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21. 发明授权

US07056782B2 CMOS silicide metal gate integration 失效
公开(公告)号：US07056782B2
公开(公告)日：2006-06-06
申请号：US10786901
申请日：2004-02-25
申请人： Ricky S. Amos , Diane C. Boyd , Cyril Cabral, Jr. , Richard D. Kaplan , Jakub T. Kedzierski , Victor Ku , Woo-Hyeong Lee , Ying Li , Anda C. Mocuta , Vijay Narayanan , An L. Steegen , Maheswaran Surendra
发明人： Ricky S. Amos , Diane C. Boyd , Cyril Cabral, Jr. , Richard D. Kaplan , Jakub T. Kedzierski , Victor Ku , Woo-Hyeong Lee , Ying Li , Anda C. Mocuta , Vijay Narayanan , An L. Steegen , Maheswaran Surendra
IPC分类号： H01L21/8238
CPC分类号： H01L21/76897 , H01L21/28052 , H01L21/28097 , H01L21/823835 , H01L29/66545 , H01L29/6656
摘要： The present invention provides a complementary metal oxide semiconductor integration process whereby a plurality of silicided metal gates are fabricated atop a gate dielectric. Each silicided metal gate that is formed using the integration scheme of the present invention has the same silicide metal phase and substantially the same height, regardless of the dimension of the silicide metal gate. The present invention also provides various methods of forming a CMOS structure having silicided contacts in which the polySi gate heights are substantially the same across the entire surface of a semiconductor structure.

22. 发明授权

US06584368B2 User configurable multivariate time series reduction tool control method 有权
公开(公告)号：US06584368B2
公开(公告)日：2003-06-24
申请号：US10245461
申请日：2002-09-17
申请人： Raymond J. Bunkofske , John Z. Colt, Jr. , James J. McGill , Nancy T. Pascoe , Maheswaran Surendra , Marc A. Taubenblatt , Asif Ghias
发明人： Raymond J. Bunkofske , John Z. Colt, Jr. , James J. McGill , Nancy T. Pascoe , Maheswaran Surendra , Marc A. Taubenblatt , Asif Ghias
IPC分类号： G05B1500
CPC分类号： G05B23/0221 , G05B2219/45031 , H01L22/20
摘要： A method and structure for controlling a manufacturing tool includes measuring different manufacturing parameters of the tool, transforming a plurality of time series of the manufacturing parameters into intermediate variables based on restrictions and historical reference statistics, generating a surrogate variable based on the intermediate variables, if the surrogate variable exceeds a predetermined limit, identifying a first intermediate variable, of the intermediate variables, that caused the surrogate variable to exceed the predetermined limit and identifying a first manufacturing parameter associated with the first intermediate variable, and inhibiting further operation of the tool until the first manufacturing parameter has been modified to bring the surrogate value within the predetermined limit.

23. 发明授权

US06528363B2 Fabrication of notched gates by passivating partially etched gate sidewalls and then using an isotropic etch 有权
公开(公告)号：US06528363B2
公开(公告)日：2003-03-04
申请号：US09811707
申请日：2001-03-19
申请人： Victor Ku , Maheswaran Surendra , Len Tsou , Ying Zhang
发明人： Victor Ku , Maheswaran Surendra , Len Tsou , Ying Zhang
IPC分类号： H01L21336
CPC分类号： H01L29/42376 , H01L21/28114
摘要： A method of forming a notched gate structure having substantially vertical sidewalls and a sub-0.05 &mgr;m electrical critical dimension is provided. The method includes forming a conductive layer on an insulating layer; forming a mask on the conductive layer so as to at least protect a portion of the conductive layer; anisotropically etching the conductive layer not protected by the mask so as to thin the conductive layer to a predetermined thickness and to form a conductive feature underlying the mask, the conductive feature having substantially vertical sidewalls; forming a passivating layer at least on the substantially vertical sidewalls; and isotropically etching remaining conductive layer not protected by the mask to remove the predetermined thickness thereby exposing a lower portion of said conductive feature not containing the passivating layer, while simultaneously removing notched regions in the lower portion of the conductive feature.

