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    • 21. 发明授权
    • Method of growing epitaxial layers
    • 生长外延层的方法
    • US5476811A
    • 1995-12-19
    • US409944
    • 1995-03-23
    • Toshio FujiiAdarsh Sandhu
    • Toshio FujiiAdarsh Sandhu
    • H01L21/20H01S5/223H01S5/32H01S5/323C36B23/68
    • H01S5/32308H01L21/02395H01L21/02433H01L21/02463H01L21/02505H01L21/02546H01L21/0262H01L21/02631H01S5/2238H01S5/3202H01S5/3203
    • A method of growing a plurality of epitaxial layers each having a property which is different from each other simultaneously on a common substrate comprises steps of forming at least a first crystal surface and a second crystal surface which are crystallographically non-equivalent to each other on the substrate, introducing particles comprising constituent elements of the epitaxial layers into a region in the vicinity of the substrate, the particles including at least metal-organic molecules containing one of the elements constituting the epitaxial layers, decomposing the metal-organic molecules such that the layer constituting element therein is released as a result of the decomposition, and depositing the aforesaid particles including the element released by the decomposition of the metal-organic molecules on the first and second crystal surfaces so that a first epitaxial layer and a second epitaxial layer, respectively differing in properties from each other, are grown on respective the first and second crystal surfaces, the step of deposition being performed such that the growth of the first and second epitaxial layers is controlled by the decomposition of the metal-organic molecule.
    • 在公共衬底上同时生长具有彼此不同的性质的多个外延层的方法包括以下步骤:至少形成在第一晶体表面和第二晶体表面上的晶体学上彼此不相同的 衬底,将包含外延层的构成元素的粒子引入到衬底附近的区域中,所述颗粒至少包含含有构成外延层的元素之一的金属有机分子,分解金属 - 有机分子,使得层 作为分解的结果释放其中的构成元素,并且将包含通过金属 - 有机分子分解释放的元素的上述颗粒沉积在第一和第二晶体表面上,使得分别具有第一外延层和第二外延层 不同的性质彼此分别生长 第一和第二晶体表面,进行沉积步骤使得通过金属 - 有机分子的分解来控制第一和第二外延层的生长。