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21. 发明授权

US6125131A Laser system utilizing sorbent-based gas storage and delivery system 失效
标题翻译：基于吸附剂的气体储存和输送系统的激光系统
公开(公告)号：US6125131A
公开(公告)日：2000-09-26
申请号：US80895
申请日：1998-05-18
申请人： George R. Brandes , Glenn M. Tom , James V. McManus
发明人： George R. Brandes , Glenn M. Tom , James V. McManus
IPC分类号： B01D53/04 , B01J4/02 , B01J20/18 , B01J20/20 , F17C11/00 , H01S3/20
CPC分类号： F17C11/007 , B01D53/0407 , B01J20/20 , F17C11/00 , B01D2253/308 , B01D2259/4525 , F17C2205/0338 , F17C2205/0391 , Y02C10/08 , Y02C20/10 , Y10S95/902
摘要： A laser system utilizing a fluid as the excitatory medium for stimulated light emission, wherein the fluid is supplied from a sorbent-based fluid storage and dispensing system coupled in fluid-supplying relationship with the laser apparatus. The laser may be an excimer laser utilizing as the laser working fluid a rare gas halide compound such as fluorides and/or chlorides of krypton, xenon and argon, as well as fluorine and/or chlorine per se. The laser system may alternatively be a far infrared gas laser utilizing a gas such as CO.sub.2, N.sub.2 O, CD.sub.3 OD, CH.sub.3 OD, CH.sub.3 OH, CH.sub.3 NH.sub.2, C.sub.2 H.sub.2 F.sub.2, HCOOH, CD.sub.3 I, CH.sub.3 F, and C.sup.13 H.sub.3 F. Laser systems of the present invention may be utilized in applications such as materials processing, measurement and inspection, reading, writing, and recording of information, holography, communications, displays, spectroscopy and analytical chemistry, remote sensing, surveying, marking, and alignment, surgical and medical applications, plasma diagnostics, laser weaponry, laser-induced nuclear fusion, isotope enrichment and atomic physics.
摘要翻译：一种利用流体作为刺激光发射的兴奋剂介质的激光系统，其中所述流体从与所述激光装置以流体供应关系耦合的基于吸附剂的流体储存和分配系统供应。激光可以是激光工作流体中使用诸如氟化物和/或氪，氙和氩的氟化物和/或氯化物的稀有卤化物化合物以及氟和/或氯本身的准分子激光。激光系统可以替代地是使用诸如CO 2，N 2 O，CD 3 OD，CH 3 OD，CH 3 OH，CH 3 NH 2，C 2 H 2 F 2，HCOOH，CD 3 I，CH 3 F和C 13 H 3 F的气体的远红外气体激光。本发明的激光系统可以用于诸如材料加工，测量和检查，读取，写入和记录信息，全息术，通信，显示，光谱学和分析化学，遥感，测量，标记和对准等应用中。外科和医疗应用，等离子体诊断，激光武器，激光诱导核聚变，同位素浓缩和原子物理学。

22. 发明授权

US6029500A Piezoelectric quartz crystal hydrogen sensor, and hydrogen sensing method utilizing same 失效
标题翻译：压电石英晶体氢传感器和利用其的氢感测方法
公开(公告)号：US6029500A
公开(公告)日：2000-02-29
申请号：US81957
申请日：1998-05-19
申请人： Glenn M. Tom
发明人： Glenn M. Tom
IPC分类号： G01N27/00 , G01N33/00 , H01L41/08 , G01N30/76 , G08B17/10
CPC分类号： G01N29/036 , G01N33/005 , G01N2291/0256
摘要： A hydrogen sensor including a piezoelectric device with a hydrogen-interactive metal film that reversibly interacts with hydrogen to provide a correspondingly altered frequency response characteristic, relative to the frequency response in the absence of hydrogen. The piezoelectric device may be for example a quartz microbalance or a surface acoustic wave device, having a thin film (e.g., 10-100,000 Angstroms thickness) coating thereon of a hydrogen-interactive metal such as palladium, platinum, nickel or the like.
摘要翻译：一种氢传感器，包括具有与氢相互作用的氢相互作用金属膜的压电装置，以相对于在不存在氢的情况下对应于频率响应的传感器操作的参考条件而提供相应改变的频率响应特性。压电装置可以是例如石英微量天平或表面声波装置，其上具有诸如钯，铂，镍等的氢相互作用金属的薄膜（例如10-100,000埃厚）涂层。