24. 发明授权

US08386995B2 Managing computing deployment in presence of variable workload 有权
标题翻译：在存在可变工作负载的情况下管理计算部署
公开(公告)号：US08386995B2
公开(公告)日：2013-02-26
申请号：US11763726
申请日：2007-06-15
申请人： David Wiley Coleman , Steven E. Froehlich , Joseph L. Hellerstein , Lawrence S. Hsiung , Edwin Richie Lassettre , Todd William Mummert , Mukund Raghavachari , Lance Warren Russell , Maheswaran Surendra , Noshir Cavas Wadia , Peng Ye
发明人： David Wiley Coleman , Steven E. Froehlich , Joseph L. Hellerstein , Lawrence S. Hsiung , Edwin Richie Lassettre , Todd William Mummert , Mukund Raghavachari , Lance Warren Russell , Maheswaran Surendra , Noshir Cavas Wadia , Peng Ye
IPC分类号： G06F9/44
CPC分类号： G06F11/008
摘要： Automated or autonomic techniques for managing deployment of one or more resources in a computing environment based on varying workload levels. The automated techniques may comprise predicting a future workload level based on data associated with the computing environment. Then, an estimation is performed to determine whether a current resource deployment is insufficient, sufficient, or overly sufficient to satisfy the future workload level. Then, one or more actions are caused to be taken when the current resource deployment is estimated to be insufficient or overly sufficient to satisfy the future workload level. Actions may comprise resource provisioning, resource tuning and/or admission control.
摘要翻译：用于根据不同的工作负载水平管理计算环境中的一个或多个资源的部署的自动或自主技术。自动化技术可以包括基于与计算环境相关联的数据预测未来的工作负载水平。然后，执行估计以确定当前资源部署是否不充足，足够或过度足以满足未来的工作负载水平。然后，当估计当前资源部署不足够或过度足以满足未来的工作负载级别时，会采取一个或多个动作。动作可以包括资源调配，资源调整和/或准入控制。

25. 发明授权

US07716016B2 Method and apparatus for automatic uncertainty-based management feedback controller 有权
标题翻译：自动不确定性管理反馈控制器的方法和装置
公开(公告)号：US07716016B2
公开(公告)日：2010-05-11
申请号：US11479485
申请日：2006-06-30
申请人： Yixin Diao , Hidayatullah Habeebullah Shaikh , Maheswaran Surendra
发明人： Yixin Diao , Hidayatullah Habeebullah Shaikh , Maheswaran Surendra
IPC分类号： G06F11/30
CPC分类号： H04L67/22 , G06F11/3452 , G06F11/3466 , G06F11/3495 , G06F2201/81
摘要： Improved management feedback-based controller techniques are disclosed for use in accordance with a computing system. For example, a method for managing a computing system includes the following steps. At least one measured performance metric is obtained from the computing system being managed. At least one control input value is generated based on parameters including a control error and a control deadzone such that uncertainty associated with the computing system is accounted for in accordance with the parameters. The control error is determined from a computation comprising the at least one measured performance metric and at least one performance metric goal. The control deadzone is defined such that the control input value is not generated when the control error is within the control deadzone. The control input value is sent to the computing system to effectuate achievement of the at least one performance metric goal associated with the computing system.
摘要翻译：公开了改进的基于管理反馈的控制器技术以根据计算系统使用。例如，用于管理计算系统的方法包括以下步骤。从被管理的计算系统获得至少一个测量的性能度量。基于包括控制误差和控制死区的参数产生至少一个控制输入值，使得根据参数考虑与计算系统相关联的不确定性。控制误差由包括至少一个测量性能度量和至少一个性能度量目标的计算确定。控制死区被定义为当控制误差在控制死区内时不产生控制输入值。将控制输入值发送到计算系统以实现与计算系统相关联的至少一个性能度量目标的实现。

