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21. 发明申请

US20110096308A1 APPARATUS COMPRISING A ROTATING CONTAMINANT TRAP 审中-公开
标题翻译：包含旋转污染物捕获装置的装置
公开(公告)号：US20110096308A1
公开(公告)日：2011-04-28
申请号：US12985014
申请日：2011-01-05
申请人： Johannes Christiaan Leonardus FRANKEN , Vadim Yevgenyevich Banine , Arnoud Cornelis Wassink
发明人： Johannes Christiaan Leonardus FRANKEN , Vadim Yevgenyevich Banine , Arnoud Cornelis Wassink
IPC分类号： G03B27/52
CPC分类号： G03F7/70916 , B82Y10/00 , F16C32/0603 , F16C32/0685 , F16C33/02 , F16C33/72 , F16C2300/62 , G03F7/70033 , G03F7/70941
摘要： A contaminant trap apparatus arranged in a path of a radiation beam to trap contaminants emanating from a radiation source configured to produce the radiation beam is disclosed. The contaminant trap apparatus includes a rotor having a plurality of channel forming elements defining channels which are arranged substantially parallel to the direction of propagation of the radiation beam, the rotor including electrically chargeable material and arranged to be electrically charged as a result of the operation of the radiation source; and a bearing configured to rotatably hold the rotor with respect to a rotor carrying structure, wherein the apparatus is configured to (i) control or redirect an electrical discharge of the rotor, or (ii) suppress an electrical discharge of the rotor, or (iii) both (i) and (ii).
摘要翻译：公开了一种布置在辐射束的路径中的污染捕集装置，用于捕获从被配置成产生辐射束的辐射源发出的污染物。污染物捕集装置包括具有多个通道形成元件的转子，该多个通道形成元件限定了基本上平行于辐射束的传播方向布置的通道，该转子包括可充电的材料并且被布置为由于操作而导致带电辐射源; 以及构造成相对于转子承载结构可旋转地保持转子的轴承，其中所述装置被配置为（i）控制或重定向转子的放电，或（ii）抑制转子的放电或（ iii）（i）和（ii）。

22. 发明授权

US07889312B2 Apparatus comprising a rotating contaminant trap 失效
标题翻译：包括旋转污染物捕集器的装置
公开(公告)号：US07889312B2
公开(公告)日：2011-02-15
申请号：US11525225
申请日：2006-09-22
申请人： Johannes Christiaan Leonardus Franken , Vadim Yevgenyevich Banine , Arnoud Cornelis Wassink
发明人： Johannes Christiaan Leonardus Franken , Vadim Yevgenyevich Banine , Arnoud Cornelis Wassink
IPC分类号： G03B27/52 , G03B27/54 , G03B27/72
CPC分类号： G03F7/70916 , B82Y10/00 , F16C32/0603 , F16C32/0685 , F16C33/02 , F16C33/72 , F16C2300/62 , G03F7/70033 , G03F7/70941
摘要： A contaminant trap apparatus arranged in a path of a radiation beam to trap contaminants emanating from a radiation source configured to produce the radiation beam is disclosed. The contaminant trap apparatus includes a rotor having a plurality of channel forming elements defining channels which are arranged substantially parallel to the direction of propagation of the radiation beam, the rotor including electrically chargeable material and arranged to be electrically charged as a result of the operation of the radiation source; and a bearing configured to rotatably hold the rotor with respect to a rotor carrying structure, wherein the apparatus is configured to (i) control or redirect an electrical discharge of the rotor, or (ii) suppress an electrical discharge of the rotor, or (iii) both (i) and (ii).
摘要翻译：公开了一种布置在辐射束的路径中的污染物捕集装置，用于捕获从被配置成产生辐射束的辐射源发出的污染物。污染物捕集装置包括具有多个通道形成元件的转子，该多个通道形成元件限定了基本上平行于辐射束的传播方向布置的通道，该转子包括可充电的材料并且被布置为由于操作而导致带电辐射源; 以及构造成相对于转子承载结构可旋转地保持转子的轴承，其中所述装置被配置为（i）控制或重定向转子的放电，或（ii）抑制转子的放电或（ iii）（i）和（ii）。

