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    • 24. 发明申请
    • PATTERNING PROCESS
    • 绘图过程
    • US20150234278A1
    • 2015-08-20
    • US14622306
    • 2015-02-13
    • Jun HatakeyamaHyun-Woo Kim
    • Jun HatakeyamaHyun-Woo Kim
    • G03F7/16G03F7/30G03F7/20
    • G03F7/0046G03F7/095G03F7/2002G03F7/325
    • There is provided a patterning process that forms a negative pattern by developing using an organic solvent, using a resist top coat composition that not only reduces the effect from the environment on a resist film and effectively blocks OOB light, but also reduces the film loss of a resist pattern and the bridging between patterns, enhances the sensitivity of the resist film, and suppresses the emission of an outgas from the resist film. The patterning process includes the steps of forming a resist top coat on a photoresist film formed on a substrate, with the resist top coat using as a top base material a polymer having a repeating unit p of styrene having a 1,1,1,3,3,3-hexafluoro-2-propanol group, in which m is 1 or 2, and p is 0
    • 提供通过使用有机溶剂显影形成负图案的图案化工艺,使用抗蚀剂面漆组合物,其不仅降低了抗蚀剂膜上的环境的影响并且有效地阻挡OOB光,而且还降低了膜损失 抗蚀剂图案和图案之间的桥接,增强了抗蚀剂膜的灵敏度,并且抑制了从抗蚀剂膜发出的气体。 图案化工艺包括以下步骤:在形成在基底上的光致抗蚀剂膜上形成抗蚀剂外涂层,其中抗蚀剂外涂层使用作为顶部基材的具有苯乙烯重复单元p的聚合物,其具有1,1,1,3 ,3,3-六氟-2-丙醇基,其中m为1或2,p为0

    • 27. 发明申请
    • SUBSTRATE-PROCESSING APPARATUS AND METHOD OF TRANSFERRING SUBSTRATE IN THE SAME
    • 基板处理装置及其中的基板传输方法
    • US20110264260A1
    • 2011-10-27
    • US13056413
    • 2009-04-06
    • Sang-Seok HongHyun-Woo Kim
    • Sang-Seok HongHyun-Woo Kim
    • H01L21/677G06F7/00
    • H01L21/67781
    • Provided is a substrate-processing apparatus including a transfer member loading and taking out a substrate to and from a storage member, and a control unit controlling the transfer member. The transfer member includes a plurality of transfer arms and an arm-driving part moving the respective transfer arms horizontally, and substrates are loaded on the respective transfer arms. The control unit controls a movement velocity and a position of the transfer member and compares movement velocity profiles of the transfer arms, so as to control movement velocities of the respective transfer arms. Accordingly, the simultaneously driven transfer arms simultaneously arrive at target points, and thus the substrate-processing apparatus reduces transfer time and improves productivity.
    • 提供了一种基板处理装置,其包括将存储部件加载和取出基板的转印部件和控制转印部件的控制部。 转印构件包括多个转印臂和臂驱动部分,水平地移动各个转印臂,并且基板被装载在相应的转印臂上。 控制单元控制传送构件的移动速度和位置,并且比较传送臂的移动速度分布,以便控制各传送臂的移动速度。 因此,同时驱动的传送臂同时到达目标点,因此基板处理装置减少传送时间并提高生产率。
    • 28. 发明申请
    • Embedded code-excited linerar prediction speech coding and decoding apparatus and method
    • 嵌入式码激励线性预测语音编解码装置及方法
    • US20060122830A1
    • 2006-06-08
    • US11297686
    • 2005-12-07
    • Mi-Suk LeeDo-Young KimJongMo SungHyun-Woo Kim
    • Mi-Suk LeeDo-Young KimJongMo SungHyun-Woo Kim
    • G10L19/02
    • G10L19/24G10L19/083G10L19/10
    • Provides is an embedded code-excited linear prediction speech coding/decoding apparatus and method that can deal with the capacity change of speech transmission channel by modeling an error signal not coded at a core speech coder based on a transmission rate in a multiple pulse search mode- or gain compensation mode and then transmitting it in an optimum mode. The apparatus includes a core speech coding unit for coding an input speech signal with spectral envelop and an excitation signal, a transmission rate determination unit for allocating the number of bits additionally allowed depending on a capacity of a transmission channel, and an embedded excitation signal coding unit for coding a residual excitation signal that is not coded in the core speech coding unit based on the number of additionally allowed bits using one of a multiple pulse excitation coding mode and a gain compensation mode.
    • 提供一种嵌入式码激励线性预测语音编码/解码装置和方法,可以通过对基于多脉冲搜索模式中的传输速率的核心语音编码器对未编码的误差信号进行建模来处理语音传输信道的容量变化 - 或增益补偿模式,然后以最佳模式发送。 该装置包括:核心语音编码单元,用于对具有频谱包络和激励信号的输入语音信号进行编码;传输速率确定单元,用于根据传输信道的容量分配额外容许的比特数;以及嵌入式激励信号编码 用于使用多脉冲激励编码模​​式和增益补偿模式中的一种,基于使用附加允许位的数量来编码不在核心语音编码单元中编码的残余激励信号的单元。