26. 发明申请

US20080263563A1 METHOD AND APPARATUS FOR ONLINE SAMPLE INTERVAL DETERMINATION 失效
标题翻译：在线样品间隔测定的方法和装置
公开(公告)号：US20080263563A1
公开(公告)日：2008-10-23
申请号：US12165009
申请日：2008-06-30
申请人： Yixin Diao , Joseph L. Hellerstein , Sam Sampson Lightstone , Adam J. Storm , Maheswaran Surendra
发明人： Yixin Diao , Joseph L. Hellerstein , Sam Sampson Lightstone , Adam J. Storm , Maheswaran Surendra
IPC分类号： G06F9/50
CPC分类号： G06F11/3495 , G06F9/5016 , G06F9/5033 , G06F11/3419 , G06F11/3452 , G06F2201/87
摘要： In one embodiment, functional system elements are added to an autonomic manager to enable automatic online sample interval selection. In another embodiment, a method for determining the sample interval by continually characterizing the system workload behavior includes monitoring the system data and analyzing the degree to which the workload is stationary. This makes the online optimization method less sensitive to system noise and capable of being adapted to handle different workloads. The effectiveness of the autonomic optimizer is thereby improved, making it easier to manage a wide range of systems.
摘要翻译：在一个实施例中，将功能系统元件添加到自主管理器以启用自动在线采样间隔选择。在另一个实施例中，用于通过连续地表征系统工作负载行为来确定采样间隔的方法包括监视系统数据并分析工作负载静止的程度。这使得在线优化方法对系统噪声不太敏感，并且能够适应于处理不同的工作负载。从而改进了自主优化器的有效性，从而更容易地管理广泛的系统。

27. 发明申请

US20060112075A1 Systems and methods for business-level resource optimizations in computing utilities 失效
标题翻译：计算实用程序中业务级资源优化的系统和方法
公开(公告)号：US20060112075A1
公开(公告)日：2006-05-25
申请号：US10993269
申请日：2004-11-19
申请人： Joseph Hellerstein , Kaan Katircioglu , Maheswaran Surendra
发明人： Joseph Hellerstein , Kaan Katircioglu , Maheswaran Surendra
IPC分类号： G06F17/30
CPC分类号： G06Q10/06 , Y10S707/99933 , Y10S707/99935 , Y10S707/99943
摘要： Techniques are provided for use in accordance with relates to computing utilities. For example, in one aspect of the invention, a method for use in a computing utility, wherein the computing utility comprises a plurality of application service provider systems and a utility controller, and each application service provider system comprising an application controller, comprises the following steps. An application request to one of the plurality of application service provider systems is obtained. Then, in response to the application request, at least one of: (i) the application controller of the application service provider system to which the application request is directed computes a value of a business metric associated with a resource action; and (ii) the utility controller computes a value of a business metric associated with a resource action.
摘要翻译：根据与计算实用程序有关的技术被提供用于使用。例如，在本发明的一个方面，一种在计算实用程序中使用的方法，其中所述计算实用程序包括多个应用服务提供者系统和效用控制器，并且包括应用控制器的每个应用服务提供商系统包括以下脚步。获得对多个应用服务提供商系统之一的应用请求。然后，响应于所述应用请求，至少一个：（i）应用请求所针对的应用服务提供商系统的应用控制器计算与资源动作相关联的业务度量的值; 和（ii）公用事业控制器计算与资源动作相关联的业务度量的值。