23. 发明授权

US07442948B2 Contamination barrier and lithographic apparatus 失效
公开(公告)号：US07442948B2
公开(公告)日：2008-10-28
申请号：US11433761
申请日：2006-05-15
申请人： Arnoud Cornelis Wassink
发明人： Arnoud Cornelis Wassink
IPC分类号： H01J65/04
CPC分类号： G03F7/70916 , B82Y10/00 , G03F7/70033 , G03F7/70166
摘要： A rotatable contamination barrier is disclosed. The barrier includes a plurality of closely packed blades for trapping contaminant material coming from an EUV radiation source. The blades are oriented radially relative to a central rotation axis of the contamination barrier. The contamination barrier is segmented in an inner segment and an outer segment relative to the central rotation axis. Accordingly, higher revolution speeds may be attained without compromising the contamination barrier.

24. 发明申请

US20080231820A1 Contamination prevention system, a lithographic apparatus, a radiation source and a method for manufacturing a device 失效
标题翻译：防污染系统，光刻设备，辐射源及其制造方法
公开(公告)号：US20080231820A1
公开(公告)日：2008-09-25
申请号：US11727166
申请日：2007-03-23
申请人： Arnoud Cornelis Wassink
发明人： Arnoud Cornelis Wassink
IPC分类号： G03B27/42
CPC分类号： G03F7/70916 , B82Y10/00 , G03F7/70033 , G03F7/70883
摘要： A contamination prevention system constructed and arranged to prevent material emanating from a radiation source from propagating with radiation from the radiation source into or within a lithographic apparatus. The contamination prevention system includes a channel barrier constructed and arranged to traverse the radiation from the radiation source. The channel barrier includes a plurality of elongated channel members constructed and arranged to absorb or deflect the material. The channel members are rotatable around an axis of rotation by a drive connected to the channel barrier. The contamination prevention system also includes a cooling system provided on an outer surface of the channel barrier.
摘要翻译：一种防污染系统，其被构造和布置成防止从辐射源发出的物质不会从辐射源的辐射传播到光刻设备内或其内。防污染系统包括构造和布置成横穿来自辐射源的辐射的通道屏障。通道阻挡件包括构造和布置成吸收或偏转材料的多个细长通道构件。通道构件通过连接到通道屏障的驱动器围绕旋转轴线旋转。防污染系统还包括设置在通道屏障的外表面上的冷却系统。

25. 发明授权

US07365345B2 Lithographic apparatus, radiation system and filter system 失效
标题翻译：平版印刷设备，辐射系统和过滤系统
公开(公告)号：US07365345B2
公开(公告)日：2008-04-29
申请号：US11317242
申请日：2005-12-27
申请人： Arnoud Cornelis Wassink
发明人： Arnoud Cornelis Wassink
IPC分类号： G21G4/00
CPC分类号： G03F7/70916 , G03F7/70858 , H05G2/001
摘要： A filter system for filtering debris particles out of a predetermined cross-section of the radiation emitted by a radiation source of a lithographic apparatus includes a first set of foils and a second set of foils for trapping the debris particles, and a first heat sink and a second heat sink. Each foil of the first set is thermally connected to the first heat sink, and each foil of the second set is thermally connected to the second heat sink, so that heat is conducted substantially towards the first heat sink through each foil of the first set, and heat is conducted substantially towards the second heat sink through each foil of the second set. The first set extend substantially in a first section of the predetermined cross-section, and the second set extend substantially in a second section of the predetermined cross-section. The first and second sections are substantially non-overlapping.
摘要翻译：用于从由光刻设备的辐射源发射的辐射的预定横截面中过滤碎屑颗粒的过滤系统包括第一组箔和用于捕获碎屑颗粒的第二组箔，以及第一散热器和第二个散热片。第一组的每个箔热连接到第一散热器，并且第二组的每个箔热连接到第二散热器，使得热量基本上朝向第一组的每个箔的第一散热器传导，并且基本上通过第二组的每个箔片向第二散热器传导热量。第一组件基本上在预定横截面的第一部分中延伸，并且第二组件基本上在预定横截面的第二部分中延伸。第一和第二部分基本上不重叠。

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