23. 发明授权

US5985008A Sorbent-based fluid storage and dispensing system with high efficiency sorbent medium 失效
标题翻译：基于吸附剂的流体储存和分配系统，具有高效吸附剂介质
公开(公告)号：US5985008A
公开(公告)日：1999-11-16
申请号：US82373
申请日：1998-05-20
申请人： Glenn M. Tom , James V. McManus
发明人： Glenn M. Tom , James V. McManus
IPC分类号： B01J20/20 , F17C11/00 , B01D53/04
CPC分类号： B01J20/20 , F17C11/00
摘要： A solid-phase physical sorbent-based fluid storage and dispensing system, in which the sorbent is a particulate activated carbon of specific pore character. The sorbent may be washed, e.g., with hydrofluoric acid, to remove adverse trace metals and oxidic transition metal species therefrom.
摘要翻译：基于固相物理吸附剂的流体储存和分配系统，其中吸附剂是具有特定孔隙特征的颗粒活性炭。吸附剂可以例如用氢氟酸洗涤，以从其中除去不利的痕量金属和氧化过渡金属物质。

24. 发明授权

US5622682A Method for concentration and recovery of halocarbons from effluent gas streams 失效
标题翻译：从废气流中浓缩和回收卤代烃的方法
公开(公告)号：US5622682A
公开(公告)日：1997-04-22
申请号：US395162
申请日：1995-02-27
申请人： Glenn M. Tom
发明人： Glenn M. Tom
IPC分类号： C07C17/38 , C01B7/00
CPC分类号： C07C17/38
摘要： A process for recovery of halocarbons from a gas mixture containing the halocarbon and acid gas components comprises the steps of contacting the gas mixture with a dry scrubber to remove the acid gas components from the gas mixture and yield a first effluent gas mixture containing the halocarbon. The first effluent gas mixture is contacted with an adsorbent which is selective for the halocarbon component of the first effluent gas mixture to adsorb the halocarbon component and yield a second effluent gas. The adsorbed halocarbon is recovered by desorbing same from the adsorbent. The process of contacting with adsorbent can be carried out in at least two adsorbent beds joined at inlet and outlet ends thereof to gas feed and gas discharge manifolds, respectively.
摘要翻译：从含有卤代烃和酸性气体组分的气体混合物回收卤代烃的方法包括以下步骤：使气体混合物与干洗涤器接触，以从气体混合物中除去酸性气体组分并产生含有卤代烃的第一流出气体混合物。第一废气混合物与吸附剂接触，吸附剂对第一废气混合物的卤代烃组分是选择性的，以吸附卤代烃组分并产生第二废气。吸附的卤代烃通过从吸附剂中解吸而回收。与吸附剂接触的过程可以在至少两个在其入口和出口端处连接到吸气和排气歧管的吸附剂床中进行。

25. 发明授权

US5531971A Process for purifying semiconductor process gases to remove lewis acid and oxidant impurities therefrom 失效
标题翻译：净化半导体工艺气体以从其中除去路易斯酸和氧化剂杂质的方法
公开(公告)号：US5531971A
公开(公告)日：1996-07-02
申请号：US322315
申请日：1994-10-13
申请人： Glenn M. Tom , James V. McManus
发明人： Glenn M. Tom , James V. McManus
IPC分类号： B01D53/02 , B01D53/28 , B01D53/40 , B01D53/46 , B01J20/02 , B01J20/04 , B01J20/26 , E02F9/22 , F15B11/05 , F15B11/16 , F15B21/08 , B01D53/04
CPC分类号： E02F9/2235 , B01D53/28 , B01D53/40 , B01D53/46 , B01J20/02 , B01J20/28057 , B01J20/28078 , B01J20/321 , B01J20/3236 , E02F9/2282 , E02F9/2296
摘要： Scavenger compositions useful for purifying process gas streams, such as process gas streams, such as hydrogen, nitrogen, noble gases, diborane, and hydride gases from Groups IVA-VIA of the Periodic Table, such as arsine, phosphine, silane, germane, hydrogen selenide, and hydrogen telluride, and mixtures thereof, to remove water, oxygen, and other oxidant and Lewis acid impurities therefrom, such scavenger comprising a porous, high surface area inert support having thereon an active scavenging species, formed by the deposition on the support of a Group IA metal and pyrolysis thereof at a selected elevated temperature on said support. In another aspect, the present invention relates to a method of making a scavenger useful for purifying process gas streams, to remove water, oxygen, and other oxidant and Lewis acid impurities therefrom, and a process for purifying process gas streams to remove water, oxygen, and other oxidant and Lewis acid impurities therefrom, such process comprising contacting the impurity-containing process gas stream with a scavenger of the general type described above. In a further aspect, the invention relates to a method for using scavengers of the general type described above as back-diffusion scrubbers to protect the manufacturing process or gas supply system from inadvertent introduction of impurities, such method comprising contacting the impurity-containing process gas stream with a scavenger of the general type described above and providing in the scavenger bed one or more endpoint detectors so that back-diffusion events are observed.
摘要翻译：用于净化工艺气流的清除剂组合物，例如来自元素周期表IVA-VIA族的工艺气流，例如氢气，氮气，惰性气体，乙硼烷和氢化物气体，例如胂，膦，硅烷，锗烷，氢硒化物和碲化氢及其混合物，以从其中除去水，氧和其它氧化剂和路易斯酸杂质，这种清除剂包括其上具有活性清除物质的多孔高表面积惰性载体，其通过沉积在载体上而形成的IA族金属并在所述载体上在选定的升高温度下进行热解。另一方面，本发明涉及一种制备清除剂的方法，其用于净化工艺气流，从中除去水，氧和其它氧化剂和路易斯酸杂质，以及净化工艺气流以除去水，氧气的方法，和其它氧化剂和路易斯酸杂质，这种方法包括使含杂质的工艺气体流与上述一般类型的清除剂接触。在另一方面，本发明涉及一种使用上述一般类型的清除剂作为反向扩散洗涤器的方法，用于保护制造过程或气体供应系统不会意外引入杂质，这种方法包括使含杂质的工艺气体流与上述一般类型的清除剂并在清除床中提供一个或多个端点检测器，从而观察到反向扩散事件。

