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    • 23. 发明专利
    • Exhaust gas treatment apparatus
    • 排气处理设备
    • JP2009136815A
    • 2009-06-25
    • JP2007317829
    • 2007-12-10
    • Hitachi Ltd株式会社日立製作所
    • SASAKI TAKASHISUGANO SHUICHIKARASAWA HIDETOSHIIIZUKA HIDEHIRO
    • B01D53/68B01D53/14B01D53/18B01D53/50B01D53/77B01D53/81B01D53/86H01L21/3065
    • PROBLEM TO BE SOLVED: To attain enhancement of durability and simplification of maintenance of a treatment apparatus for an exhaust gas containing a fluorine compound discharged from a manufacturing factory for a semiconductor and a crystal. SOLUTION: The exhaust gas treatment apparatus comprises a gas separation means for separating a mist formation gas in a gas to be treated and a mist deposition gas, a wet type removal apparatus for removing at least any one of an acidic gas or a silicon compound contained in the gas to be treated passing through the gas separation means, and a fluorine compound decomposition apparatus provided with a catalyst for decomposing the fluorine compound contained in the gas to be treated passing through the wet type removal apparatus. By the above apparatus, in the pre-treatment step of a former stage of a catalyst reaction layer, SO 3 and SiF 4 are separated, and the SiF 4 is removed by the wet type removal apparatus installed in a latter stage of a dry type removal apparatus. A prolongation of life of the fluorine compound decomposition catalyst can be attained by separating SO 3 and SiF 4 contained in the exhaust gas. COPYRIGHT: (C)2009,JPO&INPIT
    • 解决的问题:为了提高含有从半导体和晶体的制造厂排出的氟化合​​物的废气的处理装置的耐久性和维护的简化。 解决方案:废气处理装置包括用于分离待处理气体中的雾化气体和气雾沉积气体的气体分离装置,用于除去至少任一种酸性气体或 含有待处理气体中的硅化合物通过气体分离装置,以及氟化合物分解装置,其具有用于分解通过湿式除去装置的被处理气体中所含的氟化合物的催化剂。 通过上述装置,在催化剂反应层的前一阶段的预处理步骤中,分离出SO 3 SB 3和SiF 4 SB 3,并且SiF SB 通过安装在干式除去装置后期的湿式除去装置除去。 氟化合物分解催化剂的寿命延长可以通过分离废气中所含的SO 3 SB 3和/或SBF 4获得。 版权所有(C)2009,JPO&INPIT
    • 28. 发明专利
    • Method and apparatus for treating fluorine compound contained in gas
    • 用于处理气体中含氟化合物的方法和装置
    • JP2007301467A
    • 2007-11-22
    • JP2006132068
    • 2006-05-11
    • Hitachi Ltd株式会社日立製作所
    • SASAKI TAKASHISUGANO SHUICHITAMADA SHIN
    • B01D53/46B01D53/70B01D53/86
    • Y02C20/30
    • PROBLEM TO BE SOLVED: To efficiently remove a small amount of fluorine compounds contained in a gas to be treated. SOLUTION: The small amount of fluorine compounds contained in the gas to be treated are concentrated with an adsorbent, separated when the adsorbing capacity of the adsorbent reaches its saturation, and treated in a fluorine compound treating apparatus installed in a rear stage. A detecting device for the fluorine compounds installed at the downstream of an adsorbing column monitors the concentration of the fluorine compounds passed through without being sufficiently adsorbed with the adsorbent, and heating of the fluorine compound treating apparatus and a gas heater heating the gas flowing in for separating the fluorine compounds starts after confirmation of the passing through of the unadsorbed fluorine compounds. Excessive running costs are saved by controlling a heating time. Further, since the gas heater is characterized by fast heating, the cycle of adsorption or separation is accelerated by fast separating the adsorbed fluorine compounds through fast heating and the amount of filling adsorbent is reduced, thereby making apparatus compact. COPYRIGHT: (C)2008,JPO&INPIT
