩模图案之上形成共形缓冲层。 形成第二掩模图案,使得缓冲层的段插入在第一和第二掩模图案之间,并且第二掩模图案的每个形貌特征被布置在第一掩模图案的每个相应的一对地形特征中的两个相邻的特征之间 。 通过使用第一掩模图案,第二掩模图案和/或缓冲层作为蚀刻掩模蚀刻第一硬掩模层来形成第一硬掩模图案。 通过使用第一硬掩模图案作为蚀刻掩模蚀刻衬底来形成沟槽。 在沟槽中形成与第一硬掩模图案不同的材料的隔离层。
    • 25. 发明申请
    • BURNER FOR FABRICATING OPTICAL FIBER PREFORM
    • 燃烧器制造光纤预制件
    • US20090214998A1
    • 2009-08-27
    • US12395061
    • 2009-02-27
    • Makoto YOSHIDA
    • Makoto YOSHIDA
    • C03B37/012C03B37/018F23D14/46F23D14/62
    • C03B37/0142C03B2207/06C03B2207/08C03B2207/12C03B2207/14C03B2207/20C03B2207/22Y02P40/57
    • A burner for fabricating an optical fiber preform, which can suppress the adhesion and deposition of glass particles to the front end of the burner without enlarging the burner diameter, is provided. The burner has a first tube, a second tube and a third tube coaxially arranged and define a glass raw material gas port, a sealing gas port, and a burnable gas port by the front end portions thereof, and a plurality of small diameter nozzles arranged between the second tube and the third tube, each of the nozzles arranged on a concentric circle relative to the glass raw material gas port and defines a combustion assisting gas port by the front end portion thereof, the front end portion of the second tube protrudes ahead of that of the first tube, and the front end portion of the third tube protrudes ahead of those of the second tube and each of the nozzles.
    • 提供一种用于制造光纤预制件的燃烧器,其可以抑制玻璃颗粒在燃烧器前端的粘附和沉积而不增加燃烧器直径。 燃烧器具有第一管,第二管和第三管,其同轴地布置并且通过其前端部分限定玻璃原料气体口,密封气体口和可燃气体口,并且布置有多个小直径喷嘴 在第二管和第三管之间,每个喷嘴相对于玻璃原料气体口布置在同心圆上,并且通过其前端部分限定燃烧辅助气体端口,第二管的前端部分向前突出 并且第三管的前端部突出于第二管和每个喷嘴的前端部。
    • 28. 发明申请
    • METHOD FOR MANUFACTURING OPTICAL FIBER BASE MATERIAL
    • 制造光纤基材的方法
    • US20100223959A1
    • 2010-09-09
    • US12715334
    • 2010-03-01
    • Makoto YOSHIDA
    • Makoto YOSHIDA
    • C03B37/023
    • C03B37/0142C03B2207/06C03B2207/12C03B2207/20C03B2207/36Y02P40/57
    • A method for manufacturing an optical fiber base material includes producing glass fine particles through a hydrolysis of a glass material gas in a flame created by an oxidizing gas and a combustible gas. The method uses a burner including: a central gas discharge port that ejects a gas containing an oxidizing gas; a plurality of small-diameter gas discharge ports that are arranged in a concentric circle with the central gas discharge port so as to externally surround the central gas discharge port, where the plurality of small-diameter gas discharge ports eject a gas containing an oxidizing gas; a combustible gas discharge port that is concentrically arranged with the central gas discharge port so as to externally surround the central gas discharge port, where the combustible gas discharge port has the plurality of small-diameter gas discharge port arranged therein and the combustible gas discharge port ejects a combustible gas; and an oxidizing gas discharge port that is concentrically arranged with the central gas discharge port so as to externally surround the combustible gas discharge port, the oxidizing gas discharge port ejecting an oxidizing gas. Here, a relation of V1>V2>V3>V4 is satisfied where V1 denotes a gas flow speed at the central gas discharge port, V2 denotes a gas flow speed at the plurality of small-diameter gas discharge ports, V3 denotes a gas flow speed at the combustible gas discharge port, and V4 denotes a gas flow speed at the oxidizing gas discharge port.