26. 发明授权

US4983363A Apparatus for purifying arsine, phosphine, ammonia, and inert gases to remove Lewis acid and oxidant impurities therefrom 失效
标题翻译：用于净化胂，膦，氨和惰性气体以除去路易斯酸和氧化剂杂质的装置
公开(公告)号：US4983363A
公开(公告)日：1991-01-08
申请号：US163792
申请日：1988-03-03
申请人： Glenn M. Tom , Duncan W. Brown
发明人： Glenn M. Tom , Duncan W. Brown
IPC分类号： B01J20/32 , C01B6/06 , C01B21/04 , C01B23/00 , C01B25/06
CPC分类号： C01B23/00 , B01J20/3204 , B01J20/321 , B01J20/3234 , B01J20/3246 , B01J20/3248 , B01J20/3255 , B01J20/3265 , B01J20/3282 , C01B21/0427 , C01B25/06 , C01B6/065
摘要： An apparatus for purifying a gaseous mixture comprising arsine, phosphine, ammonia, and/or inert gases, to remove Lewis acid and/or oxidant impurities therefrom, comprising a vessel containing a bed of a scavenger, the scavenger including a support having associated therewith an anion which is effective to remove such impurities, such anion being selected from one or more members of the group consisting of: (i) carbanions whose corresponding protonated compounds have a pK.sub.a value of from about 22 to about 36; and (ii) anions formed by reaction of such carbanions with the primary component of the mixture.
摘要翻译：一种用于净化包含胂，膦，氨和/或惰性气体的气体混合物以从其中除去路易斯酸和/或氧化剂杂质的装置，包括含有清除剂床的容器，所述清除剂包括与其相关的载体有效除去这些杂质的阴离子，这种阴离子选自以下组成的一个或多个成员：（i）其对应的质子化合物的pKa值为约22至约36的碳阴离子; 和（ii）通过这种碳阴离子与混合物的主要组分的反应形成的阴离子。

27. 发明授权

US4659552A Scavengers for the removal of impurities from arsine and phosphine 失效
公开(公告)号：US4659552A
公开(公告)日：1987-04-21
申请号：US888180
申请日：1986-07-21
申请人： Glenn M. Tom
发明人： Glenn M. Tom
IPC分类号： B01J20/26 , B01D53/02 , B01J49/00 , C01B6/06 , C01B25/06 , C01G28/00 , C08F8/42 , C01B13/00
CPC分类号： C01B6/065 , B01J49/0004 , C01B25/06
摘要： Disclosed are macroreticulate polymer scavengers functionalized with arsenic or phosphorus compounds. These scavengers are used for removing oxidants, protic acids and compounds that can be metallated, from arsine and phosphine.

28. 发明授权

US4507453A Dicyclopentadiene thermoset polymer 失效
标题翻译：二环戊二烯热固性聚合物
公开(公告)号：US4507453A
公开(公告)日：1985-03-26
申请号：US497918
申请日：1983-05-25
申请人： Glenn M. Tom
发明人： Glenn M. Tom
IPC分类号： C08G61/08 , C08F132/08
CPC分类号： C08G61/08
摘要： A high impact strength, high modulus thermoset homopolymer is formed by the metathesis-catalyzed polymerization of dicyclopentadiene. In a preferred embodiment of the synthesis, two parts of a metathesis-catalyst system, a catalyst/monomer solution and an activator/monomer solution, are combined in the mixing head of a reaction injection molding machine and then injected into a mold. The reaction mixture sets up into a tough, rigid, thermoset polymer with high modulus and excellent impact strength.
摘要翻译：通过二环戊二烯的易位催化聚合形成高冲击强度，高模量热固性均聚物。在合成的优选实施方案中，将两份易位 - 催化剂体系，催化剂/单体溶液和活化剂/单体溶液合并在反应注射成型机的混合头中，然后注入模具中。反应混合物成为具有高模量和优异冲击强度的坚韧，刚性的热固性聚合物。