    • 待解决的问题:为了有效地除去少量被处理气体中所含的氟化合物。 解决方案:将待处理气体中含有的少量氟化合物用吸附剂浓缩,当吸附剂的吸附能力达到饱和时分离,并在后级的氟化合物处理装置中进行处理。 用于安装在吸附塔下游的氟化合物的检测装置监测通过的氟化合物的浓度不被吸附剂充分吸附,并且加热氟化合物处理装置和加热流入的气体的气体加热器 在确认未吸附的氟化合物的通过之后开始分离氟化合物。 通过控制加热时间可以节省运行成本。 此外,由于气体加热器的特征在于快速加热,通过快速加热快速分离吸附的氟化合物并减少填充吸附剂的量,从而加速吸附或分离的循环,从而使设备紧凑。 版权所有(C)2008,JPO&INPIT
    • 29. 发明专利
    • Method and apparatus for treating fluorine compound-containing gas
    • 用于处理含氟化合物的气体的方法和装置
    • JP2006095486A
    • 2006-04-13
    • JP2004287631
    • 2004-09-30
    • Hitachi Ltd株式会社日立製作所
    • SUGANO SHUICHISASAKI TAKASHITAMADA SHIN
    • B01D53/46B01D53/34B01D53/70B01D53/77B01D53/86C07C19/08
    • Y02C20/30
    • PROBLEM TO BE SOLVED: To decompose and remove fluorine compounds at high decomposition ratios by using a fluorine-compound-decomposing catalyst from gas containing gaseous and solid silicon compounds and fluorine compounds. SOLUTION: Gas to be treated that contains fluorine compounds and silicon compounds is subjected to wet treatment using water, an aqueous alkaline solution, or the like, to covert most of the silicon compounds into SiO 2 and then remove SiO 2 . Specifically, a part of the silicon compounds is discharged in the form of hydroxide or in other forms, while accompanying the gas to be treated. Before causing the gas to come into contact with the fluorine-compound-decomposing catalyst, the silicon compounds are removed by using a trapping material. Thereafter, fluorine compounds are decomposed in a reaction column using the fluorine-compound-decomposing catalyst. Even after a long time of continuous running, a high decomposition rate can be maintained. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:通过使用含气态和固态硅化合物和氟化合物的气体的氟化合物分解催化剂,以高分解比分解和除去氟化合物。 解决方案:使用水,碱性水溶液等对含有氟化合物和硅化合物的待处理气体进行湿处理,以将大部分硅化合物转化成SiO 2 SBB 然后除去SiO 2 。 具体地说,一部分硅化合物以伴随待处理气体的方式以氢氧化物或其它形式排出。 在使气体与氟化合物分解催化剂接触之前,通过使用捕集材料除去硅化合物。 此后,使用氟化合物分解催化剂在反应塔中分解氟化合物。 即使经过长时间的连续运转,也能够维持高分解率。 版权所有(C)2006,JPO&NCIPI
    • 30. 发明专利
    • Method and apparatus for decomposing perfluoro compound
    • 用于分解全氟化合物的方法和装置
    • JP2005185933A
    • 2005-07-14
    • JP2003429610
    • 2003-12-25
    • Hitachi Ltd株式会社日立製作所
    • SUGANO SHUICHIINOUE HIROSHITAMADA SHINKOBAYASHI SHIGEYOSHI
    • B01D53/70B01D53/68B01D53/86H01L21/205H01L21/3065
    • Y02C20/30Y02P70/605
    • PROBLEM TO BE SOLVED: To provide a method of bringing a PFC (perfluoro compound)-containing exhaust gas into contact with a catalyst to decompose the PFCs while controlling a deterioration in the decomposing performance due to e.g. blinding of the catalyst. SOLUTION: Before introduction of the PFC-containing exhaust gas into a catalytic reaction column, gas compounds reacting at least with H 2 O to solidify, among those contained in the PFC-containing gas, are reacted preliminarily with H 2 O to convert into solid oxides. After separation removal of solids contained in the exhaust gas, the PFC-containing gas is introduced into the column. The method allows the separation removal of substances reacting with H 2 O within the column to solidify, together with solids contained originally in the PFC-containing gas. COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供一种使PFC(全氟化合物)的废气与催化剂接触的方法,以分解PFCs同时控制分解性能的劣化。 催化剂的盲目。

      解决方案:在将含PFC的废气引入催化反应塔之前,至少与H 2 O反应的气体化合物在含PFC的气体中包含的化合物中是固化的 用H 2 O进行初步反应,转化为固体氧化物。 在分离除去废气中所含的固体后,将含PFC的气体引入塔中。 该方法允许在柱内分离除去与H 2 SB 2 O反应的物质,以及最初含有PFC的气体中含有的固体。 版权所有(C)2005,JPO&NCIPI