28. 发明授权

US07039559B2 Methods and apparatus for performing adaptive and robust prediction 失效
标题翻译：用于执行自适应和鲁棒预测的方法和装置
公开(公告)号：US07039559B2
公开(公告)日：2006-05-02
申请号：US10385265
申请日：2003-03-10
申请人： Steven E. Froehlich , Joseph L. Hellerstein , Edwin Richie Lassettre , Todd William Mummert , Maheswaran Surendra
发明人： Steven E. Froehlich , Joseph L. Hellerstein , Edwin Richie Lassettre , Todd William Mummert , Maheswaran Surendra
IPC分类号： G06F3/05
CPC分类号： G06F9/5083 , G06F2209/5019
摘要： Techniques for performing adaptive and robust prediction. Prediction techniques are adaptive in that they use a minimal amount of historical data to make predictions, the amount of data being selectable. The techniques are able to learn quickly about changes in the workload traffic pattern and make predictions, based on such learning, that are useful for proactive response to workload changes. To counter the increased variability in the prediction as a result of using minimal history, robustness is improved by checking model stability at every time interval and revising the model structure as needed to meet designated stability criteria. Furthermore, the short term prediction techniques can be used in conjunction with a long term forecaster.
摘要翻译：用于执行自适应和鲁棒预测的技术。预测技术是自适应的，因为它们使用最少量的历史数据进行预测，数据量可选择。这些技术能够快速了解工作负载流量模式的变化，并根据此类学习进行预测，对于对工作负载变化的主动响应非常有用。为了应对由于使用最小历史而导致的预测增加的变异性，通过在每个时间间隔检查模型稳定性并根据需要修改模型结构来改善鲁棒性以满足指定的稳定性标准。此外，短期预测技术可以与长期预报员结合使用。

29. 发明申请

US20050278381A1 Method and apparatus for online sample interval determination 审中-公开
标题翻译：在线采样间隔确定的方法和装置
公开(公告)号：US20050278381A1
公开(公告)日：2005-12-15
申请号：US10853835
申请日：2004-05-26
申请人： Yixin Diao , Joseph Hellerstein , Sam Lightstone , Adam Storm , Maheswaran Surendra
发明人： Yixin Diao , Joseph Hellerstein , Sam Lightstone , Adam Storm , Maheswaran Surendra
IPC分类号： G06F12/00
CPC分类号： G06F11/3495 , G06F9/5016 , G06F9/5033 , G06F11/3419 , G06F11/3452 , G06F2201/87
摘要： In one embodiment, functional system elements are added to an autonomic manager to enable automatic online sample interval selection. In another embodiment, a method for determining the sample interval by continually characterizing the system workload behavior includes monitoring the system data and analyzing the degree to which the workload is stationary. This makes the online optimization method less sensitive to system noise and capable of being adapted to handle different workloads. The effectiveness of the autonomic optimizer is thereby improved, making it easier to manage a wide range of systems.
摘要翻译：在一个实施例中，将功能系统元件添加到自主管理器以启用自动在线采样间隔选择。在另一个实施例中，用于通过连续地表征系统工作负载行为来确定采样间隔的方法包括监视系统数据并分析工作负载静止的程度。这使得在线优化方法对系统噪声不太敏感，并且能够适应于处理不同的工作负载。从而改进了自主优化器的有效性，从而更容易地管理广泛的系统。

30. 发明申请

US20050164468A1 Selective silicon-on-insulator isolation structure and method 有权
公开(公告)号：US20050164468A1
公开(公告)日：2005-07-28
申请号：US11082993
申请日：2005-03-17
申请人： An Steegen , Maheswaran Surendra , Hsing-Jen Wann , Ying Zhang , Franz Zach , Robert Wong
发明人： An Steegen , Maheswaran Surendra , Hsing-Jen Wann , Ying Zhang , Franz Zach , Robert Wong
IPC分类号： H01L21/336 , H01L21/76 , H01L21/8234 , H01L21/8238 , H01L21/8242 , H01L21/84 , H01L27/12 , H01L29/76 , H01L31/062
CPC分类号： H01L29/66651 , H01L21/823481 , H01L21/823878 , H01L21/84 , H01L27/1203 , H01L29/0653 , H01L29/66772
摘要： A first aspect of the present invention is a method of forming an isolation structure including: (a) providing a semiconductor substrate; (b) forming a buried N-doped region in the substrate; (c) forming a vertical trench in the substrate, the trench extending into the N-doped region; (d) removing the N-doped region to form a lateral trench communicating with and extending perpendicular to the vertical trench; and (e) at least partially filling the lateral trench and filling the vertical trench with one or more insulating materials.

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