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    • 22. 发明专利
    • POSITION ALIGNMENT METHOD FOR CIRCUIT PATTERN
    • JPS61171125A
    • 1986-08-01
    • JP1081785
    • 1985-01-25
    • HITACHI LTD
    • IIDA TADASHITSUKAZAKI KOICHIHASHIMOTO YUTAKA
    • H01L21/66G06T1/00H01L21/027H01L21/30H01L21/68
    • PURPOSE:To make the exact position alignment possible even if the pattern contains many segments of specific direction, by applying the position alignment in only the perpendicular direction to the segments except the same direction to the segments when the photographed pattern contains nothing but the segments of specific direction. CONSTITUTION:The outputs of the EXOR gates 28-1-28-49 add one frame to the counter group 29-1-29-49 corresponding to the arrangement of each register of the image resolving circuit 26-1-26-7. The contents of 49 counters are the bit number of the exclusive-ORed area when the pattern images of the bath channels are shifted by + or -3 bits, one bit by one bit. The contents of the counter group are added in the column by the adders 30-1-30-7 and in the row by the adders 31-1-31-7. The minimum value detector 32 selects the minimum value Xmin and the maximum value Xmax from the contents of the adders 30-1-30-7. When the difference between them is larger than the set value, the detector judges that DELTAX, the shift of position corresponding to Xmin, gives the optimum position alignment in X direction, and issue command that the X table should travel by the amount of DELTAX.
    • 26. 发明专利
    • METHOD AND DEVICE FOR INSPECTING SOLDERING PART BY X-RAY PICTURE
    • JPH03218409A
    • 1991-09-26
    • JP1255990
    • 1990-01-24
    • HITACHI LTD
    • HAMADA TOSHIMITSUFUSHIMI SATOSHINAKAHATA MITSUZOTSUKAZAKI KOICHIMORIOKA YOSHIFUMI
    • G01B15/00H05K3/34
    • PURPOSE:To decide the fault of a double-side mounted board by storing a detection X-ray picture in the state mounted with pats on one side and substracting the stored picture in the one side mounted state from a detection X-ray picture when mounting the parts on both sides. CONSTITUTION:A video signal from a TV camera 6 is A/D converted 11 and inputted to a shading correcting circuit 12 and a detected picture is normalized by the circuit 12 while correcting that a video level is made different for the center part of the screen and a peripheral part even in the case of the same brightness. Logarithm conversion 13 is executed for the picture signal and the signal is inputted to a select circuit 23. In the case of one-side mounting, the circuit 23 inputs the picture to a memory 24 and further inputted through a select circuit 27 to a fault deciding circuit 28. Then, the fault is decided and the picture is temporarily stored in a computer 8. Next, the circuit 23 inputs the picture in the double-side mounted state to a picture memory 25 and the picture in the one-side mounted state corresponding to the position is inputted from the computer 8 to the memory 24. Since a subtracting circuit 26 obtains a differential picture between the memories 24 and 25 and inputs it to the circuit 28, the circuit 28 can decide the fault.
    • 30. 发明专利
    • Binarizing method of video signal
    • 视频信号的二分法
    • JPS61117675A
    • 1986-06-05
    • JP23836384
    • 1984-11-14
    • Hitachi Ltd
    • SAITOU HIROTANIHARA YASUHIKOTSUKAZAKI KOICHI
    • G06T1/00G06K9/38
    • PURPOSE: To detect minute defects by setting three thresholds which are a certain value in a bright part, a dark part, and a part of intermediate lightness respectively and selecting automatically one of these three thresholds at each point of a pattern.
      CONSTITUTION: First, in intermediate lightness level (f) is used as the threshold to binarize a video signal 6 so that bright parts are '1' and dark parts are '0'. A binarized picture is stored in a memory, and a cross-shaped operator which has numbers of picture elements in (x) and (y) directions with an objective picture element as the center is used to add lightness of individual picture elements. In accordance with magnitudes of added values Nx and Ny, the part around the objective picture element is discriminated as a bright pattern part, a dark base part, or a boundary part of the pattern base to select the threshold. Discriminated values nl and nh set in this manner are used to select a threshold (e) as the threshold of the objective picture element in case of Nx>nh and Ny>nh and select a threshold (g) similarly in case of Nx
    • 目的:通过在亮部分,暗部分和中间亮度的一部分中分别设置三个阈值来检测微小缺陷,并在图案的每个点自动选择这三个阈值之一。 构成:首先,在中间亮度级(f)中,作为二值化视频信号6的阈值,使得亮部分为“1”,暗部分为“0”。 将二值化图像存储在存储器中,并且使用具有以目标像素为中心的(x)和(y)方向的像素数量的十字形运算符来增加各个图像元素的亮度。 根据附加值Nx和Ny的大小,将目标像素周围的部分区分为图案基底的亮图案部分,暗基部分或边界部分,以选择阈值。 在Nx> nh和Ny> nh的情况下,使用以这种方式设置的鉴别值n1和nh来选择阈值(e)作为目标像素的阈值,并且在Nx