    • 光纤基材的制造方法包括通过在由氧化性气体和可燃性气体产生的火焰中水解玻璃原料气体来制造玻璃微粒。 该方法使用燃烧器,其包括:排出含有氧化气体的气体的中央气体排出口; 多个小直径气体排出口,其与中心气体排出口以同心圆方式布置成外围包围中央气体排出口,其中多个小直径气体排出口喷射含有氧化气体的气体 ; 可燃气体排出口,其与中心气体排出口同心地布置以便外部包围中央气体排出口,其中可燃气体排出口具有布置在其中的多个小直径气体排出口和可燃气体排出口 喷出可燃气体; 以及氧化气体排出口,其与中心气体排出口同心地布置以便在外部包围可燃气体排出口,氧化气体排出口喷射氧化气体。 这里,在V1表示中央气体排出口的气体流速的情况下,满足V1> V2> V3> V4的关系,V2表示多个小直径气体排出口的气体流速,V3表示气体流量 可燃气体排出口的速度,V4表示氧化剂气体排出口的气体流速。
    • 29. 发明申请
    • Mobile Communication System Using Adaptive Multi-Antenna
    • 使用自适应多天线的移动通信系统
    • US20100222051A1
    • 2010-09-02
    • US12715689
    • 2010-03-02
    • Masahiro WATANABEMakoto YOSHIDAHiroshi FUJITA
    • Masahiro WATANABEMakoto YOSHIDAHiroshi FUJITA
    • H04W40/00H04W88/08
    • H04B7/0413H04B7/0613H04B7/0689
    • A mobile communication system using an adaptive multiantenna realizes improvement of reception characteristics, effective use of the band, and optimization of the throughput in comparison with a system in which application of the same multiantenna communication method is continued irrespective of a variation of the number of radio relay stations. The mobile communication system comprises a radio base station, a radio relay station, and mobile terminal stations for communicating with the radio base station through a radio relay station. The radio base station has a multiantenna and is characterized in that the radio base station judges if there is any variation of the number of radio relay stations when the radio base station carries out transmission through a radio relay station, and the radio base station communicates with the mobile terminal station by switching the multiantenna communication method using the multiantenna depending on the delay time of the feedback signal from the mobile terminal station if there is a variation of the number of radio relay stations.
    • 与使用同一多天线通信方法的系统相比,使用自适应多天线的移动通信系统实现接收特性的改善,频带的有效使用和吞吐量的优化,而与无线电的数量的变化无关 中继站。 移动通信系统包括无线电基站,无线电中继站和用于通过无线电中继站与无线电基站进行通信的移动终端站。 无线基站具有多天线,其特征在于,无线基站通过无线中继站进行无线基站的发送时,判断无线中继站的数量是否存在变化,无线基站与 如果存在无线电中继站的数量的变化,则根据来自移动终端站的反馈信号的延迟时间,通过使用多天线切换多天线通信方法。
    • 30. 发明申请
    • ELECTRONIC COMPONENT AND MANUFACTURING METHOD OF ELECTRONIC COMPONENT
    • 电子元件的电子元件和制造方法
    • US20100157565A1
    • 2010-06-24
    • US12621194
    • 2009-11-18
    • Makoto YOSHIDAHiroshi KAMIYAMATomonaga NISHIKAWA
    • Makoto YOSHIDAHiroshi KAMIYAMATomonaga NISHIKAWA
    • H05K7/02H05K3/30
    • H01F27/292H01F27/027H01F41/046H01G4/224H01G4/33Y10T29/4913
    • A manufacturing method of electronic components includes forming a first insulation layer on a substrate, forming a plurality of passive elements on the first insulation layer, forming a second insulation layer on the passive elements, forming a plurality of conductor layers electrically connected to the respective passive elements, on the outer side of the second insulation layer to be exposed to an upper surface of each electronic component, and forming grooves between the electronic components including the respective passive elements to expose side surfaces of each electronic component and parts of the conductor layers from the side surfaces of each electronic component. The manufacturing method further including plating a plurality of external electrodes on the respective conductor layers exposed to the upper surface and the side surfaces of each electronic component, and cutting the substrate to completely separate into individual electronic components.
    • 电子部件的制造方法包括在基板上形成第一绝缘层,在所述第一绝缘层上形成多个无源元件,在所述无源元件上形成第二绝缘层,形成与各自被动电连接的多个导体层 元件,在第二绝缘层的外侧暴露于每个电子部件的上表面,以及在包括各个无源元件的电子部件之间形成凹槽,以暴露每个电子部件的侧表面和导体层的部分 每个电子元件的侧面。 该制造方法还包括在暴露于每个电子部件的上表面和侧表面的各个导体层上电镀多个外部电极,并且将基板切割成完全分离为各个电子部件。