29. 发明授权

US06764755B2 Channelized sorbent media, and methods of making same 有权
标题翻译：通道化吸附剂介质及其制备方法
公开(公告)号：US06764755B2
公开(公告)日：2004-07-20
申请号：US10023493
申请日：2001-12-17
申请人： Glenn M. Tom , Steven J. Hultquist
发明人： Glenn M. Tom , Steven J. Hultquist
IPC分类号： B32B516
CPC分类号： B01J20/28014 , B01J20/08 , B01J20/103 , B01J20/14 , B01J20/16 , B01J20/20 , B01J20/26 , B01J20/28004 , B01J20/28016 , B01J20/28019 , B01J20/2803 , B01J20/28033 , B01J20/28042 , B01J20/28045 , B01J20/28078 , B01J20/2808 , B01J20/28095 , Y10S95/90 , Y10S95/901 , Y10S95/903 , Y10T428/249953 , Y10T428/249971 , Y10T428/249974 , Y10T428/249975 , Y10T428/2982 , Y10T428/2995
摘要： A channelized sorbent material comprises porous sorbent particles characterized by an average pore diameter. Each sorbent particle has at least one interior channel of an average transverse dimension (i.e. transverse diameter) that is at least ten times larger than the average pore diameter of the porous sorbent particle. The interior channel may constitute a single cylindrical through-bore in the sorbent particle, or alternatively, an array of intersecting or non-intersecting channels. The porous sorbent particles preferably comprise bead activated carbon particles. Such channelized sorbent material is particular useful as sorbent media in an adsorption-desorption apparatus for storage and dispensing of a sorbable fluid.
摘要翻译：通道化的吸附剂材料包括以平均孔径为特征的多孔吸附剂颗粒。每个吸附剂颗粒具有至少一个平均横向尺寸（即横向直径）的内部通道，其至少比多孔吸附剂颗粒的平均孔径大十倍。内部通道可以构成吸附剂颗粒中的单个圆柱形通孔，或者可以是相交或非相交通道的阵列。多孔吸附剂颗粒优选包含珠粒活性炭颗粒。这种通道化的吸附剂材料特别用作用于储存和分配可吸附流体的吸附 - 解吸装置中的吸附剂介质。

30. 发明授权

US06540819B2 Gas cabinet assembly comprising sorbent-based gas storage and delivery system 有权
公开(公告)号：US06540819B2
公开(公告)日：2003-04-01
申请号：US10008132
申请日：2001-12-05
申请人： Glenn M. Tom , James V. McManus
发明人： Glenn M. Tom , James V. McManus
IPC分类号： B01D5304
CPC分类号： B01D53/0446 , B01D2253/10 , B01D2253/102 , B01D2253/104 , B01D2253/106 , B01D2253/112 , B01D2253/202 , B01D2253/308 , B01D2256/26 , B01D2257/20 , B01D2257/2025 , B01D2257/2045 , B01D2257/2047 , B01D2257/304 , B01D2257/406 , B01D2257/70 , B01D2259/40083 , B01D2259/4525 , B01J20/20 , F17C7/00 , F17C11/00 , F17C13/04 , F17C13/045 , F17C2201/0109 , F17C2201/032 , F17C2201/06 , F17C2205/0111 , F17C2205/0142 , F17C2205/0146 , F17C2205/0173 , F17C2205/0176 , F17C2205/0329 , F17C2205/037 , F17C2223/0123 , F17C2223/038 , F17C2227/0135 , F17C2227/0302 , F17C2250/01 , F17C2250/032 , F17C2250/0636 , F17C2270/0518 , Y10S95/901 , Y10S95/902
摘要： A gas supply system including a gas cabinet defining an enclosure including therein a gas dispensing manifold and one or more adsorbent-based gas storage and dispensing vessels mounted in the enclosure and joined in gas flow communication with the gas dispensing manifold. The enclosure may be maintained under low or negative pressure conditions for enhanced safety in the event of leakage of gas from the gas storage and dispensing vessel(s) in the enclosure. The gas supply system may be coupled to a gas-consuming unit in a semiconductor manufacturing facility, e.g., an ion implanter, an etch chamber, or a chemical vapor deposition reactor.

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